[Scan]
initial_time=2016-01-18T17:27:54
final_time=2016-01-18T17:28:14
ip_count=19
run=1024
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36106E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.96575E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.61469E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=-4.44174E-11
mult1=-1.05278E-8
mult2=-2.86828E-9
rf_tmon=-4.14374E-3
rf_agc=3.40819E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=1.64615E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.04949E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.84611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.56852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32029E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.95639E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.33666E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.25923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14729E1
os_ea1_imon=2.34645E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.17304E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9199E2
cs_nozzle_imon=1.936E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.96937E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20375E0
olens4_imon=3.32856E-8
tplens_vset=1.4E-1
tplens_vmon=1.67989E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26815E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26992E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03124E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.06996E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71773E1
olens3_imon=5.06736E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.89817E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82763E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.11026E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.50177E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.43375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07419E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64901E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.95849E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66746E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.18383E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.47899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22819E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.13513E-2
chamber_ion_pmon=2.23332E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77622E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.1625E-1	-7.97939E-1	-9.1325E0	-9.14297E0	3.93391E-3	9.61065E-2	2.73171E1	-3.26663E1	-3.26338E1	2.68505E1	2.23764E-9	2.52585E-3	2.52585E-3	6.3074E-3	2.12957E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.1625E-1	-7.98249E-1	-9.13243E0	-9.14314E0	3.67165E-3	9.59158E-2	2.72889E1	-3.26362E1	-3.2623E1	2.68376E1	2.24442E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.12957E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16393E-1	-7.98059E-1	-9.13222E0	-9.14316E0	3.83854E-3	9.59873E-2	2.73323E1	-3.26718E1	-3.26306E1	2.68256E1	2.23429E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.14256E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16083E-1	-7.97629E-1	-9.13239E0	-9.14321E0	3.45707E-3	9.63688E-2	2.73369E1	-3.26765E1	-3.26158E1	2.68418E1	2.23297E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.1332E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16417E-1	-7.97629E-1	-9.13255E0	-9.14307E0	3.26633E-3	9.62734E-2	2.73311E1	-3.26567E1	-3.26101E1	2.68389E1	2.22916E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.12775E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.16369E-1	-7.97963E-1	-9.13246E0	-9.14319E0	3.62396E-3	9.62734E-2	2.73303E1	-3.2653E1	-3.26176E1	2.6849E1	2.23526E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13884E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16202E-1	-7.98059E-1	-9.13239E0	-9.14309E0	3.55244E-3	9.62734E-2	2.73131E1	-3.26573E1	-3.26135E1	2.68348E1	2.24251E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.1332E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.1625E-1	-7.98035E-1	-9.13234E0	-9.14304E0	3.8147E-3	9.61542E-2	2.73089E1	-3.26508E1	-3.26012E1	2.682E1	2.23966E-9	2.51369E-3	2.51369E-3	6.31779E-3	2.14011E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16488E-1	-7.98059E-1	-9.13224E0	-9.14299E0	3.79086E-3	9.61542E-2	2.73129E1	-3.26685E1	-3.26064E1	2.68384E1	2.23858E-9	2.51874E-3	2.51874E-3	6.3074E-3	2.13545E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16154E-1	-7.98106E-1	-9.13224E0	-9.14328E0	3.71933E-3	9.63211E-2	2.73145E1	-3.26497E1	-3.26354E1	2.68344E1	2.23469E-9	2.51345E-3	2.51345E-3	6.32784E-3	2.13474E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16441E-1	-7.97987E-1	-9.13267E0	-9.14347E0	3.86238E-3	9.62496E-2	2.73195E1	-3.27312E1	-3.25563E1	2.68388E1	2.23205E-9	2.52179E-3	2.52179E-3	6.33021E-3	2.12957E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16154E-1	-7.98249E-1	-9.13222E0	-9.14319E0	3.60012E-3	9.62257E-2	2.73405E1	-3.26182E1	-3.26188E1	2.68274E1	2.23332E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.13884E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16321E-1	-7.98011E-1	-9.13236E0	-9.14323E0	3.76701E-3	9.61065E-2	2.73417E1	-3.26729E1	-3.26374E1	2.68424E1	2.24304E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.15002E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16393E-1	-7.98011E-1	-9.13274E0	-9.14302E0	3.6478E-3	9.60827E-2	2.73139E1	-3.26455E1	-3.2629E1	2.68587E1	2.24207E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13698E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16464E-1	-7.97939E-1	-9.13227E0	-9.14314E0	3.74317E-3	9.62257E-2	2.7349E1	-3.26747E1	-3.2623E1	2.68316E1	2.23138E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13142E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.97963E-1	-9.13262E0	-9.14319E0	3.60012E-3	9.63211E-2	2.73478E1	-3.2635E1	-3.26116E1	2.6856E1	2.23964E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.1332E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16274E-1	-7.97915E-1	-9.13246E0	-9.14316E0	3.95775E-3	9.60112E-2	2.73428E1	-3.26708E1	-3.26231E1	2.68571E1	2.24109E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.1407E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16274E-1	-7.97892E-1	-9.13239E0	-9.14316E0	3.88622E-3	9.62257E-2	2.72738E1	-3.27039E1	-3.26225E1	2.68226E1	2.23964E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.1332E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16107E-1	-7.9782E-1	-9.13236E0	-9.14323E0	3.71933E-3	9.60112E-2	2.73093E1	-3.26422E1	-3.26278E1	2.68569E1	2.23107E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.12232E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16321E-1	-7.97772E-1	-9.13231E0	-9.1433E0	3.91006E-3	9.60827E-2	2.73098E1	-3.26992E1	-3.26815E1	2.68322E1	2.23332E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.13513E-2