[Scan]
initial_time=2016-01-18T17:25:14
final_time=2016-01-18T17:25:34
ip_count=19
run=1024
dataset=2
scan=136
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36162E-8
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=1.98997E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=1.66297E-10
ql4_vset=
ql4_vmon=-9.14276E0
ql4_imon=-4.79221E-11
mult1=-9.58386E-9
mult2=-2.63877E-9
rf_tmon=-4.2781E-3
rf_agc=3.26847E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.65124E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69689E0
bslens_imon=2.2955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.85463E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04268E1
cs_ea1_imon=2.59069E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33481E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64736E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.4779E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=2.94464E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.33096E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.2569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=2.34789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.07218E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20609E0
cs_ionrep_imon=1.19333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91998E2
cs_nozzle_imon=1.93707E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02024E1
cs_anode1_imon=2.95854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.32502E-8
tplens_vset=1.4E-1
tplens_vmon=1.67801E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03143E2
lens6_imon=2.98119E-4
ql6_vset=1.0E-1
ql6_vmon=9.61304E-2
ql6_imon=3.98283E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.77096E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.16136E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46741E0
os_ea2_imon=-7.76707E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71455E1
cs_ef2a_imon=3.17296E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11396E1
os_restr2_imon=3.43013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01699E1
cs_anode2_imon=2.23465E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.08885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.02883E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.89121E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1284E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=2.79661E-1
window_imon=-7.32698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82776E2
mask1_imon=2.39341E-4
mask2_vset=0.0E0
mask2_vmon=-1.86912E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.11098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.57276E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31992E0
defgridb_imon=5.94109E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.41314E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64703E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.95105E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66165E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.68077E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76176E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.109E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.66339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26943E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.14781E-2
chamber_ion_pmon=2.23583E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4435E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16369E-1	-7.98059E-1	-9.13236E0	-9.14271E0	3.26633E-3	9.60827E-2	2.73311E1	-3.26915E1	-3.26113E1	2.68358E1	2.23297E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.14781E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16369E-1	-7.97582E-1	-9.13205E0	-9.14259E0	3.60012E-3	9.63688E-2	2.73375E1	-3.2645E1	-3.25936E1	2.68313E1	2.24012E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.13513E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16488E-1	-7.97749E-1	-9.13224E0	-9.14271E0	3.40939E-3	9.62973E-2	2.73417E1	-3.26172E1	-3.25989E1	2.68151E1	2.24062E-9	2.52362E-3	2.52362E-3	6.32418E-3	2.13334E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16202E-1	-7.98249E-1	-9.13198E0	-9.14276E0	3.43323E-3	9.60827E-2	2.73458E1	-3.26732E1	-3.26054E1	2.68617E1	2.23637E-9	2.51498E-3	2.51498E-3	6.32858E-3	2.13493E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16464E-1	-7.98154E-1	-9.13193E0	-9.14316E0	3.62396E-3	9.62019E-2	2.73393E1	-3.2675E1	-3.25977E1	2.68343E1	2.23107E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.13502E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16321E-1	-7.98273E-1	-9.13208E0	-9.14307E0	3.48091E-3	9.62973E-2	2.73105E1	-3.26573E1	-3.26098E1	2.6822E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.14442E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16512E-1	-7.98011E-1	-9.13184E0	-9.14276E0	3.43323E-3	9.62019E-2	2.73363E1	-3.26765E1	-3.26266E1	2.6813E1	2.24347E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.13502E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16512E-1	-7.98035E-1	-9.13229E0	-9.14309E0	3.48091E-3	9.63211E-2	2.73075E1	-3.26467E1	-3.26254E1	2.68364E1	2.23526E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.13884E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16512E-1	-7.97462E-1	-9.13255E0	-9.14285E0	3.71933E-3	9.60588E-2	2.72919E1	-3.26615E1	-3.25846E1	2.68146E1	2.23332E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.1575E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16321E-1	-7.97749E-1	-9.13255E0	-9.14288E0	3.91006E-3	9.60588E-2	2.73081E1	-3.26567E1	-3.26134E1	2.68316E1	2.23583E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.1332E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16584E-1	-7.97749E-1	-9.13258E0	-9.14307E0	3.6478E-3	9.61304E-2	2.73622E1	-3.26609E1	-3.26158E1	2.68142E1	2.23235E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16464E-1	-7.97677E-1	-9.13265E0	-9.14307E0	3.76701E-3	9.62496E-2	2.73287E1	-3.26903E1	-3.26024E1	2.68641E1	2.2372E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.14256E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16441E-1	-7.97677E-1	-9.13255E0	-9.14299E0	4.02927E-3	9.64403E-2	2.73129E1	-3.26561E1	-3.26242E1	2.68268E1	2.23235E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.14628E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16631E-1	-7.97558E-1	-9.13262E0	-9.14295E0	3.88622E-3	9.64403E-2	2.73577E1	-3.26817E1	-3.26052E1	2.68494E1	2.2372E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.14628E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16345E-1	-7.97892E-1	-9.13258E0	-9.1429E0	3.91006E-3	9.61542E-2	2.73399E1	-3.26695E1	-3.26382E1	2.68308E1	2.23429E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.15189E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16345E-1	-7.98011E-1	-9.13255E0	-9.14299E0	3.74317E-3	9.62019E-2	2.73339E1	-3.26801E1	-3.26092E1	2.68118E1	2.23678E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.14598E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16226E-1	-7.9813E-1	-9.13243E0	-9.14273E0	3.93391E-3	9.61542E-2	2.73027E1	-3.26675E1	-3.26458E1	2.68472E1	2.23964E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.16067E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16321E-1	-7.98225E-1	-9.13258E0	-9.14302E0	3.79086E-3	9.62257E-2	2.73446E1	-3.26667E1	-3.26242E1	2.68331E1	2.23429E-9	2.51334E-3	2.51334E-3	6.33486E-3	2.15002E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16584E-1	-7.97868E-1	-9.13262E0	-9.1433E0	3.93391E-3	9.60827E-2	2.73505E1	-3.26815E1	-3.26384E1	2.68094E1	2.23818E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.14815E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16464E-1	-7.97653E-1	-9.13243E0	-9.14276E0	3.69549E-3	9.61304E-2	2.72997E1	-3.265E1	-3.2653E1	2.68376E1	2.23583E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.14781E-2