[Scan]
initial_time=2016-01-18T17:21:41
final_time=2016-01-18T17:22:01
ip_count=19
run=1024
dataset=2
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36367E-8
ql2_vset=
ql2_vmon=-7.97606E-1
ql2_imon=1.95673E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.92404E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-8.51274E-11
mult1=-9.15488E-9
mult2=-2.82872E-9
rf_tmon=-4.65956E-3
rf_agc=3.2531E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=1.64305E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.8234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.5696E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33891E0
lens1_imon=2.74684E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.49604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.3084E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.27652E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.35366E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22086E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92014E2
cs_nozzle_imon=1.93708E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02236E1
cs_anode1_imon=2.94702E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.3014E-8
tplens_vset=1.4E-1
tplens_vmon=1.69731E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26373E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03153E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.02106E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24068E0
ionrepsh_imon=1.75632E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75078E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48702E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00702E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.42058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68507E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.00504E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.75747E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.62392E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82759E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86867E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.40078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07089E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6389E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.93867E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63213E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6555E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69427E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22857E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.13314E-2
chamber_ion_pmon=2.23825E-9
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31662E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.16894E-1	-7.98059E-1	-9.13265E0	-9.14288E0	3.86238E-3	9.61542E-2	2.73476E1	-3.26555E1	-3.26095E1	2.68412E1	2.21593E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.13513E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16798E-1	-7.98297E-1	-9.1326E0	-9.14285E0	3.93391E-3	9.61781E-2	2.73724E1	-3.26474E1	-3.26334E1	2.6845E1	2.23202E-9	2.5131E-3	2.5131E-3	6.29665E-3	2.1187E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16822E-1	-7.98011E-1	-9.13224E0	-9.1429E0	3.83854E-3	9.68218E-2	2.73677E1	-3.26446E1	-3.26115E1	2.68499E1	2.21891E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.12392E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16536E-1	-7.98035E-1	-9.13255E0	-9.14295E0	3.83854E-3	9.65118E-2	2.73442E1	-3.26609E1	-3.26362E1	2.68298E1	2.22796E-9	2.51603E-3	2.51603E-3	6.33388E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16393E-1	-7.98011E-1	-9.13255E0	-9.14292E0	3.6478E-3	9.65118E-2	2.72889E1	-3.26398E1	-3.26062E1	2.68328E1	2.22075E-9	2.51116E-3	2.51116E-3	6.32386E-3	2.14256E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16655E-1	-7.97987E-1	-9.13231E0	-9.14311E0	3.43323E-3	9.63211E-2	2.72961E1	-3.26512E1	-3.25948E1	2.68178E1	2.21989E-9	2.51581E-3	2.51581E-3	6.29624E-3	2.13334E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.1656E-1	-7.97963E-1	-9.13267E0	-9.1428E0	3.62396E-3	9.62019E-2	2.73411E1	-3.26632E1	-3.25806E1	2.68406E1	2.23487E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.14232E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16631E-1	-7.97892E-1	-9.13265E0	-9.14283E0	3.74317E-3	9.61065E-2	2.73039E1	-3.26408E1	-3.25977E1	2.68046E1	2.23678E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.1332E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16512E-1	-7.97653E-1	-9.13239E0	-9.14268E0	3.52859E-3	9.66311E-2	2.73192E1	-3.26591E1	-3.26119E1	2.68538E1	2.23332E-9	2.51116E-3	2.51116E-3	6.34037E-3	2.13327E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16631E-1	-7.97963E-1	-9.13248E0	-9.14302E0	3.67165E-3	9.65357E-2	2.7311E1	-3.26266E1	-3.26319E1	2.68256E1	2.23623E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16751E-1	-7.98035E-1	-9.13248E0	-9.14288E0	4.05312E-3	9.6035E-2	2.73021E1	-3.26621E1	-3.25948E1	2.68581E1	2.24155E-9	2.52599E-3	2.52599E-3	6.28056E-3	2.12957E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16631E-1	-7.97796E-1	-9.13248E0	-9.14309E0	3.50475E-3	9.64403E-2	2.73263E1	-3.26319E1	-3.26691E1	2.68337E1	2.24499E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.14628E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16679E-1	-7.97939E-1	-9.13224E0	-9.14288E0	3.74317E-3	9.66311E-2	2.73118E1	-3.2645E1	-3.26591E1	2.68088E1	2.24499E-9	2.51225E-3	2.51225E-3	6.30192E-3	2.14442E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16441E-1	-7.97844E-1	-9.13241E0	-9.14319E0	3.76701E-3	9.64165E-2	2.73423E1	-3.26569E1	-3.26082E1	2.68302E1	2.24012E-9	2.51443E-3	2.51443E-3	6.29098E-3	2.13698E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.1656E-1	-7.97868E-1	-9.13248E0	-9.1429E0	3.8147E-3	9.61304E-2	2.73186E1	-3.26395E1	-3.26205E1	2.68352E1	2.23927E-9	2.51926E-3	2.51926E-3	6.33131E-3	2.15062E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16536E-1	-7.97677E-1	-9.13241E0	-9.14297E0	3.43323E-3	9.62257E-2	2.73496E1	-3.26693E1	-3.26386E1	2.68472E1	2.24062E-9	2.51915E-3	2.51915E-3	6.30182E-3	2.12768E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16607E-1	-7.97653E-1	-9.13224E0	-9.14302E0	3.50475E-3	9.63211E-2	2.73361E1	-3.26691E1	-3.26192E1	2.68239E1	2.23332E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.1185E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16822E-1	-7.97844E-1	-9.13219E0	-9.14314E0	3.8147E-3	9.62496E-2	2.73772E1	-3.26891E1	-3.26068E1	2.6825E1	2.23535E-9	2.51721E-3	2.51721E-3	6.34789E-3	2.1326E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16727E-1	-7.97629E-1	-9.1321E0	-9.1428E0	3.83854E-3	9.63926E-2	2.7296E1	-3.26676E1	-3.26562E1	2.68412E1	2.23297E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.13867E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16822E-1	-7.97606E-1	-9.13219E0	-9.14295E0	3.91006E-3	9.62496E-2	2.73315E1	-3.26464E1	-3.26373E1	2.68507E1	2.23825E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.13314E-2