[Scan]
initial_time=2016-01-18T17:23:01
final_time=2016-01-18T17:23:21
ip_count=19
run=1024
dataset=2
scan=131
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.3656E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=1.9482E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.423E-10
ql4_vset=
ql4_vmon=-9.14292E0
ql4_imon=-5.52177E-11
mult1=-9.71631E-9
mult2=-2.71063E-9
rf_tmon=-3.91761E-3
rf_agc=3.35979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.60012E-3
ql5_imon=1.66681E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68197E0
bslens_imon=2.26024E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19694E1
lens5a_imon=1.98281E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05063E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54241E1
cs_ef1b_imon=2.83768E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02378E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04523E1
cs_ea1_imon=2.57085E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3493E0
lens1_imon=2.71936E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=2.96605E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04082E1
cs_ea2_imon=1.48512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84457E1
cs_ef1a_imon=2.95408E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.31678E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11242E1
os_restr1_imon=4.25874E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15275E1
os_ea1_imon=2.34239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6361E1
os_ef1bup_imon=3.07534E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=1.18504E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92002E2
cs_nozzle_imon=1.93387E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01834E1
cs_anode1_imon=2.95445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.31334E-8
tplens_vset=1.4E-1
tplens_vmon=1.73877E0
tplens_imon=-2.96149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58613E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03128E2
lens6_imon=2.98129E-4
ql6_vset=1.0E-1
ql6_vmon=9.63449E-2
ql6_imon=4.02403E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23006E0
ionrepsh_imon=1.76904E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.17049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.1311E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49513E0
os_ea2_imon=-6.78138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71295E1
cs_ef2a_imon=3.16965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04645E0
os_ef2alow_imon=-2.40964E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78295E-1
os_ef2bup_imon=-5.32137E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11267E1
os_restr2_imon=3.42115E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30846E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01759E1
cs_anode2_imon=2.23737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.1046E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09177E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.03994E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.76254E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12515E0
cs_ionaccel_imon=-1.86322E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56605E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=2.58765E-1
window_imon=-8.60213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82767E2
mask1_imon=2.39144E-4
mask2_vset=0.0E0
mask2_vmon=-1.86693E1
mask2_imon=-6.61857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.48688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.60169E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.20406E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=6.16461E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.42682E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07117E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64411E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30916E1
cs_fil1_imon=9.95222E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62609E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65989E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43654E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.42696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.74983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22859E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.12779E-2
chamber_ion_pmon=2.23731E-9
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.018E-1
res40_imon=-2.52566E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.15916E-1	-7.98178E-1	-9.13239E0	-9.14321E0	3.76701E-3	9.62019E-2	2.73387E1	-3.26474E1	-3.26405E1	2.68447E1	2.21499E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.13523E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16107E-1	-7.97939E-1	-9.1325E0	-9.14302E0	3.57628E-3	9.63926E-2	2.73761E1	-3.26799E1	-3.26266E1	2.6828E1	2.21401E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.12957E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16059E-1	-7.97939E-1	-9.13255E0	-9.14309E0	3.33786E-3	9.62734E-2	2.7312E1	-3.26474E1	-3.26474E1	2.68279E1	2.21401E-9	2.52473E-3	2.52473E-3	6.30182E-3	2.13901E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.15892E-1	-7.98082E-1	-9.13234E0	-9.14307E0	3.55244E-3	9.61304E-2	2.73339E1	-3.26567E1	-3.2635E1	2.68466E1	2.21401E-9	2.51709E-3	2.51709E-3	6.31269E-3	2.14748E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16202E-1	-7.98011E-1	-9.13236E0	-9.14297E0	3.62396E-3	9.61781E-2	2.73381E1	-3.26543E1	-3.26212E1	2.68466E1	2.21401E-9	2.51225E-3	2.51225E-3	6.30192E-3	2.1575E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16083E-1	-7.97725E-1	-9.13243E0	-9.14319E0	4.02927E-3	9.64165E-2	2.73496E1	-3.26464E1	-3.26224E1	2.68394E1	2.23041E-9	2.51552E-3	2.51552E-3	6.29645E-3	2.14442E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16083E-1	-7.97772E-1	-9.13241E0	-9.14285E0	3.60012E-3	9.60112E-2	2.73237E1	-3.26585E1	-3.2605E1	2.6819E1	2.22364E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.14442E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.15916E-1	-7.98011E-1	-9.13222E0	-9.1429E0	3.86238E-3	9.62496E-2	2.73236E1	-3.267E1	-3.26347E1	2.68569E1	2.22848E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.1407E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16178E-1	-7.97915E-1	-9.13229E0	-9.14266E0	3.91006E-3	9.66072E-2	2.73015E1	-3.26488E1	-3.2626E1	2.68364E1	2.22516E-9	2.51709E-3	2.51709E-3	6.33919E-3	2.13672E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16274E-1	-7.97677E-1	-9.13236E0	-9.14316E0	3.6478E-3	9.64642E-2	2.73333E1	-3.26693E1	-3.26068E1	2.68274E1	2.22558E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.1407E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16131E-1	-7.97844E-1	-9.13248E0	-9.14328E0	3.57628E-3	9.64165E-2	2.73165E1	-3.26368E1	-3.26311E1	2.68366E1	2.21882E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.14442E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16274E-1	-7.97987E-1	-9.13234E0	-9.14297E0	3.48091E-3	9.65595E-2	2.73197E1	-3.26298E1	-3.26642E1	2.68144E1	2.21401E-9	2.51472E-3	2.51472E-3	6.3282E-3	2.14894E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1625E-1	-7.98082E-1	-9.13236E0	-9.14297E0	3.40939E-3	9.64403E-2	2.71963E1	-3.25623E1	-3.26855E1	2.68178E1	2.21401E-9	2.51642E-3	2.51642E-3	6.3016E-3	2.13939E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16441E-1	-7.97963E-1	-9.13215E0	-9.14321E0	3.67165E-3	9.6035E-2	2.73472E1	-3.26499E1	-3.26215E1	2.68496E1	2.21401E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.13513E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16226E-1	-7.98225E-1	-9.13243E0	-9.14288E0	3.93391E-3	9.59635E-2	2.73182E1	-3.26609E1	-3.26616E1	2.68225E1	2.21401E-9	2.52364E-3	2.52364E-3	6.32784E-3	2.15208E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16274E-1	-7.98082E-1	-9.1321E0	-9.14268E0	3.88622E-3	9.63211E-2	2.73045E1	-3.2638E1	-3.26146E1	2.68382E1	2.22523E-9	2.52106E-3	2.52106E-3	6.31902E-3	2.15123E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16083E-1	-7.98154E-1	-9.13234E0	-9.14307E0	4.00543E-3	9.62257E-2	2.73352E1	-3.26608E1	-3.26508E1	2.6825E1	2.24109E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.14815E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.15725E-1	-7.97892E-1	-9.13231E0	-9.14326E0	3.67165E-3	9.59873E-2	2.73157E1	-3.26838E1	-3.26071E1	2.68472E1	2.23297E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.1332E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16298E-1	-7.98082E-1	-9.13236E0	-9.14299E0	4.07696E-3	9.64403E-2	2.73543E1	-3.26782E1	-3.25884E1	2.68221E1	2.23773E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.12775E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15892E-1	-7.98273E-1	-9.13208E0	-9.14292E0	3.60012E-3	9.63449E-2	2.73466E1	-3.26591E1	-3.26488E1	2.68304E1	2.23731E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.12779E-2