[Scan]
initial_time=2016-01-18T17:32:21
final_time=2016-01-18T17:32:40
ip_count=19
run=1024
dataset=2
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.35404E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.92422E-9
ql3_vset=
ql3_vmon=-9.13277E0
ql3_imon=1.07443E-10
ql4_vset=
ql4_vmon=-9.1434E0
ql4_imon=-1.91331E-11
mult1=-8.62061E-9
mult2=-2.73857E-9
rf_tmon=-4.90296E-3
rf_agc=3.26727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.60012E-3
ql5_imon=1.64707E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62108E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54247E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.5541E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39299E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.47441E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84881E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.34996E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11742E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.36592E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=1.20332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.96324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20349E0
olens4_imon=3.34159E-8
tplens_vset=1.4E-1
tplens_vmon=1.74778E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25936E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03115E2
lens6_imon=2.97996E-4
ql6_vset=1.0E-1
ql6_vmon=9.63688E-2
ql6_imon=4.06158E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24008E0
ionrepsh_imon=1.77687E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33429E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52247E0
os_ea2_imon=-8.97768E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.76006E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11189E1
os_restr2_imon=3.43031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.28414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73676E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67816E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.10235E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.80854E-1
olens1_imon=7.92045E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47695E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-5.58035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82769E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92766E3
multa_neg_imon=7.06918E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.04898E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=8.28044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.07675E0
defgridb_imon=6.12108E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.4093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=9.95302E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72367E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22723E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.14781E-2
chamber_ion_pmon=2.21779E-9
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.05253E-1
res40_imon=-2.73123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09271E0	-8.16011E-1	-7.97939E-1	-9.13234E0	-9.14302E0	4.14848E-3	9.60588E-2	2.73311E1	-3.26337E1	-3.25953E1	2.68626E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.15964E-1	-7.9782E-1	-9.1325E0	-9.14285E0	3.91006E-3	9.61781E-2	2.73039E1	-3.26695E1	-3.26511E1	2.68188E1	2.23678E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.13502E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-8.16035E-1	-7.97582E-1	-9.13241E0	-9.14307E0	3.69549E-3	9.62019E-2	2.7374E1	-3.26805E1	-3.26318E1	2.68383E1	2.23369E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.1447E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09333E0	-8.16083E-1	-7.97653E-1	-9.13239E0	-9.1428E0	3.57628E-3	9.61304E-2	2.73039E1	-3.26633E1	-3.26416E1	2.68316E1	2.24012E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.14928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.1625E-1	-7.97391E-1	-9.13229E0	-9.1428E0	3.43323E-3	9.65118E-2	2.7349E1	-3.26585E1	-3.2644E1	2.6831E1	2.23818E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.15189E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.16202E-1	-7.97844E-1	-9.13224E0	-9.14321E0	3.6478E-3	9.63211E-2	2.72827E1	-3.26608E1	-3.26089E1	2.68743E1	2.23818E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.13327E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.16154E-1	-7.97772E-1	-9.13246E0	-9.14297E0	3.86238E-3	9.62496E-2	2.73207E1	-3.26663E1	-3.26236E1	2.68214E1	2.23915E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.14256E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16345E-1	-7.97772E-1	-9.1325E0	-9.14299E0	3.71933E-3	9.63211E-2	2.73357E1	-3.2641E1	-3.25942E1	2.68641E1	2.24012E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.14628E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16488E-1	-7.97701E-1	-9.13212E0	-9.14278E0	3.6478E-3	9.62734E-2	2.73189E1	-3.2647E1	-3.26404E1	2.68256E1	2.23818E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.14442E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16417E-1	-7.97606E-1	-9.13227E0	-9.14292E0	3.52859E-3	9.60588E-2	2.73177E1	-3.26242E1	-3.26579E1	2.68562E1	2.23107E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.14781E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16298E-1	-7.97558E-1	-9.13231E0	-9.14278E0	3.50475E-3	9.59873E-2	2.73183E1	-3.26837E1	-3.26224E1	2.6774E1	2.23818E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.13698E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16369E-1	-7.97725E-1	-9.13203E0	-9.14285E0	3.62396E-3	9.6035E-2	2.73454E1	-3.2644E1	-3.26008E1	2.68864E1	2.24207E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.13327E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16417E-1	-7.97844E-1	-9.13231E0	-9.14295E0	3.83854E-3	9.61542E-2	2.72898E1	-3.26579E1	-3.2629E1	2.681E1	2.23866E-9	2.51498E-3	2.51498E-3	6.31837E-3	2.13977E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16512E-1	-7.9782E-1	-9.1326E0	-9.14321E0	3.91006E-3	9.62973E-2	2.73473E1	-3.26897E1	-3.26536E1	2.68257E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09309E0	-8.16417E-1	-7.97749E-1	-9.13248E0	-9.14319E0	4.07696E-3	9.62019E-2	2.74093E1	-3.26812E1	-3.26283E1	2.68764E1	2.22088E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.15231E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16441E-1	-7.97701E-1	-9.13253E0	-9.14307E0	4.07696E-3	9.58443E-2	2.73019E1	-3.26432E1	-3.26305E1	2.68438E1	2.21401E-9	2.5199E-3	2.5199E-3	6.33341E-3	2.15071E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16345E-1	-7.97629E-1	-9.13234E0	-9.14304E0	3.91006E-3	9.62973E-2	2.73672E1	-3.26568E1	-3.26277E1	2.68179E1	2.21401E-9	2.52407E-3	2.52407E-3	6.30171E-3	2.14306E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16536E-1	-7.97606E-1	-9.13262E0	-9.14326E0	3.95775E-3	9.62973E-2	2.72873E1	-3.26725E1	-3.26375E1	2.68438E1	2.21669E-9	2.5165E-3	2.5165E-3	6.3023E-3	2.13474E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16417E-1	-7.97987E-1	-9.13265E0	-9.1435E0	4.00543E-3	9.61542E-2	2.73706E1	-3.26555E1	-3.26136E1	2.68436E1	2.21401E-9	2.51642E-3	2.51642E-3	6.3016E-3	2.13545E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16321E-1	-7.97915E-1	-9.13277E0	-9.1434E0	3.60012E-3	9.63688E-2	2.73676E1	-3.26849E1	-3.25936E1	2.67816E1	2.21779E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.14781E-2