[Scan]
initial_time=2016-01-18T17:22:35
final_time=2016-01-18T17:22:54
ip_count=19
run=1024
dataset=2
scan=130
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.3614E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.94683E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=2.03526E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-3.64542E-11
mult1=-9.02999E-9
mult2=-2.78249E-9
rf_tmon=-4.24205E-3
rf_agc=3.38563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=1.64002E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62667E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00312E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53942E1
cs_ef1b_imon=2.83693E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02069E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04433E1
cs_ea1_imon=2.58263E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37131E0
lens1_imon=2.5598E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64895E1
os_ef1alow_imon=2.96755E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.46105E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84675E1
cs_ef1a_imon=2.94547E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.31024E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11348E1
os_restr1_imon=4.25687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14844E1
os_ea1_imon=2.35315E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63704E1
os_ef1bup_imon=3.08806E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24149E0
cs_ionrep_imon=1.18102E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91982E2
cs_nozzle_imon=1.93502E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01859E1
cs_anode1_imon=2.95707E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.30634E-8
tplens_vset=1.4E-1
tplens_vmon=1.72254E0
tplens_imon=-3.07804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.5026E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.55239E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03145E2
lens6_imon=2.98129E-4
ql6_vset=1.0E-1
ql6_vmon=9.62496E-2
ql6_imon=4.04707E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25959E0
ionrepsh_imon=1.75642E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33801E1
lens5b_imon=2.18431E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74532E1
cs_ef2b_imon=3.12062E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46673E0
os_ea2_imon=-8.50627E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06179E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71357E1
cs_ef2a_imon=3.17115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05144E0
os_ef2alow_imon=-2.51818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95137E-1
os_ef2bup_imon=-5.20161E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.42003E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29254E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01771E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.12225E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.09738E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.03564E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.80414E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14075E0
cs_ionaccel_imon=-1.72849E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56586E1
einzel_imon=7.61673E-6
window_vset=0.0E0
window_vmon=2.78102E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82763E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86806E1
mask2_imon=-4.635E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92589E3
multa_neg_imon=7.40777E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.55797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34315E0
defgridb_imon=6.16489E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.43237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07136E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64328E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.95534E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62964E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65486E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47849E-2
os_fil2_imon=-2.65627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3503E-1
cs_fil2_imon=-2.91201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.06215E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22736E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.1403E-2
chamber_ion_pmon=2.24294E-9
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.01602E-1
res40_imon=-2.45455E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16727E-1	-7.97892E-1	-9.13243E0	-9.14259E0	3.93391E-3	9.63688E-2	2.73069E1	-3.26461E1	-3.26337E1	2.68395E1	2.217E-9	2.51498E-3	2.51498E-3	6.3131E-3	2.13341E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16703E-1	-7.97963E-1	-9.13234E0	-9.14276E0	3.86238E-3	9.6035E-2	2.72788E1	-3.26585E1	-3.26058E1	2.683E1	2.23583E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.13867E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16679E-1	-7.97844E-1	-9.13229E0	-9.14288E0	3.69549E-3	9.6035E-2	2.73607E1	-3.26283E1	-3.26492E1	2.6836E1	2.21597E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.12957E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.1656E-1	-7.97963E-1	-9.13219E0	-9.14295E0	3.67165E-3	9.61542E-2	2.73255E1	-3.26783E1	-3.25936E1	2.68406E1	2.21586E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16441E-1	-7.97892E-1	-9.13243E0	-9.14271E0	3.6478E-3	9.63449E-2	2.72967E1	-3.26458E1	-3.25575E1	2.684E1	2.23915E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.1407E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16751E-1	-7.97772E-1	-9.1321E0	-9.14288E0	3.76701E-3	9.63926E-2	2.73219E1	-3.26585E1	-3.26224E1	2.6846E1	2.21593E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.15189E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16488E-1	-7.97796E-1	-9.13212E0	-9.14311E0	3.60012E-3	9.66311E-2	2.72947E1	-3.26529E1	-3.25966E1	2.68406E1	2.23041E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.1407E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16679E-1	-7.97391E-1	-9.13212E0	-9.14266E0	3.57628E-3	9.62019E-2	2.73115E1	-3.26474E1	-3.26671E1	2.68221E1	2.23665E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.1258E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16512E-1	-7.97796E-1	-9.1321E0	-9.14304E0	3.76701E-3	9.64165E-2	2.73424E1	-3.26658E1	-3.26432E1	2.68163E1	2.21401E-9	2.51814E-3	2.51814E-3	6.31269E-3	2.13314E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09309E0	-8.16345E-1	-7.98011E-1	-9.13229E0	-9.14292E0	3.86238E-3	9.64403E-2	2.73135E1	-3.26452E1	-3.2617E1	2.67944E1	2.22284E-9	2.51359E-3	2.51359E-3	6.30182E-3	2.13523E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16226E-1	-7.97915E-1	-9.13205E0	-9.14333E0	3.62396E-3	9.66311E-2	2.73321E1	-3.26657E1	-3.26206E1	2.68785E1	2.24207E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.13884E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.16131E-1	-7.97486E-1	-9.13212E0	-9.14276E0	3.76701E-3	9.63449E-2	2.73327E1	-3.26597E1	-3.26092E1	2.68689E1	2.23915E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.13513E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16321E-1	-7.97844E-1	-9.13212E0	-9.1428E0	3.55244E-3	9.62734E-2	2.73128E1	-3.25829E1	-3.25812E1	2.68621E1	2.23235E-9	2.53087E-3	2.53087E-3	6.30192E-3	2.13698E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16369E-1	-7.97486E-1	-9.13234E0	-9.14311E0	3.79086E-3	9.63211E-2	2.73538E1	-3.26458E1	-3.26146E1	2.68208E1	2.23678E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.14598E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16274E-1	-7.97677E-1	-9.13239E0	-9.14283E0	3.71933E-3	9.66311E-2	2.73315E1	-3.26717E1	-3.26074E1	2.68124E1	2.23915E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.13698E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.1625E-1	-7.97319E-1	-9.13234E0	-9.14295E0	3.76701E-3	9.64403E-2	2.7334E1	-3.26514E1	-3.26396E1	2.6837E1	2.23429E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.14442E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16154E-1	-7.97868E-1	-9.13255E0	-9.14307E0	3.62396E-3	9.63449E-2	2.73326E1	-3.26676E1	-3.2615E1	2.68221E1	2.23678E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.14598E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16369E-1	-7.97868E-1	-9.13222E0	-9.14297E0	3.43323E-3	9.65118E-2	2.73421E1	-3.26141E1	-3.26152E1	2.68178E1	2.24207E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.13327E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16011E-1	-7.97892E-1	-9.1326E0	-9.14314E0	3.67165E-3	9.66549E-2	2.72968E1	-3.26331E1	-3.26644E1	2.68279E1	2.23773E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.12957E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16178E-1	-7.97939E-1	-9.13246E0	-9.14297E0	3.71933E-3	9.62496E-2	2.73466E1	-3.26404E1	-3.26146E1	2.684E1	2.24294E-9	2.52131E-3	2.52131E-3	6.31269E-3	2.1403E-2