[Scan]
initial_time=2016-01-18T17:24:48
final_time=2016-01-18T17:25:07
ip_count=19
run=1024
dataset=2
scan=135
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36287E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.98233E-9
ql3_vset=
ql3_vmon=-9.13239E0
ql3_imon=1.02758E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=-4.19855E-11
mult1=-8.46581E-9
mult2=-2.78713E-9
rf_tmon=-5.82676E-3
rf_agc=3.29875E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.86238E-3
ql5_imon=1.64741E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19736E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.57512E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31534E0
lens1_imon=2.48309E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.48215E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.95531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.33302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=2.34859E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.17351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.9499E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.33091E-8
tplens_vset=1.4E-1
tplens_vmon=1.70927E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26121E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26565E1
iondef2_imon=1.55258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03158E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.60112E-2
ql6_imon=4.02001E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22319E0
ionrepsh_imon=1.76742E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34088E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46918E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06159E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73422E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68063E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.06023E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.8509E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82754E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.38871E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.32146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.41825E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64738E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=9.94576E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6263E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66462E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7549E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.01535E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22926E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33757E-3
inlet_lpb_pmon=2.14828E-2
chamber_ion_pmon=2.24146E-9
chamber_cvt_pmon=2.53128E-3
foreline_cvt_pmon=2.53128E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86322E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.1687E-1	-7.98154E-1	-9.13246E0	-9.1428E0	3.74317E-3	9.6488E-2	2.73104E1	-3.26526E1	-3.26213E1	2.68406E1	2.24012E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.15376E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16584E-1	-7.98297E-1	-9.1325E0	-9.14309E0	3.79086E-3	9.63211E-2	2.73363E1	-3.26248E1	-3.26499E1	2.68338E1	2.23869E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.13867E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.1656E-1	-7.98154E-1	-9.13255E0	-9.14319E0	3.93391E-3	9.60588E-2	2.73387E1	-3.26948E1	-3.26366E1	2.68155E1	2.23332E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.13698E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16727E-1	-7.98368E-1	-9.13253E0	-9.1428E0	3.74317E-3	9.61542E-2	2.73305E1	-3.26395E1	-3.26222E1	2.68391E1	2.22497E-9	2.51162E-3	2.51162E-3	6.33341E-3	2.15071E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.1687E-1	-7.98321E-1	-9.13248E0	-9.14295E0	3.67165E-3	9.65834E-2	2.73328E1	-3.2652E1	-3.26113E1	2.68208E1	2.21912E-9	2.51764E-3	2.51764E-3	6.31225E-3	2.14766E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16846E-1	-7.98464E-1	-9.1327E0	-9.1433E0	3.60012E-3	9.62496E-2	2.73189E1	-3.2653E1	-3.26152E1	2.68412E1	2.24304E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.14628E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16989E-1	-7.98345E-1	-9.13236E0	-9.14273E0	3.8147E-3	9.63688E-2	2.73237E1	-3.26729E1	-3.25809E1	2.6831E1	2.22848E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.13513E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16917E-1	-7.98249E-1	-9.13236E0	-9.14297E0	3.79086E-3	9.64403E-2	2.73122E1	-3.26531E1	-3.26095E1	2.68496E1	2.24442E-9	2.52061E-3	2.52061E-3	6.35059E-3	2.14964E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.16798E-1	-7.97892E-1	-9.13241E0	-9.14264E0	3.83854E-3	9.65118E-2	2.72949E1	-3.26344E1	-3.2602E1	2.6843E1	2.23623E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16584E-1	-7.97987E-1	-9.13255E0	-9.14278E0	3.79086E-3	9.63688E-2	2.73405E1	-3.26655E1	-3.26337E1	2.68447E1	2.23235E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.13142E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.1656E-1	-7.97963E-1	-9.13241E0	-9.14304E0	3.62396E-3	9.63211E-2	2.73333E1	-3.26819E1	-3.25972E1	2.6822E1	2.21401E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.1405E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16321E-1	-7.97939E-1	-9.13229E0	-9.1433E0	4.07696E-3	9.63926E-2	2.73496E1	-3.26398E1	-3.26176E1	2.68514E1	2.22075E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.13884E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.16941E-1	-7.98273E-1	-9.1325E0	-9.14323E0	4.1008E-3	9.63688E-2	2.7285E1	-3.2649E1	-3.26142E1	2.68388E1	2.24251E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12957E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16774E-1	-7.98178E-1	-9.13227E0	-9.14307E0	3.88622E-3	9.62496E-2	2.73213E1	-3.2632E1	-3.26248E1	2.68142E1	2.23526E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.12772E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.1687E-1	-7.97915E-1	-9.13248E0	-9.14299E0	3.88622E-3	9.59873E-2	2.73135E1	-3.26693E1	-3.2641E1	2.68389E1	2.2372E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.12957E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.1687E-1	-7.98225E-1	-9.13272E0	-9.14319E0	3.91006E-3	9.5892E-2	2.73634E1	-3.26849E1	-3.25972E1	2.68413E1	2.23392E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.13502E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16131E-1	-7.98368E-1	-9.13255E0	-9.14309E0	3.76701E-3	9.60112E-2	2.72939E1	-3.26661E1	-3.26024E1	2.68123E1	2.24012E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.13142E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16369E-1	-7.98059E-1	-9.13229E0	-9.14316E0	3.69549E-3	9.62496E-2	2.73207E1	-3.2626E1	-3.26399E1	2.68076E1	2.23332E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.15002E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16417E-1	-7.97868E-1	-9.1325E0	-9.14323E0	3.74317E-3	9.61304E-2	2.73012E1	-3.26211E1	-3.26414E1	2.6844E1	2.23169E-9	2.52236E-3	2.52236E-3	6.29684E-3	2.16011E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16417E-1	-7.97868E-1	-9.13239E0	-9.14309E0	3.86238E-3	9.60112E-2	2.73422E1	-3.26565E1	-3.26121E1	2.68063E1	2.24146E-9	2.53128E-3	2.53128E-3	6.33757E-3	2.14828E-2