[Scan]
initial_time=2016-01-18T17:31:27
final_time=2016-01-18T17:31:47
ip_count=19
run=1024
dataset=2
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.3541E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.96537E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.38235E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-1.51992E-11
mult1=-9.59393E-9
mult2=-2.70758E-9
rf_tmon=-4.9519E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.69549E-3
ql5_imon=1.7224E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.85296E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04537E1
cs_ea1_imon=2.56852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.34332E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.2513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14885E1
os_ea1_imon=2.34897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91981E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.97405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.34406E-8
tplens_vset=1.4E-1
tplens_vmon=1.68349E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.56129E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03132E2
lens6_imon=2.97881E-4
ql6_vset=1.0E-1
ql6_vmon=9.62019E-2
ql6_imon=3.99405E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=1.76173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47621E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06236E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.16441E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.95509E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82759E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.79377E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.90478E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.41267E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06963E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65303E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.94521E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66554E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78941E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2285E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.13884E-2
chamber_ion_pmon=2.23818E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.15988E-1	-7.97963E-1	-9.13236E0	-9.14338E0	3.86238E-3	9.61065E-2	2.73175E1	-3.26638E1	-3.26113E1	2.68569E1	2.22654E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16083E-1	-7.97963E-1	-9.1325E0	-9.14292E0	3.91006E-3	9.60112E-2	2.73363E1	-3.26434E1	-3.26188E1	2.6825E1	2.21401E-9	2.51287E-3	2.51287E-3	6.32858E-3	2.14209E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.15821E-1	-7.98178E-1	-9.1325E0	-9.14326E0	4.00543E-3	9.62257E-2	2.73474E1	-3.26585E1	-3.26208E1	2.68418E1	2.21786E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.14815E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.1594E-1	-7.98273E-1	-9.13253E0	-9.14326E0	4.14848E-3	9.60588E-2	2.73511E1	-3.2639E1	-3.26266E1	2.68638E1	2.21968E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.14964E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16345E-1	-7.98202E-1	-9.1321E0	-9.14302E0	4.07696E-3	9.61781E-2	2.73424E1	-3.26711E1	-3.26254E1	2.68244E1	2.23297E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.14598E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16011E-1	-7.98011E-1	-9.1321E0	-9.14288E0	3.71933E-3	9.61781E-2	2.73454E1	-3.26374E1	-3.2632E1	2.68238E1	2.23623E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.14256E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16298E-1	-7.97987E-1	-9.13212E0	-9.14264E0	3.76701E-3	9.61065E-2	2.73183E1	-3.26398E1	-3.26248E1	2.68605E1	2.23107E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.1405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16345E-1	-7.98225E-1	-9.13229E0	-9.14316E0	3.98159E-3	9.61065E-2	2.73122E1	-3.26673E1	-3.2567E1	2.681E1	2.21497E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13327E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16107E-1	-7.98082E-1	-9.13217E0	-9.14295E0	3.95775E-3	9.61304E-2	2.73296E1	-3.26817E1	-3.25972E1	2.68352E1	2.21968E-9	2.51417E-3	2.51417E-3	6.33977E-3	2.1405E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16131E-1	-7.97796E-1	-9.13234E0	-9.1429E0	3.95775E-3	9.59635E-2	2.738E1	-3.2695E1	-3.26655E1	2.68348E1	2.21499E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.1466E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.15916E-1	-7.9782E-1	-9.1325E0	-9.14276E0	3.62396E-3	9.56297E-2	2.73094E1	-3.26401E1	-3.26462E1	2.68413E1	2.22916E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.15699E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16202E-1	-7.97796E-1	-9.13236E0	-9.14259E0	3.76701E-3	9.58681E-2	2.73954E1	-3.26655E1	-3.26136E1	2.68262E1	2.21695E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.15422E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16202E-1	-7.97963E-1	-9.13243E0	-9.14288E0	3.79086E-3	9.60588E-2	2.73016E1	-3.26095E1	-3.26738E1	2.6825E1	2.22063E-9	2.51417E-3	2.51417E-3	6.34518E-3	2.14232E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16107E-1	-7.97701E-1	-9.13239E0	-9.14295E0	3.74317E-3	9.58443E-2	2.73484E1	-3.27738E1	-3.25617E1	2.684E1	2.23964E-9	2.51954E-3	2.51954E-3	6.28056E-3	2.13502E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16083E-1	-7.97796E-1	-9.13255E0	-9.14297E0	3.91006E-3	9.58443E-2	2.73291E1	-3.2647E1	-3.26326E1	2.6852E1	2.23963E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.1466E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.15868E-1	-7.97868E-1	-9.13239E0	-9.14273E0	3.3617E-3	9.6035E-2	2.73381E1	-3.26314E1	-3.2632E1	2.68454E1	2.24304E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.15002E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.15964E-1	-7.97796E-1	-9.13224E0	-9.1428E0	3.6478E-3	9.59396E-2	2.73431E1	-3.2631E1	-3.26557E1	2.68155E1	2.23678E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.14964E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.15868E-1	-7.9782E-1	-9.1325E0	-9.14273E0	3.83854E-3	9.61065E-2	2.73276E1	-3.26634E1	-3.25967E1	2.68388E1	2.23138E-9	2.51886E-3	2.51886E-3	6.29703E-3	2.13659E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.1594E-1	-7.9782E-1	-9.13248E0	-9.14268E0	3.57628E-3	9.59396E-2	2.7352E1	-3.26506E1	-3.26362E1	2.68184E1	2.23863E-9	2.51025E-3	2.51025E-3	6.31858E-3	2.13712E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16035E-1	-7.97939E-1	-9.13253E0	-9.14278E0	3.69549E-3	9.62019E-2	2.73375E1	-3.2662E1	-3.26337E1	2.68286E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.13884E-2