[Scan]
initial_time=2016-01-18T17:31:54
final_time=2016-01-18T17:32:14
ip_count=19
run=1024
dataset=2
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.36045E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.96111E-9
ql3_vset=
ql3_vmon=-9.1325E0
ql3_imon=1.45543E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-1.69754E-11
mult1=-9.57182E-9
mult2=-2.69266E-9
rf_tmon=-5.0051E-3
rf_agc=3.28649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.02927E-3
ql5_imon=1.6268E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1967E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54289E1
cs_ef1b_imon=2.83602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04501E1
cs_ea1_imon=2.5541E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.48955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=2.9427E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34584E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14639E1
os_ea1_imon=2.34825E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.18818E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91986E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.94558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.33653E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.55444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03125E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.60827E-2
ql6_imon=4.06209E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=1.77543E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11412E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.26864E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72588E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68501E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.06045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.94887E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82731E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86879E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.62434E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.38424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.43447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65405E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.95921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62588E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67295E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.69813E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22722E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=2.1489E-2
chamber_ion_pmon=2.23266E-9
chamber_cvt_pmon=2.51972E-3
foreline_cvt_pmon=2.51972E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.31061E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16679E-1	-7.98059E-1	-9.13253E0	-9.14314E0	3.98159E-3	9.61542E-2	2.72998E1	-3.26815E1	-3.25706E1	2.68296E1	2.24304E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.14815E-2
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16393E-1	-7.98225E-1	-9.13234E0	-9.14302E0	3.67165E-3	9.62019E-2	2.73366E1	-3.26707E1	-3.25386E1	2.68221E1	2.23263E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.14389E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16488E-1	-7.97963E-1	-9.13234E0	-9.14268E0	3.91006E-3	9.63926E-2	2.73169E1	-3.26301E1	-3.2659E1	2.68334E1	2.2329E-9	2.51391E-3	2.51391E-3	6.32458E-3	2.13973E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.1656E-1	-7.9782E-1	-9.13229E0	-9.14295E0	3.95775E-3	9.62734E-2	2.7337E1	-3.26697E1	-3.26248E1	2.68302E1	2.23678E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.12594E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16679E-1	-7.98011E-1	-9.13229E0	-9.14288E0	3.88622E-3	9.60827E-2	2.73393E1	-3.26741E1	-3.2638E1	2.6834E1	2.23964E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.14232E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16441E-1	-7.97749E-1	-9.13219E0	-9.14261E0	3.71933E-3	9.6035E-2	2.73057E1	-3.26549E1	-3.26136E1	2.68322E1	2.23818E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.14815E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.16369E-1	-7.97796E-1	-9.13243E0	-9.14311E0	3.91006E-3	9.62019E-2	2.73544E1	-3.26372E1	-3.26023E1	2.68388E1	2.2372E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.14815E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16703E-1	-7.98035E-1	-9.13239E0	-9.14311E0	3.83854E-3	9.62496E-2	2.73178E1	-3.26399E1	-3.26324E1	2.6869E1	2.23665E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.1485E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16774E-1	-7.97701E-1	-9.13262E0	-9.14276E0	3.93391E-3	9.62257E-2	2.73112E1	-3.26558E1	-3.26238E1	2.68582E1	2.23951E-9	2.52402E-3	2.52402E-3	6.30281E-3	2.15136E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16846E-1	-7.98178E-1	-9.13262E0	-9.14295E0	3.71933E-3	9.62019E-2	2.73279E1	-3.26992E1	-3.25998E1	2.68298E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16727E-1	-7.98154E-1	-9.13217E0	-9.14299E0	3.76701E-3	9.59873E-2	2.73916E1	-3.26763E1	-3.26171E1	2.68419E1	2.23903E-9	2.51867E-3	2.51867E-3	6.35071E-3	2.15048E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16822E-1	-7.98011E-1	-9.1325E0	-9.1429E0	3.52859E-3	9.6035E-2	2.73188E1	-3.2657E1	-3.26275E1	2.68981E1	2.23907E-9	2.51911E-3	2.51911E-3	6.31332E-3	2.14561E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16727E-1	-7.9813E-1	-9.13253E0	-9.14292E0	3.57628E-3	9.6035E-2	2.73153E1	-3.26554E1	-3.26152E1	2.69079E1	2.23898E-9	2.52461E-3	2.52461E-3	6.34612E-3	2.15359E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16393E-1	-7.9782E-1	-9.13255E0	-9.14283E0	3.95775E-3	9.61542E-2	2.73682E1	-3.26657E1	-3.26248E1	2.67705E1	2.23332E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.13513E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16345E-1	-7.97915E-1	-9.13262E0	-9.1429E0	3.6478E-3	9.60827E-2	2.72949E1	-3.26591E1	-3.26452E1	2.68623E1	2.23818E-9	2.51662E-3	2.51662E-3	6.28006E-3	2.12587E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.16202E-1	-7.97653E-1	-9.13253E0	-9.14278E0	3.95775E-3	9.6035E-2	2.73357E1	-3.26765E1	-3.2617E1	2.6813E1	2.23235E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.12957E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16083E-1	-7.97582E-1	-9.13248E0	-9.14288E0	3.93391E-3	9.63926E-2	2.73189E1	-3.26603E1	-3.26248E1	2.67992E1	2.23332E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.1407E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16441E-1	-7.97796E-1	-9.13253E0	-9.14295E0	4.05312E-3	9.59635E-2	2.7319E1	-3.26805E1	-3.26156E1	2.68154E1	2.24207E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.14815E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16369E-1	-7.97987E-1	-9.13239E0	-9.14299E0	4.02927E-3	9.61781E-2	2.73892E1	-3.26981E1	-3.26188E1	2.68548E1	2.23202E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.14598E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.1625E-1	-7.97987E-1	-9.1325E0	-9.14295E0	4.02927E-3	9.60827E-2	2.72588E1	-3.26506E1	-3.26422E1	2.68501E1	2.23266E-9	2.51972E-3	2.51972E-3	6.31283E-3	2.1489E-2