[Scan]
initial_time=2016-01-18T17:24:21
final_time=2016-01-18T17:24:41
ip_count=19
run=1024
dataset=2
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.3607E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.94663E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=1.78957E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-5.01037E-11
mult1=-9.28285E-9
mult2=-2.78847E-9
rf_tmon=-4.74675E-3
rf_agc=3.32495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.50475E-3
ql5_imon=1.68456E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.25296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12543E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=2.82917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.57861E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.49748E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=2.95279E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.32477E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14567E1
os_ea1_imon=2.34285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21184E0
cs_ionrep_imon=1.19539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92015E2
cs_nozzle_imon=1.93662E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.96072E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.31175E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03121E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.04963E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23588E0
ionrepsh_imon=1.76317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34373E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45938E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7157E1
cs_ef2a_imon=3.17299E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.23199E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68526E1
iondef4_imon=1.11224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.06037E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.82596E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.63562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82758E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.69284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.85288E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.44655E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6482E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30923E1
cs_fil1_imon=9.96624E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62065E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66242E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23539E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.15002E-2
chamber_ion_pmon=2.23623E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.94421E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16393E-1	-7.97892E-1	-9.13191E0	-9.14283E0	3.57628E-3	9.62019E-2	2.73352E1	-3.26472E1	-3.26325E1	2.68505E1	2.21593E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16345E-1	-7.97892E-1	-9.13208E0	-9.14321E0	3.3617E-3	9.61542E-2	2.73381E1	-3.26699E1	-3.26356E1	2.68346E1	2.21401E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.14781E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16345E-1	-7.97939E-1	-9.13248E0	-9.14316E0	3.3617E-3	9.62496E-2	2.73021E1	-3.26488E1	-3.26146E1	2.68526E1	2.21401E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.13698E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16417E-1	-7.97844E-1	-9.13236E0	-9.14311E0	3.26633E-3	9.61781E-2	2.73252E1	-3.26626E1	-3.26396E1	2.6816E1	2.21684E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.13685E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16417E-1	-7.98011E-1	-9.13229E0	-9.14326E0	3.26633E-3	9.60588E-2	2.73271E1	-3.26505E1	-3.26395E1	2.68581E1	2.21401E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.14628E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16154E-1	-7.98035E-1	-9.13255E0	-9.1428E0	3.3617E-3	9.63688E-2	2.7324E1	-3.26502E1	-3.25971E1	2.68442E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.1407E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16345E-1	-7.97915E-1	-9.13229E0	-9.14285E0	3.6478E-3	9.64403E-2	2.73213E1	-3.26843E1	-3.26182E1	2.68484E1	2.23138E-9	2.53087E-3	2.53087E-3	6.30192E-3	2.13698E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16393E-1	-7.98035E-1	-9.13236E0	-9.14295E0	3.67165E-3	9.63688E-2	2.73147E1	-3.26248E1	-3.25912E1	2.68412E1	2.22442E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.13867E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16417E-1	-7.9782E-1	-9.13231E0	-9.14292E0	3.62396E-3	9.6488E-2	2.73159E1	-3.26597E1	-3.2635E1	2.68352E1	2.21695E-9	2.5147E-3	2.5147E-3	6.3074E-3	2.1466E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16393E-1	-7.97915E-1	-9.1325E0	-9.14254E0	3.52859E-3	9.62019E-2	2.73309E1	-3.26446E1	-3.26428E1	2.68136E1	2.22751E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.14256E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.1625E-1	-7.98202E-1	-9.13274E0	-9.14249E0	3.76701E-3	9.62019E-2	2.7349E1	-3.26747E1	-3.2623E1	2.68471E1	2.23678E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.13502E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16083E-1	-7.98082E-1	-9.13229E0	-9.14266E0	3.67165E-3	9.62257E-2	2.73646E1	-3.26248E1	-3.26278E1	2.68406E1	2.22751E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.13142E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16464E-1	-7.9813E-1	-9.13246E0	-9.14285E0	3.79086E-3	9.62973E-2	2.73564E1	-3.26685E1	-3.25741E1	2.6852E1	2.24207E-9	2.5188E-3	2.5188E-3	6.29098E-3	2.14256E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16393E-1	-7.98178E-1	-9.13234E0	-9.14266E0	3.6478E-3	9.61781E-2	2.73015E1	-3.26675E1	-3.26176E1	2.68064E1	2.22364E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.14815E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16226E-1	-7.98345E-1	-9.13205E0	-9.14264E0	3.71933E-3	9.62019E-2	2.73399E1	-3.26506E1	-3.26074E1	2.68298E1	2.23623E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.1575E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16131E-1	-7.98273E-1	-9.13236E0	-9.1429E0	3.69549E-3	9.61065E-2	2.73309E1	-3.26579E1	-3.25966E1	2.68472E1	2.22916E-9	2.51632E-3	2.51632E-3	6.32356E-3	2.15699E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.1625E-1	-7.98202E-1	-9.13248E0	-9.14299E0	3.52859E-3	9.62019E-2	2.73357E1	-3.26549E1	-3.2611E1	2.68286E1	2.24109E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.15002E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16512E-1	-7.98178E-1	-9.1325E0	-9.14292E0	3.55244E-3	9.59873E-2	2.73063E1	-3.26318E1	-3.26144E1	2.68279E1	2.23526E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.15563E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16298E-1	-7.98297E-1	-9.13239E0	-9.14278E0	3.6478E-3	9.62496E-2	2.73228E1	-3.26838E1	-3.26054E1	2.68244E1	2.24012E-9	2.52659E-3	2.52659E-3	6.3074E-3	2.14748E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16631E-1	-7.98225E-1	-9.13248E0	-9.14264E0	3.50475E-3	9.60827E-2	2.72937E1	-3.26627E1	-3.26128E1	2.68526E1	2.23623E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.15002E-2