[Scan]
initial_time=2016-01-18T17:23:28
final_time=2016-01-18T17:23:47
ip_count=19
run=1024
dataset=2
scan=132
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.36505E-8
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=1.95873E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.81067E-10
ql4_vset=
ql4_vmon=-9.14326E0
ql4_imon=-5.96762E-11
mult1=-9.5357E-9
mult2=-2.65474E-9
rf_tmon=-5.41366E-3
rf_agc=3.19096E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.65285E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54125E1
cs_ef1b_imon=2.82474E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.60997E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34672E0
lens1_imon=2.77207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.49388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=2.94325E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.31784E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=4.28331E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14579E1
os_ea1_imon=2.33744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.18349E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91981E2
cs_nozzle_imon=1.93561E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=2.95194E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.29629E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03177E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.64642E-2
ql6_imon=4.07892E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=1.7419E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46719E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71449E1
cs_ef2a_imon=3.17157E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11222E1
os_restr2_imon=3.42388E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.28234E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.23777E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68356E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.02422E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.77831E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0213E2
cs_ionfocb_imon=1.47529E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56509E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.55334E-1
window_imon=-8.33481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82744E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86935E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.44314E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6423E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.96854E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6298E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65793E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.53597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.1405E-2
chamber_ion_pmon=2.23297E-9
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33924E-1
res40_imon=-2.50508E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16441E-1	-7.9813E-1	-9.13217E0	-9.14297E0	3.8147E-3	9.62496E-2	2.73144E1	-3.26695E1	-3.26214E1	2.68466E1	2.24012E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.14256E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16464E-1	-7.98035E-1	-9.1321E0	-9.14335E0	3.79086E-3	9.62973E-2	2.73253E1	-3.26597E1	-3.26327E1	2.68406E1	2.21353E-9	2.5199E-3	2.5199E-3	6.30466E-3	2.14815E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16512E-1	-7.97963E-1	-9.13222E0	-9.14302E0	3.91006E-3	9.63449E-2	2.73139E1	-3.2659E1	-3.26195E1	2.68388E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16345E-1	-7.97534E-1	-9.13236E0	-9.14292E0	3.95775E-3	9.62019E-2	2.73387E1	-3.2736E1	-3.26314E1	2.68659E1	2.21401E-9	2.51287E-3	2.51287E-3	6.2863E-3	2.13314E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16345E-1	-7.97844E-1	-9.13246E0	-9.14295E0	3.91006E-3	9.62496E-2	2.73352E1	-3.26915E1	-3.25924E1	2.68285E1	2.21401E-9	2.51334E-3	2.51334E-3	6.34588E-3	2.12587E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.16488E-1	-7.97987E-1	-9.13255E0	-9.14304E0	3.6478E-3	9.64403E-2	2.73281E1	-3.26549E1	-3.26195E1	2.684E1	2.22536E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.1332E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16417E-1	-7.97892E-1	-9.13248E0	-9.14309E0	3.31402E-3	9.62496E-2	2.73375E1	-3.26428E1	-3.2605E1	2.68328E1	2.23869E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.13867E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.16226E-1	-7.98082E-1	-9.13248E0	-9.1433E0	3.67165E-3	9.62257E-2	2.73267E1	-3.26663E1	-3.26146E1	2.68274E1	2.24012E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.14256E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09309E0	-8.16584E-1	-7.98106E-1	-9.13241E0	-9.14297E0	3.33786E-3	9.62019E-2	2.73309E1	-3.26506E1	-3.2596E1	2.68232E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.15189E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16727E-1	-7.98225E-1	-9.13246E0	-9.14285E0	3.93391E-3	9.59635E-2	2.73381E1	-3.26464E1	-3.26146E1	2.68331E1	2.22558E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.14256E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16584E-1	-7.97844E-1	-9.1325E0	-9.14285E0	3.83854E-3	9.64403E-2	2.73316E1	-3.26396E1	-3.26213E1	2.68286E1	2.22536E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.1332E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16441E-1	-7.9782E-1	-9.13208E0	-9.14288E0	3.67165E-3	9.63926E-2	2.7361E1	-3.26801E1	-3.26152E1	2.68214E1	2.23138E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.14442E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16655E-1	-7.97963E-1	-9.13217E0	-9.14295E0	3.62396E-3	9.62973E-2	2.73032E1	-3.25549E1	-3.25998E1	2.68194E1	2.22268E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.14628E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16441E-1	-7.97987E-1	-9.13219E0	-9.14295E0	3.88622E-3	9.61781E-2	2.7358E1	-3.26488E1	-3.26562E1	2.68505E1	2.23369E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.12957E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.1656E-1	-7.97653E-1	-9.13227E0	-9.14261E0	3.62396E-3	9.61542E-2	2.7329E1	-3.26499E1	-3.26229E1	2.68611E1	2.23825E-9	2.51709E-3	2.51709E-3	6.31798E-3	2.12957E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16655E-1	-7.97677E-1	-9.13205E0	-9.14321E0	3.93391E-3	9.61304E-2	2.73364E1	-3.26773E1	-3.26431E1	2.68082E1	2.22875E-9	2.5147E-3	2.5147E-3	6.34661E-3	2.1258E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16417E-1	-7.97725E-1	-9.13217E0	-9.14268E0	4.07696E-3	9.63449E-2	2.73472E1	-3.26482E1	-3.26549E1	2.68424E1	2.23011E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.14598E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16584E-1	-7.97677E-1	-9.13231E0	-9.14316E0	3.95775E-3	9.61542E-2	2.73333E1	-3.26032E1	-3.26068E1	2.68274E1	2.23915E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.13513E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16631E-1	-7.97963E-1	-9.13234E0	-9.14302E0	4.05312E-3	9.61542E-2	2.73417E1	-3.26993E1	-3.25761E1	2.68227E1	2.21401E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.15563E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16441E-1	-7.97629E-1	-9.13224E0	-9.14326E0	4.22001E-3	9.64642E-2	2.73135E1	-3.26849E1	-3.26068E1	2.68356E1	2.23297E-9	2.5131E-3	2.5131E-3	6.28056E-3	2.1405E-2