[Scan]
initial_time=2016-01-18T17:27:27
final_time=2016-01-18T17:27:47
ip_count=19
run=1024
dataset=2
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08863E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.36441E-8
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=1.948E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=1.64688E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.89917E-11
mult1=-6.5203E-9
mult2=-1.94521E-9
rf_tmon=-1.16827E-2
rf_agc=2.54516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.65464E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04866E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54373E1
cs_ef1b_imon=2.85576E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=2.56491E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64859E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.48559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84432E1
cs_ef1a_imon=2.94492E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.33277E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11377E1
os_restr1_imon=4.26122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.34825E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63703E1
os_ef1bup_imon=3.07938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91997E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0201E1
cs_anode1_imon=2.96509E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.33714E-8
tplens_vset=1.4E-1
tplens_vmon=1.71594E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25204E1
iondef3_imon=1.51262E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26166E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0316E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.60588E-2
ql6_imon=4.04828E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=1.76786E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33916E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74837E1
cs_ef2b_imon=3.13742E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47981E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.17138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06665E0
os_ef2alow_imon=-2.47456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99979E-1
os_ef2bup_imon=-5.23808E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11283E1
os_restr2_imon=3.4304E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01762E1
cs_anode2_imon=2.23936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.1173E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.93991E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13899E0
cs_ionaccel_imon=-1.74918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47332E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56311E1
einzel_imon=7.83292E-6
window_vset=0.0E0
window_vmon=2.73248E-1
window_imon=-8.00876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82763E2
mask1_imon=2.3919E-4
mask2_vset=0.0E0
mask2_vmon=-1.8694E1
mask2_imon=-5.92108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=8.13264E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.2869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50056E3
multb_neg_imon=8.33452E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.42509E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06899E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.95721E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62991E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.70299E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3569E-1
cs_fil2_imon=-2.56145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22841E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.12957E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.85747E-1
res40_imon=-2.50287E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16226E-1	-7.98321E-1	-9.13236E0	-9.14283E0	3.91006E-3	9.61542E-2	2.73474E1	-3.26851E1	-3.2626E1	2.68383E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16035E-1	-7.98249E-1	-9.13227E0	-9.1429E0	3.86238E-3	9.60588E-2	2.73504E1	-3.26744E1	-3.26413E1	2.68268E1	2.21865E-9	2.51814E-3	2.51814E-3	6.30212E-3	2.14928E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15964E-1	-7.97892E-1	-9.13219E0	-9.14297E0	3.76701E-3	9.62257E-2	2.73346E1	-3.26764E1	-3.2615E1	2.68285E1	2.23205E-9	2.51725E-3	2.51725E-3	6.33021E-3	2.14887E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16107E-1	-7.98273E-1	-9.13217E0	-9.14259E0	3.86238E-3	9.62496E-2	2.72809E1	-3.26455E1	-3.26425E1	2.6834E1	2.23598E-9	2.52093E-3	2.52093E-3	6.3126E-3	2.13659E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.15964E-1	-7.9844E-1	-9.13198E0	-9.14268E0	3.74317E-3	9.63926E-2	2.73189E1	-3.26657E1	-3.2623E1	2.68496E1	2.23678E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.1405E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.15868E-1	-7.98464E-1	-9.13217E0	-9.14276E0	3.74317E-3	9.63211E-2	2.72835E1	-3.26627E1	-3.26278E1	2.6849E1	2.24402E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.12957E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16083E-1	-7.98345E-1	-9.1325E0	-9.14297E0	3.74317E-3	9.61065E-2	2.73201E1	-3.26416E1	-3.2611E1	2.68406E1	2.24012E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.13327E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16011E-1	-7.98273E-1	-9.13253E0	-9.14285E0	3.71933E-3	9.58204E-2	2.73213E1	-3.26747E1	-3.26272E1	2.6834E1	2.23623E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.13513E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16107E-1	-7.98225E-1	-9.13222E0	-9.14333E0	3.69549E-3	9.59873E-2	2.73063E1	-3.26687E1	-3.2605E1	2.68424E1	2.23429E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.13884E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16345E-1	-7.98345E-1	-9.13224E0	-9.14299E0	4.00543E-3	9.62734E-2	2.73006E1	-3.26456E1	-3.26064E1	2.68379E1	2.22558E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.14442E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16274E-1	-7.98225E-1	-9.13239E0	-9.14304E0	3.83854E-3	9.58681E-2	2.73198E1	-3.26346E1	-3.26419E1	2.68438E1	2.23469E-9	2.51752E-3	2.51752E-3	6.31761E-3	2.12785E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16417E-1	-7.97987E-1	-9.13224E0	-9.14314E0	3.88622E-3	9.6035E-2	2.73405E1	-3.26645E1	-3.2644E1	2.68148E1	2.24062E-9	2.51804E-3	2.51804E-3	6.32978E-3	2.12957E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16298E-1	-7.97844E-1	-9.13224E0	-9.14299E0	3.8147E-3	9.59158E-2	2.73363E1	-3.26536E1	-3.26224E1	2.68418E1	2.2372E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.13513E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16345E-1	-7.97653E-1	-9.13222E0	-9.1434E0	3.74317E-3	9.58204E-2	2.73454E1	-3.26524E1	-3.25906E1	2.68442E1	2.23915E-9	2.51552E-3	2.51552E-3	6.34588E-3	2.13513E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16369E-1	-7.97606E-1	-9.13234E0	-9.14302E0	4.05312E-3	9.58443E-2	2.73252E1	-3.26626E1	-3.26496E1	2.68334E1	2.23915E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.12587E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16441E-1	-7.97749E-1	-9.13227E0	-9.14307E0	3.86238E-3	9.61304E-2	2.73478E1	-3.2653E1	-3.26176E1	2.68358E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13698E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17037E-1	-7.97963E-1	-9.13208E0	-9.14299E0	4.17233E-3	9.59873E-2	2.73204E1	-3.26487E1	-3.26199E1	2.68304E1	2.24251E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.12775E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17156E-1	-7.97892E-1	-9.13222E0	-9.14319E0	4.00543E-3	9.60112E-2	2.73346E1	-3.26498E1	-3.26486E1	2.68244E1	2.23566E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.13334E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16941E-1	-7.97915E-1	-9.13248E0	-9.14297E0	4.45843E-3	9.60588E-2	2.73484E1	-3.26741E1	-3.25972E1	2.68641E1	2.23356E-9	2.51393E-3	2.51393E-3	6.32858E-3	2.13135E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16822E-1	-7.97868E-1	-9.13243E0	-9.14295E0	4.36306E-3	9.60588E-2	2.73458E1	-3.26166E1	-3.25204E1	2.68298E1	2.23818E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.12957E-2