[Scan]
initial_time=2016-01-18T17:33:14
final_time=2016-01-18T17:33:33
ip_count=19
run=1024
dataset=2
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36123E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.96811E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=1.2536E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=1.91927E-12
mult1=-1.01732E-8
mult2=-2.78793E-9
rf_tmon=-4.27351E-3
rf_agc=3.32029E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.66115E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.15038E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55868E1
cs_ef1b_imon=2.86888E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.5553E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30354E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64863E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.50232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.93873E-5
olens2_vset=9.7E-1
olens2_vmon=9.69625E-1
olens2_imon=1.351E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.25898E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=2.32807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.17422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92014E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02087E1
cs_anode1_imon=2.96445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.3508E-8
tplens_vset=1.4E-1
tplens_vmon=1.67034E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26472E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.56001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=4.05347E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.76601E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74884E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46446E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71443E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87963E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.42631E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73629E1
iondef1_imon=1.11723E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68487E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.14309E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.96974E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1423E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.83728E-6
window_vset=0.0E0
window_vmon=2.55914E-1
window_imon=-7.25748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8274E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86593E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9252E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.91089E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50205E3
multb_neg_imon=4.40499E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.42327E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07109E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65266E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=9.95192E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62893E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66934E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.83716E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.54755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22604E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.12772E-2
chamber_ion_pmon=2.24207E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6384E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16584E-1	-7.97915E-1	-9.1325E0	-9.14316E0	4.43459E-3	9.60588E-2	2.73546E1	-3.25464E1	-3.2557E1	2.68343E1	2.2159E-9	2.51417E-3	2.51417E-3	6.28592E-3	2.15883E-2
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16464E-1	-7.98082E-1	-9.13236E0	-9.1429E0	4.19617E-3	9.59873E-2	2.7349E1	-3.2653E1	-3.26549E1	2.68151E1	2.2345E-9	2.52025E-3	2.52025E-3	6.32858E-3	2.14928E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16107E-1	-7.9782E-1	-9.13212E0	-9.14297E0	3.62396E-3	9.60112E-2	2.72894E1	-3.27088E1	-3.25869E1	2.68347E1	2.22075E-9	2.51007E-3	2.51007E-3	6.29645E-3	2.15563E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.1625E-1	-7.97749E-1	-9.13248E0	-9.1433E0	3.93391E-3	9.61542E-2	2.72721E1	-3.26699E1	-3.25149E1	2.68352E1	2.23379E-9	2.51549E-3	2.51549E-3	6.31251E-3	2.1643E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16369E-1	-7.9782E-1	-9.13231E0	-9.14321E0	4.02927E-3	9.63211E-2	2.73782E1	-3.26868E1	-3.26012E1	2.68478E1	2.22558E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.14442E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16584E-1	-7.97725E-1	-9.13243E0	-9.14328E0	3.71933E-3	9.62973E-2	2.73847E1	-3.26461E1	-3.26472E1	2.6843E1	2.23297E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.14781E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16393E-1	-7.97582E-1	-9.13272E0	-9.1433E0	3.48091E-3	9.60112E-2	2.71301E1	-3.26544E1	-3.26249E1	2.6836E1	2.21968E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.1405E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16274E-1	-7.97653E-1	-9.13274E0	-9.1433E0	3.52859E-3	9.59396E-2	2.73284E1	-3.26646E1	-3.2596E1	2.68556E1	2.21401E-9	2.51393E-3	2.51393E-3	6.29684E-3	2.15108E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16298E-1	-7.98035E-1	-9.13246E0	-9.1428E0	3.55244E-3	9.61065E-2	2.73688E1	-3.26927E1	-3.25725E1	2.68412E1	2.21401E-9	2.51581E-3	2.51581E-3	6.28511E-3	2.1485E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1625E-1	-7.9751E-1	-9.1326E0	-9.14304E0	3.88622E-3	9.61304E-2	2.72699E1	-3.26736E1	-3.27082E1	2.68468E1	2.21497E-9	2.51225E-3	2.51225E-3	6.32386E-3	2.15938E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16512E-1	-7.97629E-1	-9.13255E0	-9.14316E0	3.8147E-3	9.59396E-2	2.73E1	-3.26642E1	-3.25878E1	2.68144E1	2.22478E-9	2.51956E-3	2.51956E-3	6.3074E-3	2.15208E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.1656E-1	-7.97534E-1	-9.13265E0	-9.14314E0	3.79086E-3	9.59873E-2	2.73773E1	-3.26682E1	-3.26327E1	2.68194E1	2.21808E-9	2.51758E-3	2.51758E-3	6.33648E-3	2.13545E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16607E-1	-7.97653E-1	-9.1325E0	-9.14304E0	4.1008E-3	9.6035E-2	2.73499E1	-3.26431E1	-3.26567E1	2.68256E1	2.23072E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.12768E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16584E-1	-7.9751E-1	-9.13246E0	-9.1429E0	3.83854E-3	9.60827E-2	2.7251E1	-3.2629E1	-3.26002E1	2.6831E1	2.23526E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.15002E-2
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16584E-1	-7.97749E-1	-9.13236E0	-9.14314E0	3.8147E-3	9.62496E-2	2.73375E1	-3.26554E1	-3.26368E1	2.68364E1	2.23869E-9	2.51954E-3	2.51954E-3	6.28056E-3	2.14598E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16464E-1	-7.97653E-1	-9.13241E0	-9.14299E0	3.45707E-3	9.60112E-2	2.73556E1	-3.26849E1	-3.265E1	2.68499E1	2.24109E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.14815E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16679E-1	-7.97987E-1	-9.13241E0	-9.14309E0	3.79086E-3	9.60588E-2	2.72585E1	-3.26714E1	-3.26484E1	2.68406E1	2.23623E-9	2.51334E-3	2.51334E-3	6.36244E-3	2.15002E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1625E-1	-7.98202E-1	-9.13231E0	-9.14276E0	3.6478E-3	9.61304E-2	2.73033E1	-3.26762E1	-3.26236E1	2.68526E1	2.23202E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.14415E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16226E-1	-7.98035E-1	-9.13262E0	-9.14299E0	3.74317E-3	9.62496E-2	2.73634E1	-3.26621E1	-3.26368E1	2.68298E1	2.23583E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.13502E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16464E-1	-7.98035E-1	-9.13248E0	-9.14297E0	3.98159E-3	9.62257E-2	2.73629E1	-3.26797E1	-3.26472E1	2.68487E1	2.24207E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.12772E-2