[Scan]
initial_time=2016-01-18T17:29:41
final_time=2016-01-18T17:30:00
ip_count=19
run=1024
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.36369E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.92544E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.76823E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-3.68237E-11
mult1=-9.73579E-9
mult2=-2.73698E-9
rf_tmon=-4.68645E-3
rf_agc=3.39639E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.67165E-3
ql5_imon=1.66413E-9
bslens_vset=-6.2E0
bslens_vmon=-6.71381E0
bslens_imon=2.48062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1959E1
lens5a_imon=2.00448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.84539E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04686E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04149E1
cs_ea1_imon=2.56644E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.74874E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03298E1
cs_ea2_imon=1.50863E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.96144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.35023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15E1
os_ea1_imon=2.36626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=1.17034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91993E2
cs_nozzle_imon=1.9349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.96792E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20372E0
olens4_imon=3.34939E-8
tplens_vset=1.4E-1
tplens_vmon=1.73265E0
tplens_imon=-4.79798E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.60118E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03114E2
lens6_imon=2.98074E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=4.03593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24536E0
ionrepsh_imon=1.72937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.22522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52022E0
os_ea2_imon=-1.06747E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06222E2
lens4b_imon=2.0034E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.27688E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.1035E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.11044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.02921E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.93332E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82744E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.27752E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.78534E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.66413E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36065E0
defgridb_imon=6.38499E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.43081E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0778E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65401E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.94419E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67403E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39712E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90821E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.13685E-2
chamber_ion_pmon=2.2406E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95932E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.15964E-1	-7.98035E-1	-9.13231E0	-9.14311E0	3.52859E-3	9.65118E-2	2.73335E1	-3.26747E1	-3.26335E1	2.6819E1	2.23429E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.15563E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.16035E-1	-7.97796E-1	-9.1326E0	-9.14285E0	3.71933E-3	9.65834E-2	2.72647E1	-3.26523E1	-3.26419E1	2.68202E1	2.2406E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.14598E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.1625E-1	-7.98035E-1	-9.13267E0	-9.14328E0	3.76701E-3	9.65595E-2	2.73346E1	-3.26608E1	-3.26372E1	2.69085E1	2.24359E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.13712E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.16345E-1	-7.97987E-1	-9.13258E0	-9.14338E0	3.57628E-3	9.61542E-2	2.73387E1	-3.26464E1	-3.2611E1	2.68569E1	2.24347E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.14781E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16488E-1	-7.98321E-1	-9.1327E0	-9.14295E0	3.6478E-3	9.63926E-2	2.73381E1	-3.26703E1	-3.26095E1	2.68695E1	2.23818E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.15002E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16417E-1	-7.98178E-1	-9.13265E0	-9.1429E0	3.62396E-3	9.64165E-2	2.72998E1	-3.2613E1	-3.26054E1	2.68232E1	2.23487E-9	2.519E-3	2.519E-3	6.32087E-3	2.13776E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16512E-1	-7.98202E-1	-9.13255E0	-9.14297E0	3.60012E-3	9.63449E-2	2.73189E1	-3.26494E1	-3.26194E1	2.68244E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16178E-1	-7.98178E-1	-9.13274E0	-9.14321E0	3.57628E-3	9.62257E-2	2.73345E1	-3.26272E1	-3.26134E1	2.68538E1	2.22536E-9	2.52276E-3	2.52276E-3	6.28056E-3	2.14415E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.1625E-1	-7.98178E-1	-9.13253E0	-9.14297E0	3.43323E-3	9.63211E-2	2.73526E1	-3.26554E1	-3.26152E1	2.68118E1	2.2372E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.14628E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16512E-1	-7.98106E-1	-9.13255E0	-9.14285E0	3.69549E-3	9.61781E-2	2.73252E1	-3.26502E1	-3.2639E1	2.684E1	2.23818E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.12034E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16464E-1	-7.98297E-1	-9.13258E0	-9.14297E0	3.62396E-3	9.64165E-2	2.73261E1	-3.26699E1	-3.26104E1	2.68046E1	2.23623E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.13513E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16464E-1	-7.98154E-1	-9.13293E0	-9.14311E0	3.88622E-3	9.62734E-2	2.73222E1	-3.2649E1	-3.2593E1	2.68797E1	2.22751E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.15002E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16298E-1	-7.9813E-1	-9.13277E0	-9.14338E0	3.76701E-3	9.63688E-2	2.72624E1	-3.26657E1	-3.2623E1	2.68256E1	2.23773E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.13502E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16464E-1	-7.98249E-1	-9.1326E0	-9.14316E0	3.6478E-3	9.59873E-2	2.73352E1	-3.26644E1	-3.26313E1	2.68343E1	2.23235E-9	2.51552E-3	2.51552E-3	6.33486E-3	2.13142E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16321E-1	-7.98178E-1	-9.13246E0	-9.14323E0	3.55244E-3	9.62496E-2	2.73405E1	-3.26691E1	-3.25953E1	2.6843E1	2.23392E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.13867E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16536E-1	-7.97868E-1	-9.13212E0	-9.14302E0	3.60012E-3	9.6035E-2	2.72354E1	-3.25533E1	-3.2653E1	2.683E1	2.22631E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.13867E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16345E-1	-7.97677E-1	-9.13227E0	-9.14273E0	3.83854E-3	9.60112E-2	2.73321E1	-3.26783E1	-3.26122E1	2.68286E1	2.21689E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.14628E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16441E-1	-7.97772E-1	-9.13239E0	-9.1429E0	3.6478E-3	9.57251E-2	2.73165E1	-3.26609E1	-3.26038E1	2.68337E1	2.22848E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.13513E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16298E-1	-7.9782E-1	-9.1325E0	-9.14309E0	3.98159E-3	9.58681E-2	2.73198E1	-3.26461E1	-3.26354E1	2.681E1	2.23429E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.13513E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.1656E-1	-7.97796E-1	-9.13231E0	-9.14311E0	3.67165E-3	9.6035E-2	2.73316E1	-3.26579E1	-3.26242E1	2.68472E1	2.2406E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.13685E-2