[Scan]
initial_time=2016-01-18T17:26:08
final_time=2016-01-18T17:26:27
ip_count=19
run=1024
dataset=2
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.35936E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.9287E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.53744E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=-2.41756E-11
mult1=-8.08076E-9
mult2=-3.28572E-9
rf_tmon=-4.40919E-3
rf_agc=3.14627E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.67292E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.85476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04417E1
cs_ea1_imon=2.55698E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33651E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.48919E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.95927E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.33342E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.26823E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.35114E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20103E0
cs_ionrep_imon=1.1716E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92002E2
cs_nozzle_imon=1.93687E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02272E1
cs_anode1_imon=2.9654E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.32318E-8
tplens_vset=1.4E-1
tplens_vmon=1.72014E0
tplens_imon=-9.74686E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25829E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27121E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03139E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.61781E-2
ql6_imon=4.05804E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=1.76317E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48221E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7442E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68348E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.08521E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.92027E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02155E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8275E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86945E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.42246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.26888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.55585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33303E1
os_fil1_imon=9.42799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.94437E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63003E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66403E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70047E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.14781E-2
chamber_ion_pmon=2.23202E-9
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19358E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.16488E-1	-7.98273E-1	-9.13215E0	-9.14314E0	4.02927E-3	9.60112E-2	2.73237E1	-3.26206E1	-3.26194E1	2.68112E1	2.23915E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.13698E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16345E-1	-7.98202E-1	-9.13227E0	-9.14307E0	3.8147E-3	9.5892E-2	2.73259E1	-3.26566E1	-3.25997E1	2.68635E1	2.23869E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-8.1625E-1	-7.98059E-1	-9.13248E0	-9.14323E0	3.93391E-3	9.60827E-2	2.73648E1	-3.26822E1	-3.26614E1	2.68046E1	2.2426E-9	2.53033E-3	2.53033E-3	6.29624E-3	2.13523E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09294E0	-8.16202E-1	-7.97701E-1	-9.13281E0	-9.14311E0	3.71933E-3	9.60112E-2	2.73123E1	-3.26422E1	-3.26194E1	2.68214E1	2.23678E-9	2.52815E-3	2.52815E-3	6.30202E-3	2.13685E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16011E-1	-7.97844E-1	-9.1325E0	-9.14316E0	3.74317E-3	9.60827E-2	2.73129E1	-3.26536E1	-3.26164E1	2.68232E1	2.23773E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09279E0	-8.16417E-1	-7.98035E-1	-9.13284E0	-9.14309E0	3.93391E-3	9.62496E-2	2.73562E1	-3.26585E1	-3.25996E1	2.68545E1	2.24109E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.14256E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09317E0	-8.16464E-1	-7.98154E-1	-9.13267E0	-9.14299E0	3.86238E-3	9.6035E-2	2.73346E1	-3.26431E1	-3.26178E1	2.68094E1	2.23332E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.13884E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09294E0	-8.16774E-1	-7.98082E-1	-9.13258E0	-9.14326E0	3.76701E-3	9.61304E-2	2.73081E1	-3.26452E1	-3.26338E1	2.6849E1	2.22157E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.15148E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.16584E-1	-7.98082E-1	-9.13231E0	-9.14295E0	3.71933E-3	9.61781E-2	2.73346E1	-3.26738E1	-3.26384E1	2.68508E1	2.22461E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.14815E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.16512E-1	-7.98059E-1	-9.13243E0	-9.14309E0	3.60012E-3	9.63449E-2	2.73464E1	-3.26736E1	-3.2625E1	2.68391E1	2.23108E-9	2.51854E-3	2.51854E-3	6.31506E-3	2.14773E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16488E-1	-7.98178E-1	-9.13262E0	-9.14283E0	3.76701E-3	9.62973E-2	2.73634E1	-3.26341E1	-3.26061E1	2.6851E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16774E-1	-7.98035E-1	-9.13219E0	-9.14326E0	3.91006E-3	9.64165E-2	2.73057E1	-3.26366E1	-3.26325E1	2.68458E1	2.2372E-9	2.51334E-3	2.51334E-3	6.32716E-3	2.14293E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16536E-1	-7.98011E-1	-9.13255E0	-9.14292E0	3.8147E-3	9.62257E-2	2.73247E1	-3.26744E1	-3.26236E1	2.68406E1	2.22654E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.14442E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16631E-1	-7.98178E-1	-9.13262E0	-9.14299E0	3.67165E-3	9.62496E-2	2.73664E1	-3.27074E1	-3.26172E1	2.68526E1	2.2372E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.14815E-2
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.16751E-1	-7.98178E-1	-9.13274E0	-9.14304E0	3.71933E-3	9.6035E-2	2.72859E1	-3.26392E1	-3.26464E1	2.68358E1	2.23526E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.15002E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16345E-1	-7.98154E-1	-9.13272E0	-9.14292E0	3.79086E-3	9.62019E-2	2.73604E1	-3.26675E1	-3.25852E1	2.6852E1	2.23332E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.1575E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16274E-1	-7.98011E-1	-9.13243E0	-9.14347E0	3.95775E-3	9.63926E-2	2.73099E1	-3.26392E1	-3.26344E1	2.68034E1	2.23235E-9	2.50898E-3	2.50898E-3	6.31288E-3	2.14628E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16345E-1	-7.97939E-1	-9.13255E0	-9.14319E0	3.76701E-3	9.62496E-2	2.73428E1	-3.26573E1	-3.26337E1	2.68268E1	2.23869E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.15331E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16298E-1	-7.98273E-1	-9.13234E0	-9.14314E0	3.74317E-3	9.62257E-2	2.72781E1	-3.2629E1	-3.26122E1	2.68292E1	2.22848E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.1407E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.16345E-1	-7.98154E-1	-9.13253E0	-9.14309E0	3.95775E-3	9.61781E-2	2.7442E1	-3.27121E1	-3.25829E1	2.68348E1	2.23202E-9	2.51096E-3	2.51096E-3	6.31817E-3	2.14781E-2