[Scan]
initial_time=2016-01-18T17:21:15
final_time=2016-01-18T17:21:34
ip_count=19
run=1024
dataset=2
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.37023E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.93584E-9
ql3_vset=
ql3_vmon=-9.13258E0
ql3_imon=1.65045E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-6.14166E-11
mult1=-9.43937E-9
mult2=-2.73258E-9
rf_tmon=-5.21539E-3
rf_agc=3.23602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.65527E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68717E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=2.58474E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31608E0
lens1_imon=2.72161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0345E1
cs_ea2_imon=1.47369E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.29998E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=2.36556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19923E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91973E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.9463E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.2865E-8
tplens_vset=1.4E-1
tplens_vmon=1.73997E0
tplens_imon=-1.44333E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.56526E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03147E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.60112E-2
ql6_imon=4.07027E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75354E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46119E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.12786E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73532E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.04036E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.79951E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.70801E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82788E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.87143E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.33234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.45237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.96317E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65966E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.47772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29372E-3
inlet_lpb_pmon=2.13605E-2
chamber_ion_pmon=2.23187E-9
chamber_cvt_pmon=2.52264E-3
foreline_cvt_pmon=2.52264E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89926E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16703E-1	-7.98512E-1	-9.13215E0	-9.14285E0	3.6478E-3	9.62019E-2	2.73128E1	-3.26673E1	-3.26042E1	2.68394E1	2.23678E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.14415E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16679E-1	-7.98273E-1	-9.13236E0	-9.14335E0	3.6478E-3	9.5892E-2	2.73486E1	-3.26652E1	-3.25856E1	2.68298E1	2.23392E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16703E-1	-7.98392E-1	-9.13229E0	-9.14316E0	3.76701E-3	9.62734E-2	2.73144E1	-3.26648E1	-3.26249E1	2.68389E1	2.23566E-9	2.51693E-3	2.51693E-3	6.31858E-3	2.13523E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16584E-1	-7.98345E-1	-9.13243E0	-9.14321E0	4.05312E-3	9.62257E-2	2.73574E1	-3.2638E1	-3.26494E1	2.6834E1	2.23678E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.12594E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16655E-1	-7.98082E-1	-9.13277E0	-9.14304E0	4.00543E-3	9.63926E-2	2.72951E1	-3.26868E1	-3.25735E1	2.6822E1	2.2406E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16512E-1	-7.97844E-1	-9.13262E0	-9.14314E0	4.14848E-3	9.62496E-2	2.73057E1	-3.26717E1	-3.26116E1	2.68418E1	2.23915E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16846E-1	-7.97772E-1	-9.13272E0	-9.14302E0	4.12464E-3	9.61781E-2	2.73694E1	-3.2638E1	-3.2632E1	2.68538E1	2.23487E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.12957E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16965E-1	-7.97772E-1	-9.13272E0	-9.14316E0	3.91006E-3	9.61304E-2	2.73316E1	-3.26543E1	-3.26266E1	2.68238E1	2.23138E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16917E-1	-7.97772E-1	-9.13255E0	-9.14323E0	3.76701E-3	9.61542E-2	2.73131E1	-3.2637E1	-3.26107E1	2.68213E1	2.23915E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.14628E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16631E-1	-7.98154E-1	-9.13274E0	-9.14314E0	3.76701E-3	9.61542E-2	2.73009E1	-3.26488E1	-3.26242E1	2.68328E1	2.24304E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.13327E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16822E-1	-7.98059E-1	-9.13279E0	-9.14314E0	3.93391E-3	9.59396E-2	2.7311E1	-3.26785E1	-3.2649E1	2.68285E1	2.23623E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.13884E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16846E-1	-7.97892E-1	-9.13286E0	-9.14285E0	3.48091E-3	9.60827E-2	2.73181E1	-3.26585E1	-3.26083E1	2.68424E1	2.23526E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.12957E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16727E-1	-7.97939E-1	-9.13248E0	-9.14297E0	3.52859E-3	9.61304E-2	2.72968E1	-3.26543E1	-3.26207E1	2.68279E1	2.24155E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.1332E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.1687E-1	-7.97796E-1	-9.13255E0	-9.1429E0	3.74317E-3	9.59396E-2	2.73478E1	-3.26362E1	-3.26254E1	2.68106E1	2.23487E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.13139E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16798E-1	-7.98321E-1	-9.13241E0	-9.14283E0	3.52859E-3	9.62019E-2	2.73195E1	-3.26609E1	-3.2614E1	2.68304E1	2.24109E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.13884E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.1706E-1	-7.98178E-1	-9.1326E0	-9.14276E0	3.50475E-3	9.59635E-2	2.73741E1	-3.26708E1	-3.26154E1	2.68124E1	2.23869E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.14232E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16894E-1	-7.98488E-1	-9.1327E0	-9.1429E0	3.52859E-3	9.61781E-2	2.73063E1	-3.2652E1	-3.26119E1	2.68157E1	2.23773E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.1405E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16941E-1	-7.98392E-1	-9.1325E0	-9.14323E0	3.62396E-3	9.5892E-2	2.73219E1	-3.26651E1	-3.265E1	2.68575E1	2.23332E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16584E-1	-7.98416E-1	-9.13234E0	-9.14278E0	3.55244E-3	9.62734E-2	2.73346E1	-3.26366E1	-3.26119E1	2.6834E1	2.22726E-9	2.51739E-3	2.51739E-3	6.29128E-3	2.15148E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16655E-1	-7.98249E-1	-9.13258E0	-9.14285E0	4.05312E-3	9.60112E-2	2.73532E1	-3.26633E1	-3.26026E1	2.68334E1	2.23187E-9	2.52264E-3	2.52264E-3	6.29372E-3	2.13605E-2