[Scan]
initial_time=2016-01-18T17:20:48
final_time=2016-01-18T17:21:08
ip_count=19
run=1024
dataset=2
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.3664E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.97032E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=1.76656E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-8.19802E-11
mult1=-9.73894E-9
mult2=-2.71829E-9
rf_tmon=-5.62203E-3
rf_agc=3.223E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.00543E-3
ql5_imon=1.6399E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.41879E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54163E1
cs_ef1b_imon=2.81584E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04689E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=2.59159E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30647E0
lens1_imon=2.82254E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.4928E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.94089E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.30091E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91985E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.94342E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.28866E-8
tplens_vset=1.4E-1
tplens_vmon=1.6889E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26156E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26589E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03135E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=4.04415E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24008E0
ionrepsh_imon=1.74442E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73732E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47801E0
os_ea2_imon=-8.72534E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0617E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11466E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73112E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68288E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.9914E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80949E-1
olens1_imon=7.7873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82748E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.36839E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.21698E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42438E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6454E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.9532E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63261E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23024E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2276E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.13884E-2
chamber_ion_pmon=2.23138E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41873E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16464E-1	-7.97725E-1	-9.13243E0	-9.14297E0	3.26633E-3	9.65118E-2	2.73122E1	-3.26402E1	-3.2639E1	2.68395E1	2.21497E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.15376E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16441E-1	-7.97582E-1	-9.13231E0	-9.14295E0	3.43323E-3	9.66311E-2	2.73225E1	-3.26633E1	-3.25791E1	2.68238E1	2.21401E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.14598E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16393E-1	-7.98082E-1	-9.13186E0	-9.14288E0	3.55244E-3	9.65118E-2	2.73122E1	-3.2626E1	-3.25924E1	2.68436E1	2.21401E-9	2.5199E-3	2.5199E-3	6.28006E-3	2.15002E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.16274E-1	-7.98273E-1	-9.13231E0	-9.14304E0	3.52859E-3	9.64642E-2	2.73334E1	-3.26703E1	-3.26614E1	2.68364E1	2.21306E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.14781E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16274E-1	-7.98202E-1	-9.13253E0	-9.14307E0	3.67165E-3	9.64642E-2	2.73632E1	-3.26727E1	-3.26465E1	2.68216E1	2.21401E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.15563E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16345E-1	-7.98059E-1	-9.1326E0	-9.14338E0	3.76701E-3	9.62019E-2	2.73293E1	-3.26833E1	-3.26279E1	2.68207E1	2.21401E-9	2.5165E-3	2.5165E-3	6.3023E-3	2.13302E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16607E-1	-7.98011E-1	-9.13284E0	-9.14328E0	3.98159E-3	9.65118E-2	2.72787E1	-3.26639E1	-3.2638E1	2.68292E1	2.23278E-9	2.51557E-3	2.51557E-3	6.31925E-3	2.13958E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16417E-1	-7.97939E-1	-9.13281E0	-9.14319E0	3.62396E-3	9.63926E-2	2.7288E1	-3.26549E1	-3.26242E1	2.6846E1	2.2159E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.13685E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16512E-1	-7.97796E-1	-9.13267E0	-9.14297E0	3.60012E-3	9.62496E-2	2.72636E1	-3.26867E1	-3.26194E1	2.68581E1	2.22171E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.14256E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16464E-1	-7.98035E-1	-9.13277E0	-9.14285E0	3.52859E-3	9.64165E-2	2.73351E1	-3.26627E1	-3.25996E1	2.68304E1	2.23107E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.14232E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16607E-1	-7.97772E-1	-9.13231E0	-9.14283E0	3.74317E-3	9.66311E-2	2.73345E1	-3.26585E1	-3.26488E1	2.6837E1	2.23915E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.1407E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16464E-1	-7.97629E-1	-9.13222E0	-9.14311E0	3.69549E-3	9.65357E-2	2.72853E1	-3.26633E1	-3.26476E1	2.68292E1	2.22171E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.15189E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16655E-1	-7.98154E-1	-9.13239E0	-9.14295E0	3.62396E-3	9.66072E-2	2.73508E1	-3.26536E1	-3.26062E1	2.68346E1	2.21401E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.13698E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16464E-1	-7.97701E-1	-9.13236E0	-9.14288E0	3.52859E-3	9.62973E-2	2.73452E1	-3.26661E1	-3.26236E1	2.68267E1	2.22171E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.14256E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16679E-1	-7.97796E-1	-9.13219E0	-9.14316E0	3.67165E-3	9.63211E-2	2.73327E1	-3.2632E1	-3.26134E1	2.68388E1	2.21401E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.15002E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16488E-1	-7.97653E-1	-9.13229E0	-9.14283E0	3.74317E-3	9.62257E-2	2.73175E1	-3.26738E1	-3.26136E1	2.68376E1	2.21401E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.13685E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16441E-1	-7.97772E-1	-9.13246E0	-9.14288E0	3.91006E-3	9.62019E-2	2.73309E1	-3.26603E1	-3.26086E1	2.68286E1	2.21497E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.13513E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16417E-1	-7.97892E-1	-9.13246E0	-9.14323E0	3.93391E-3	9.61781E-2	2.7355E1	-3.26464E1	-3.26332E1	2.68406E1	2.2372E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.13327E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16441E-1	-7.97844E-1	-9.13229E0	-9.14304E0	3.86238E-3	9.62734E-2	2.73511E1	-3.26449E1	-3.25959E1	2.68412E1	2.23869E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.14415E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16584E-1	-7.98011E-1	-9.13246E0	-9.14321E0	4.00543E-3	9.63211E-2	2.73112E1	-3.26589E1	-3.26156E1	2.68288E1	2.23138E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13884E-2