[Scan]
initial_time=2016-01-18T17:28:21
final_time=2016-01-18T17:28:40
ip_count=19
run=1024
dataset=2
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.35616E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.90378E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.17767E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-4.01735E-11
mult1=-1.07052E-8
mult2=-2.76833E-9
rf_tmon=-4.20273E-3
rf_agc=3.44771E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.38554E-3
ql5_imon=1.66357E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.29196E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19518E1
lens5a_imon=2.00279E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05419E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=2.83691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.01972E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04481E1
cs_ea1_imon=2.56804E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.46233E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84545E1
cs_ef1a_imon=2.94812E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.35023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.26975E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.39071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.14095E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91991E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=2.96549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.32835E-8
tplens_vset=1.4E-1
tplens_vmon=1.71753E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03133E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=4.0679E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=1.76105E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74791E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43792E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06142E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.15559E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.4738E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13449E-1
os_ef2bup_imon=-5.13584E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.115E1
os_restr2_imon=3.42318E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02064E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68641E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.1038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81069E-1
olens1_imon=7.91748E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14057E0
cs_ionaccel_imon=-1.74052E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.474E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.44329E-1
window_imon=-8.23055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82729E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86802E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92559E3
multa_neg_imon=7.61169E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50055E3
multb_neg_imon=7.43118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51186E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.43295E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07092E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64409E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=9.96744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63188E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66866E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22984E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.13334E-2
chamber_ion_pmon=2.23963E-9
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98013E-1
res40_imon=-2.36954E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16131E-1	-7.97868E-1	-9.13243E0	-9.14307E0	3.29018E-3	9.64642E-2	2.73269E1	-3.26809E1	-3.26089E1	2.68406E1	2.24251E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.14598E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16822E-1	-7.97868E-1	-9.13281E0	-9.14314E0	3.76701E-3	9.63688E-2	2.72586E1	-3.26597E1	-3.26101E1	2.67914E1	2.23869E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.14232E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.16464E-1	-7.97892E-1	-9.13258E0	-9.14309E0	3.67165E-3	9.64165E-2	2.73421E1	-3.26543E1	-3.26475E1	2.68213E1	2.2426E-9	2.52027E-3	2.52027E-3	6.29624E-3	2.15231E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.16441E-1	-7.98273E-1	-9.13217E0	-9.1428E0	3.3617E-3	9.66549E-2	2.73051E1	-3.26577E1	-3.26149E1	2.68439E1	2.23753E-9	2.52018E-3	2.52018E-3	6.3241E-3	2.13238E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16417E-1	-7.97963E-1	-9.13222E0	-9.14311E0	3.45707E-3	9.64403E-2	2.73175E1	-3.25818E1	-3.2626E1	2.6834E1	2.24204E-9	2.52326E-3	2.52326E-3	6.29298E-3	2.13445E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.16321E-1	-7.97701E-1	-9.13219E0	-9.14321E0	3.40939E-3	9.63688E-2	2.73291E1	-3.26681E1	-3.2623E1	2.68328E1	2.23202E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.12775E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16393E-1	-7.97868E-1	-9.13243E0	-9.14323E0	3.45707E-3	9.61065E-2	2.73051E1	-3.26524E1	-3.26296E1	2.68337E1	2.23623E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.14628E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16154E-1	-7.98011E-1	-9.13224E0	-9.14304E0	3.45707E-3	9.61304E-2	2.73045E1	-3.26464E1	-3.2623E1	2.68535E1	2.23818E-9	2.51662E-3	2.51662E-3	6.27461E-3	2.14628E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16298E-1	-7.98202E-1	-9.13248E0	-9.14302E0	3.57628E-3	9.62973E-2	2.73243E1	-3.26488E1	-3.26026E1	2.68076E1	2.23623E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16417E-1	-7.97987E-1	-9.13224E0	-9.14302E0	3.67165E-3	9.58443E-2	2.72793E1	-3.26158E1	-3.26398E1	2.68783E1	2.24109E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.12772E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16584E-1	-7.98154E-1	-9.13198E0	-9.14295E0	3.6478E-3	9.62734E-2	2.73429E1	-3.26518E1	-3.26074E1	2.67701E1	2.23818E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16607E-1	-7.98249E-1	-9.13215E0	-9.14268E0	3.71933E-3	9.62496E-2	2.73153E1	-3.26374E1	-3.25858E1	2.68484E1	2.2372E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.12957E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16655E-1	-7.98249E-1	-9.13246E0	-9.1428E0	3.60012E-3	9.62496E-2	2.73163E1	-3.26708E1	-3.26236E1	2.6836E1	2.23818E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.13142E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16464E-1	-7.97915E-1	-9.13246E0	-9.14285E0	3.62396E-3	9.61065E-2	2.73167E1	-3.26631E1	-3.26092E1	2.68325E1	2.23915E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.13884E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16298E-1	-7.9782E-1	-9.13241E0	-9.1428E0	3.76701E-3	9.62496E-2	2.73013E1	-3.26177E1	-3.26406E1	2.67972E1	2.2415E-9	2.52093E-3	2.52093E-3	6.3074E-3	2.13483E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16131E-1	-7.97963E-1	-9.13253E0	-9.14321E0	3.74317E-3	9.63688E-2	2.73405E1	-3.26697E1	-3.25942E1	2.69107E1	2.24167E-9	2.52222E-3	2.52222E-3	6.3074E-3	2.13742E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16441E-1	-7.98178E-1	-9.13248E0	-9.14302E0	3.8147E-3	9.62973E-2	2.73482E1	-3.2672E1	-3.26201E1	2.67349E1	2.2406E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.13685E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16274E-1	-7.98178E-1	-9.13253E0	-9.14283E0	3.76701E-3	9.63688E-2	2.7319E1	-3.26671E1	-3.25994E1	2.68302E1	2.24251E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.13685E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16536E-1	-7.98154E-1	-9.13227E0	-9.14292E0	3.95775E-3	9.63926E-2	2.73265E1	-3.2656E1	-3.2634E1	2.68262E1	2.242E-9	2.51498E-3	2.51498E-3	6.33388E-3	2.13672E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16584E-1	-7.98035E-1	-9.13219E0	-9.14285E0	3.38554E-3	9.62019E-2	2.73086E1	-3.26531E1	-3.26596E1	2.68641E1	2.23963E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.13334E-2