[Scan]
initial_time=2016-01-18T17:30:34
final_time=2016-01-18T17:30:54
ip_count=19
run=1024
dataset=2
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.36481E-8
ql2_vset=
ql2_vmon=-7.97558E-1
ql2_imon=1.92815E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.47402E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-1.73211E-11
mult1=-9.73579E-9
mult2=-2.71934E-9
rf_tmon=-5.68928E-3
rf_agc=3.30201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.64299E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=2.84431E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04688E1
cs_ea1_imon=2.58185E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33411E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03612E1
cs_ea2_imon=1.50938E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.94954E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.33779E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.2513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.34104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.17304E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91994E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=2.96901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.33742E-8
tplens_vset=1.4E-1
tplens_vmon=1.72134E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.48991E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03143E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.62973E-2
ql6_imon=4.06911E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.77146E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.15791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49723E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.43067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.2809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25146E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73552E1
iondef1_imon=1.11536E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.12538E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80806E-1
olens1_imon=7.96261E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.7041E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56693E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8276E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.00429E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.17155E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=9.94858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80745E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.13145E-2
chamber_ion_pmon=2.23566E-9
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16512E-1	-7.97486E-1	-9.13267E0	-9.14319E0	3.95775E-3	9.61781E-2	2.73345E1	-3.26725E1	-3.26113E1	2.68298E1	2.2372E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.14442E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16798E-1	-7.97486E-1	-9.13234E0	-9.14268E0	3.8147E-3	9.65595E-2	2.73186E1	-3.26652E1	-3.2626E1	2.68406E1	2.22284E-9	2.51248E-3	2.51248E-3	6.33538E-3	2.15422E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16417E-1	-7.97725E-1	-9.13253E0	-9.14307E0	3.55244E-3	9.64642E-2	2.73404E1	-3.26376E1	-3.2622E1	2.68274E1	2.22364E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.15189E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16536E-1	-7.9751E-1	-9.13234E0	-9.14288E0	3.43323E-3	9.62019E-2	2.7355E1	-3.26428E1	-3.26338E1	2.68262E1	2.21684E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.15515E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16607E-1	-7.9782E-1	-9.13231E0	-9.14319E0	3.98159E-3	9.63211E-2	2.7298E1	-3.26602E1	-3.26107E1	2.68244E1	2.21495E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.15148E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16345E-1	-7.97677E-1	-9.13217E0	-9.14307E0	3.71933E-3	9.60827E-2	2.73111E1	-3.26843E1	-3.26218E1	2.6855E1	2.21882E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.15002E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16417E-1	-7.97677E-1	-9.13208E0	-9.14299E0	3.6478E-3	9.62019E-2	2.73195E1	-3.2647E1	-3.26284E1	2.68322E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.13327E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16369E-1	-7.97939E-1	-9.13227E0	-9.14299E0	3.45707E-3	9.60827E-2	2.73399E1	-3.26434E1	-3.26368E1	2.684E1	2.23332E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.13884E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16226E-1	-7.97415E-1	-9.13246E0	-9.14311E0	3.60012E-3	9.63688E-2	2.73189E1	-3.26585E1	-3.26074E1	2.6843E1	2.22364E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.16125E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16035E-1	-7.97844E-1	-9.13265E0	-9.14307E0	4.17233E-3	9.61304E-2	2.73523E1	-3.26891E1	-3.2613E1	2.6846E1	2.22347E-9	2.52276E-3	2.52276E-3	6.34518E-3	2.14781E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16035E-1	-7.97701E-1	-9.13258E0	-9.14288E0	3.83854E-3	9.62019E-2	2.73159E1	-3.26711E1	-3.26609E1	2.68304E1	2.23915E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.14815E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16083E-1	-7.97725E-1	-9.13231E0	-9.14295E0	3.79086E-3	9.61065E-2	2.73351E1	-3.26939E1	-3.2629E1	2.68352E1	2.22916E-9	2.52492E-3	2.52492E-3	6.30202E-3	2.12775E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16059E-1	-7.97749E-1	-9.13229E0	-9.1428E0	3.74317E-3	9.64403E-2	2.73345E1	-3.26879E1	-3.25948E1	2.6834E1	2.21989E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.13334E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.15892E-1	-7.98011E-1	-9.13229E0	-9.14338E0	3.83854E-3	9.63449E-2	2.73171E1	-3.26915E1	-3.2611E1	2.68574E1	2.21401E-9	2.50789E-3	2.50789E-3	6.33486E-3	2.13698E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.15916E-1	-7.97915E-1	-9.13246E0	-9.14271E0	3.57628E-3	9.62019E-2	2.73129E1	-3.2644E1	-3.26362E1	2.68213E1	2.21968E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.15148E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15749E-1	-7.97868E-1	-9.13241E0	-9.14273E0	3.38554E-3	9.62019E-2	2.73021E1	-3.26632E1	-3.26219E1	2.68372E1	2.21499E-9	2.51359E-3	2.51359E-3	6.32418E-3	2.13901E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.15701E-1	-7.9782E-1	-9.13258E0	-9.14249E0	3.67165E-3	9.64403E-2	2.73111E1	-3.26506E1	-3.2602E1	2.68587E1	2.23107E-9	2.51203E-3	2.51203E-3	6.31278E-3	2.1332E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.15892E-1	-7.9751E-1	-9.13241E0	-9.14302E0	3.76701E-3	9.61542E-2	2.73329E1	-3.26596E1	-3.25936E1	2.68331E1	2.2406E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.15515E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.15916E-1	-7.97725E-1	-9.13248E0	-9.1429E0	3.95775E-3	9.62734E-2	2.72985E1	-3.26657E1	-3.26074E1	2.68196E1	2.23356E-9	2.52236E-3	2.52236E-3	6.3445E-3	2.13314E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16202E-1	-7.97558E-1	-9.13222E0	-9.14297E0	4.14848E-3	9.62973E-2	2.73552E1	-3.26767E1	-3.26089E1	2.68346E1	2.23566E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.13145E-2