[Scan]
initial_time=2016-01-18T17:25:41
final_time=2016-01-18T17:26:00
ip_count=19
run=1024
dataset=2
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36252E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.96893E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.60837E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-4.21047E-11
mult1=-1.09965E-8
mult2=-3.01072E-9
rf_tmon=-3.07691E-3
rf_agc=3.50608E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.68085E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67225E0
bslens_imon=2.4894E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19535E1
lens5a_imon=2.00973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0489E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.83768E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04708E1
cs_ea1_imon=2.57617E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3433E0
lens1_imon=2.73751E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98514E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03741E1
cs_ea2_imon=1.49405E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84687E1
cs_ef1a_imon=2.95445E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.32592E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1108E1
os_restr1_imon=4.25911E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1523E1
os_ea1_imon=2.3399E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.09367E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21393E0
cs_ionrep_imon=1.17762E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92005E2
cs_nozzle_imon=1.93554E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0209E1
cs_anode1_imon=2.96718E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.32097E-8
tplens_vset=1.4E-1
tplens_vmon=1.69678E0
tplens_imon=-2.39758E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26327E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26676E1
iondef2_imon=1.58375E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03121E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.63211E-2
ql6_imon=4.03714E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26737E0
ionrepsh_imon=1.76429E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.1708E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74738E1
cs_ef2b_imon=3.10827E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4684E0
os_ea2_imon=-6.51995E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06174E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71227E1
cs_ef2a_imon=3.16216E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0583E0
os_ef2alow_imon=-2.42835E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88275E-1
os_ef2bup_imon=-5.37376E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11161E1
os_restr2_imon=3.44473E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.28783E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01834E1
cs_anode2_imon=2.25459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.09212E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.10824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.14088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.9215E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15634E0
cs_ionaccel_imon=-1.6499E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47249E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.8076E-6
window_vset=0.0E0
window_vmon=2.6126E-1
window_imon=-7.66649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82755E2
mask1_imon=2.38953E-4
mask2_vset=0.0E0
mask2_vmon=-1.86762E1
mask2_imon=-6.0946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.32937E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.38657E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=6.85225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3377E0
defgridb_imon=6.11556E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33312E1
os_fil1_imon=9.4673E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07435E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64947E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.97199E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66707E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44015E-2
os_fil2_imon=-2.78102E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.20211E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.78726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07384E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22881E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.13502E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50652E-1
res40_imon=-2.46952E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.1687E-1	-7.98106E-1	-9.13215E0	-9.1434E0	3.62396E-3	9.62734E-2	2.73474E1	-3.26521E1	-3.26498E1	2.68569E1	2.24012E-9	2.51838E-3	2.51838E-3	6.3245E-3	2.13341E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16417E-1	-7.97653E-1	-9.13248E0	-9.14309E0	3.6478E-3	9.63211E-2	2.73257E1	-3.26609E1	-3.26372E1	2.6825E1	2.23506E-9	2.52509E-3	2.52509E-3	6.323E-3	2.13835E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16441E-1	-7.98059E-1	-9.13217E0	-9.14321E0	3.86238E-3	9.6035E-2	2.73627E1	-3.26747E1	-3.26171E1	2.68244E1	2.23306E-9	2.52407E-3	2.52407E-3	6.3131E-3	2.1392E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16536E-1	-7.97725E-1	-9.13246E0	-9.14288E0	3.79086E-3	9.59873E-2	2.73016E1	-3.26685E1	-3.2577E1	2.6855E1	2.2356E-9	2.52058E-3	2.52058E-3	6.3023E-3	2.1382E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16464E-1	-7.97653E-1	-9.13258E0	-9.14309E0	3.62396E-3	9.62973E-2	2.7346E1	-3.26482E1	-3.26362E1	2.68526E1	2.22558E-9	2.51334E-3	2.51334E-3	6.29098E-3	2.15189E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16655E-1	-7.97772E-1	-9.13229E0	-9.14314E0	3.69549E-3	9.62257E-2	2.73299E1	-3.26679E1	-3.26384E1	2.68476E1	2.21401E-9	2.51525E-3	2.51525E-3	6.32896E-3	2.14964E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16417E-1	-7.97939E-1	-9.13236E0	-9.14283E0	3.57628E-3	9.62973E-2	2.73207E1	-3.26386E1	-3.26056E1	2.68364E1	2.21978E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.14442E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.1656E-1	-7.97796E-1	-9.13227E0	-9.14292E0	3.74317E-3	9.60827E-2	2.73311E1	-3.26402E1	-3.26113E1	2.68472E1	2.21306E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.13502E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16298E-1	-7.98035E-1	-9.13224E0	-9.14311E0	3.83854E-3	9.62496E-2	2.73081E1	-3.26476E1	-3.2626E1	2.68496E1	2.21497E-9	2.51007E-3	2.51007E-3	6.29098E-3	2.12957E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16083E-1	-7.98082E-1	-9.13236E0	-9.14321E0	3.69549E-3	9.63688E-2	2.73145E1	-3.26467E1	-3.26472E1	2.68395E1	2.21401E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.14442E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.1625E-1	-7.97868E-1	-9.13236E0	-9.14319E0	3.71933E-3	9.64642E-2	2.73207E1	-3.26543E1	-3.26056E1	2.68322E1	2.23107E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.15148E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16393E-1	-7.98106E-1	-9.13219E0	-9.14304E0	3.8147E-3	9.63449E-2	2.73175E1	-3.26231E1	-3.2593E1	2.68346E1	2.21401E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.15002E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16417E-1	-7.97915E-1	-9.13184E0	-9.14304E0	3.6478E-3	9.62496E-2	2.73297E1	-3.27023E1	-3.2602E1	2.68208E1	2.21873E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.1405E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16584E-1	-7.98059E-1	-9.13203E0	-9.14319E0	3.95775E-3	9.61304E-2	2.72889E1	-3.26705E1	-3.26278E1	2.68453E1	2.23011E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.1332E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16655E-1	-7.97868E-1	-9.13215E0	-9.14309E0	3.91006E-3	9.59873E-2	2.73405E1	-3.26526E1	-3.26113E1	2.68364E1	2.22171E-9	2.51662E-3	2.51662E-3	6.29645E-3	2.12957E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.16441E-1	-7.98178E-1	-9.13203E0	-9.14326E0	4.12464E-3	9.6035E-2	2.73195E1	-3.26837E1	-3.26512E1	2.68316E1	2.21689E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.13142E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16464E-1	-7.98249E-1	-9.13229E0	-9.14319E0	3.88622E-3	9.60112E-2	2.73195E1	-3.26609E1	-3.2635E1	2.68532E1	2.22536E-9	2.52815E-3	2.52815E-3	6.29665E-3	2.14232E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16607E-1	-7.9813E-1	-9.1325E0	-9.14326E0	3.67165E-3	9.63211E-2	2.73242E1	-3.26579E1	-3.26625E1	2.68389E1	2.23526E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.14442E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16226E-1	-7.98059E-1	-9.13243E0	-9.14273E0	3.93391E-3	9.61781E-2	2.73576E1	-3.2652E1	-3.26119E1	2.68238E1	2.23964E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.1405E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16464E-1	-7.97772E-1	-9.13224E0	-9.14297E0	3.67165E-3	9.63211E-2	2.73045E1	-3.26676E1	-3.26327E1	2.68136E1	2.2406E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.13502E-2