[Scan]
initial_time=2016-01-18T17:28:47
final_time=2016-01-18T17:29:07
ip_count=19
run=1024
dataset=2
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.35967E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.93828E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=1.52957E-10
ql4_vset=
ql4_vmon=-9.14326E0
ql4_imon=-1.43886E-11
mult1=-1.02323E-8
mult2=-2.74873E-9
rf_tmon=-5.24095E-3
rf_agc=3.2672E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.6478E-3
ql5_imon=1.67245E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.28541E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.83278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.57573E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.49027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.94846E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.3467E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11682E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.34465E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.06019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91991E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=2.99459E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.33544E-8
tplens_vset=1.4E-1
tplens_vmon=1.69611E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03116E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.65118E-2
ql6_imon=4.01632E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.76461E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46659E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06172E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05876E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68939E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.11523E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.94858E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17159E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02119E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.79211E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82768E2
mask1_imon=2.39434E-4
mask2_vset=0.0E0
mask2_vmon=-1.87167E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.16291E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.29051E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.29629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06512E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65091E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.95392E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61729E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0472E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.13142E-2
chamber_ion_pmon=2.24012E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.80626E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15988E-1	-7.97963E-1	-9.13227E0	-9.14288E0	3.79086E-3	9.62496E-2	2.73252E1	-3.26779E1	-3.26225E1	2.68059E1	2.23915E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.14256E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15988E-1	-7.97892E-1	-9.13234E0	-9.14292E0	3.86238E-3	9.6035E-2	2.73051E1	-3.26642E1	-3.25959E1	2.68302E1	2.23487E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.13139E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.15892E-1	-7.97987E-1	-9.13253E0	-9.14266E0	3.69549E-3	9.64403E-2	2.73204E1	-3.26682E1	-3.26376E1	2.68462E1	2.24012E-9	2.52448E-3	2.52448E-3	6.32328E-3	2.13851E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.15845E-1	-7.97868E-1	-9.13253E0	-9.14295E0	3.60012E-3	9.61781E-2	2.73275E1	-3.26638E1	-3.2629E1	2.68105E1	2.23369E-9	2.52585E-3	2.52585E-3	6.33538E-3	2.13712E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16369E-1	-7.97701E-1	-9.13219E0	-9.14314E0	3.69549E-3	9.63926E-2	2.73286E1	-3.26551E1	-3.26333E1	2.68373E1	2.23869E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.15883E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16345E-1	-7.97987E-1	-9.13219E0	-9.14309E0	3.48091E-3	9.64165E-2	2.72976E1	-3.26703E1	-3.2631E1	2.6829E1	2.24012E-9	2.51752E-3	2.51752E-3	6.3023E-3	2.13474E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16131E-1	-7.97868E-1	-9.13227E0	-9.14323E0	3.48091E-3	9.61542E-2	2.73327E1	-3.26633E1	-3.26056E1	2.68472E1	2.24214E-9	2.51952E-3	2.51952E-3	6.3131E-3	2.13341E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16679E-1	-7.97772E-1	-9.13198E0	-9.14309E0	3.71933E-3	9.60112E-2	2.73267E1	-3.26512E1	-3.2638E1	2.6822E1	2.24012E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.13327E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16298E-1	-7.97725E-1	-9.13229E0	-9.14314E0	3.67165E-3	9.5892E-2	2.73105E1	-3.26543E1	-3.26188E1	2.6849E1	2.24499E-9	2.51662E-3	2.51662E-3	6.3514E-3	2.13513E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16321E-1	-7.97844E-1	-9.1325E0	-9.14323E0	3.62396E-3	9.57966E-2	2.73269E1	-3.26815E1	-3.26148E1	2.68325E1	2.23623E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.12587E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16178E-1	-7.97915E-1	-9.13255E0	-9.14311E0	3.45707E-3	9.62496E-2	2.73231E1	-3.265E1	-3.2629E1	2.68154E1	2.23964E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.13502E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16059E-1	-7.98011E-1	-9.13267E0	-9.14328E0	3.83854E-3	9.62496E-2	2.72959E1	-3.26487E1	-3.26315E1	2.67944E1	2.23332E-9	2.52538E-3	2.52538E-3	6.29645E-3	2.12772E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16441E-1	-7.98106E-1	-9.13262E0	-9.14323E0	3.8147E-3	9.64403E-2	2.73605E1	-3.26791E1	-3.26178E1	2.6831E1	2.2372E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.13513E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16226E-1	-7.98059E-1	-9.13258E0	-9.14338E0	3.74317E-3	9.62257E-2	2.72849E1	-3.26854E1	-3.26223E1	2.6846E1	2.23138E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.14628E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16321E-1	-7.98202E-1	-9.13231E0	-9.1433E0	3.55244E-3	9.62257E-2	2.73134E1	-3.26443E1	-3.26337E1	2.6837E1	2.23623E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.13513E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16274E-1	-7.98225E-1	-9.13241E0	-9.14309E0	3.43323E-3	9.62257E-2	2.73305E1	-3.26242E1	-3.26337E1	2.68863E1	2.24109E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.13884E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.1625E-1	-7.98082E-1	-9.13239E0	-9.14335E0	3.6478E-3	9.61542E-2	2.73399E1	-3.26655E1	-3.26095E1	2.68047E1	2.23487E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.13867E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16131E-1	-7.98011E-1	-9.13224E0	-9.14314E0	3.50475E-3	9.63449E-2	2.73116E1	-3.2649E1	-3.26042E1	2.6843E1	2.23583E-9	2.51632E-3	2.51632E-3	6.29665E-3	2.14781E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16298E-1	-7.98035E-1	-9.13229E0	-9.14326E0	3.79086E-3	9.64165E-2	2.73303E1	-3.26428E1	-3.2638E1	2.67734E1	2.23869E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.13685E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16202E-1	-7.97939E-1	-9.13243E0	-9.14326E0	3.6478E-3	9.65118E-2	2.73541E1	-3.2659E1	-3.26201E1	2.68939E1	2.24012E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.13142E-2