[Scan]
initial_time=2016-01-18T17:33:41
final_time=2016-01-18T17:34:00
ip_count=19
run=1024
dataset=2
scan=155
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.36023E-8
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=1.95726E-9
ql3_vset=
ql3_vmon=-9.1326E0
ql3_imon=1.26767E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=3.8743E-12
mult1=-9.58386E-9
mult2=-2.55693E-9
rf_tmon=-5.13127E-3
rf_agc=3.26727E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.83854E-3
ql5_imon=1.60526E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64708E0
bslens_imon=2.40348E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19817E1
lens5a_imon=1.98832E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05155E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=2.85512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04492E1
cs_ea1_imon=2.58223E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40684E0
lens1_imon=2.701E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04572E1
cs_ea2_imon=1.48108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.94666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.34391E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14681E1
os_ea1_imon=2.3457E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23251E0
cs_ionrep_imon=1.20303E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91986E2
cs_nozzle_imon=1.9371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.34694E-8
tplens_vset=1.4E-1
tplens_vmon=1.67449E0
tplens_imon=-4.02665E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.50532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03108E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.62257E-2
ql6_imon=4.04502E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24904E0
ionrepsh_imon=1.77896E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33719E1
lens5b_imon=2.18739E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54594E0
os_ea2_imon=-9.71976E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06188E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.15533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11688E1
os_restr2_imon=3.43067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.23308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.05942E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6849E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.07704E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.92801E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02151E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.90768E-6
window_vset=0.0E0
window_vmon=2.73805E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82747E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9277E3
multa_neg_imon=6.75596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=5.88179E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.38771E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08486E0
defgridb_imon=6.24909E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.41567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65718E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=9.95543E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47596E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.12594E-2
chamber_ion_pmon=2.23678E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69503E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.16154E-1	-7.97987E-1	-9.13217E0	-9.1428E0	3.76701E-3	9.61304E-2	2.72603E1	-3.26431E1	-3.26437E1	2.68671E1	2.21786E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.13884E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16369E-1	-7.97868E-1	-9.13222E0	-9.14307E0	4.07696E-3	9.61304E-2	2.73259E1	-3.26621E1	-3.26119E1	2.68154E1	2.23773E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.1405E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.16226E-1	-7.9813E-1	-9.13248E0	-9.14297E0	3.8147E-3	9.63211E-2	2.72825E1	-3.26689E1	-3.26028E1	2.68328E1	2.22678E-9	2.51359E-3	2.51359E-3	6.3074E-3	2.12204E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16131E-1	-7.98178E-1	-9.13219E0	-9.14311E0	4.00543E-3	9.62973E-2	2.737E1	-3.26396E1	-3.26183E1	2.68528E1	2.2233E-9	2.51182E-3	2.51182E-3	6.32858E-3	2.13314E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16274E-1	-7.98106E-1	-9.13234E0	-9.14311E0	3.95775E-3	9.62257E-2	2.72841E1	-3.26398E1	-3.26224E1	2.68334E1	2.22252E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.13139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16321E-1	-7.97892E-1	-9.13239E0	-9.14297E0	4.14848E-3	9.57966E-2	2.73131E1	-3.26701E1	-3.26058E1	2.68202E1	2.21401E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.14442E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.16131E-1	-7.97963E-1	-9.1321E0	-9.14295E0	4.05312E-3	9.61781E-2	2.73399E1	-3.265E1	-3.25846E1	2.68172E1	2.21401E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.12768E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16298E-1	-7.97534E-1	-9.13212E0	-9.14264E0	3.93391E-3	9.61542E-2	2.73237E1	-3.2623E1	-3.2614E1	2.68346E1	2.21593E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.14442E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16107E-1	-7.97415E-1	-9.13217E0	-9.14276E0	3.76701E-3	9.61542E-2	2.7379E1	-3.26705E1	-3.2608E1	2.68046E1	2.21689E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.13884E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16321E-1	-7.97462E-1	-9.13212E0	-9.1429E0	3.88622E-3	9.59873E-2	2.72915E1	-3.26089E1	-3.26101E1	2.68298E1	2.21401E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.13513E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16321E-1	-7.97629E-1	-9.13239E0	-9.14288E0	3.67165E-3	9.60588E-2	2.73252E1	-3.26655E1	-3.2639E1	2.68292E1	2.21495E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.13139E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16417E-1	-7.97677E-1	-9.13229E0	-9.14307E0	3.6478E-3	9.61304E-2	2.73556E1	-3.26915E1	-3.26104E1	2.68689E1	2.21401E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.13502E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16345E-1	-7.97844E-1	-9.13203E0	-9.14283E0	3.67165E-3	9.60112E-2	2.72853E1	-3.26597E1	-3.26332E1	2.68294E1	2.21401E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.13327E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16584E-1	-7.97749E-1	-9.13253E0	-9.14297E0	3.76701E-3	9.5892E-2	2.73724E1	-3.26957E1	-3.26422E1	2.6818E1	2.21401E-9	2.51443E-3	2.51443E-3	6.31288E-3	2.13327E-2
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.1625E-1	-7.97772E-1	-9.13239E0	-9.14304E0	3.76701E-3	9.60112E-2	2.73688E1	-3.26779E1	-3.26431E1	2.68314E1	2.21401E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.14442E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16369E-1	-7.97391E-1	-9.13236E0	-9.14309E0	4.02927E-3	9.59873E-2	2.72793E1	-3.26597E1	-3.26062E1	2.6849E1	2.21401E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.13502E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16488E-1	-7.97629E-1	-9.13243E0	-9.14299E0	3.88622E-3	9.59158E-2	2.72997E1	-3.26681E1	-3.26158E1	2.68406E1	2.22075E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.12772E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16464E-1	-7.97749E-1	-9.13205E0	-9.14292E0	3.91006E-3	9.59158E-2	2.73476E1	-3.2659E1	-3.26402E1	2.6825E1	2.21401E-9	2.5188E-3	2.5188E-3	6.34037E-3	2.13142E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16107E-1	-7.97772E-1	-9.1325E0	-9.14283E0	3.74317E-3	9.5892E-2	2.73051E1	-3.26726E1	-3.26213E1	2.68789E1	2.22063E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.13685E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16607E-1	-7.97701E-1	-9.1326E0	-9.14297E0	3.83854E-3	9.62257E-2	2.73375E1	-3.26398E1	-3.26122E1	2.6849E1	2.23678E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.12594E-2