[Scan]
initial_time=2016-01-18T17:22:08
final_time=2016-01-18T17:22:28
ip_count=19
run=1024
dataset=2
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36188E-8
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=1.98332E-9
ql3_vset=
ql3_vmon=-9.13229E0
ql3_imon=1.90973E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-6.43969E-11
mult1=-9.78855E-9
mult2=-2.68268E-9
rf_tmon=-4.15193E-3
rf_agc=3.36881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.00543E-3
ql5_imon=1.65558E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61371E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=2.84629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.57689E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3466E0
lens1_imon=2.63882E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03572E1
cs_ea2_imon=1.46056E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84689E1
cs_ef1a_imon=2.94082E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.30492E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14934E1
os_ea1_imon=2.34682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.20749E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92012E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.93282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20363E0
olens4_imon=3.29798E-8
tplens_vset=1.4E-1
tplens_vmon=1.69806E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03165E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=4.03781E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.75504E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.1695E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-7.87326E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05224E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07077E-1
os_ef2bup_imon=-5.19145E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11407E1
os_restr2_imon=3.42701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01676E1
cs_anode2_imon=2.22874E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.10623E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.98077E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.81625E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.72662E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56602E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.76186E-1
window_imon=-7.57025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82766E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.87045E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92708E3
multa_neg_imon=7.88069E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.26837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.42478E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07242E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64098E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.97265E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61607E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65888E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.57092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03196E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.12413E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15389E-1
res40_imon=-2.56763E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16751E-1	-7.97629E-1	-9.13227E0	-9.14321E0	3.6478E-3	9.63688E-2	2.73476E1	-3.26968E1	-3.2613E1	2.68328E1	2.23773E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.12957E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16679E-1	-7.97868E-1	-9.13248E0	-9.14307E0	3.74317E-3	9.61304E-2	2.73437E1	-3.26444E1	-3.26352E1	2.68358E1	2.23773E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.13685E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16655E-1	-7.97772E-1	-9.13241E0	-9.14342E0	3.74317E-3	9.63449E-2	2.73161E1	-3.26515E1	-3.26214E1	2.6829E1	2.23863E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.13712E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16703E-1	-7.97868E-1	-9.13231E0	-9.14292E0	3.6478E-3	9.64403E-2	2.737E1	-3.26585E1	-3.26068E1	2.68484E1	2.23297E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.13502E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16536E-1	-7.9782E-1	-9.13224E0	-9.14321E0	3.67165E-3	9.62973E-2	2.73195E1	-3.26771E1	-3.26554E1	2.68328E1	2.23964E-9	2.51417E-3	2.51417E-3	6.31817E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16441E-1	-7.97725E-1	-9.13229E0	-9.14295E0	3.67165E-3	9.65595E-2	2.73393E1	-3.26627E1	-3.2638E1	2.68358E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.13327E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16584E-1	-7.98106E-1	-9.13241E0	-9.14321E0	3.76701E-3	9.64165E-2	2.73104E1	-3.26649E1	-3.25977E1	2.68196E1	2.24109E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13698E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16369E-1	-7.9782E-1	-9.13234E0	-9.14292E0	3.45707E-3	9.64403E-2	2.73057E1	-3.26338E1	-3.26242E1	2.68274E1	2.23526E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12957E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16417E-1	-7.98106E-1	-9.13224E0	-9.14297E0	3.74317E-3	9.63211E-2	2.73063E1	-3.26494E1	-3.25936E1	2.6825E1	2.2406E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.13867E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16488E-1	-7.97987E-1	-9.13236E0	-9.14309E0	3.74317E-3	9.61781E-2	2.73646E1	-3.26591E1	-3.26074E1	2.68256E1	2.22481E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.15422E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16584E-1	-7.97796E-1	-9.1325E0	-9.14304E0	4.02927E-3	9.64165E-2	2.7385E1	-3.26374E1	-3.26092E1	2.6849E1	2.21401E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.13867E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16584E-1	-7.97987E-1	-9.13246E0	-9.14295E0	3.6478E-3	9.63688E-2	2.73351E1	-3.26801E1	-3.26344E1	2.68364E1	2.22558E-9	2.51334E-3	2.51334E-3	6.32936E-3	2.13698E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16584E-1	-7.98297E-1	-9.13236E0	-9.14295E0	3.74317E-3	9.63211E-2	2.73874E1	-3.27131E1	-3.25413E1	2.68701E1	2.21882E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.14442E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16441E-1	-7.9813E-1	-9.13236E0	-9.14261E0	3.67165E-3	9.62973E-2	2.73227E1	-3.26698E1	-3.25953E1	2.68501E1	2.21689E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.13698E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16512E-1	-7.98059E-1	-9.13231E0	-9.14297E0	3.76701E-3	9.62019E-2	2.7335E1	-3.26686E1	-3.26241E1	2.68199E1	2.2268E-9	2.51265E-3	2.51265E-3	6.323E-3	2.13659E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16727E-1	-7.98082E-1	-9.13262E0	-9.14309E0	3.8147E-3	9.65118E-2	2.73267E1	-3.26621E1	-3.26176E1	2.6837E1	2.21401E-9	2.5118E-3	2.5118E-3	6.31902E-3	2.12761E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16679E-1	-7.97915E-1	-9.13279E0	-9.14278E0	3.98159E-3	9.66311E-2	2.73754E1	-3.26675E1	-3.26398E1	2.6813E1	2.21401E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.13698E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16441E-1	-7.97725E-1	-9.13227E0	-9.14273E0	4.00543E-3	9.62257E-2	2.73069E1	-3.26832E1	-3.2629E1	2.68238E1	2.21401E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13698E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16464E-1	-7.97725E-1	-9.13227E0	-9.14309E0	4.07696E-3	9.62496E-2	2.7344E1	-3.26437E1	-3.26514E1	2.68448E1	2.21401E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.13685E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16369E-1	-7.97653E-1	-9.13229E0	-9.14283E0	4.00543E-3	9.65118E-2	2.73147E1	-3.26621E1	-3.26284E1	2.68466E1	2.21401E-9	2.51096E-3	2.51096E-3	6.32356E-3	2.12413E-2