[Scan]
initial_time=2016-01-18T17:34:07
final_time=2016-01-18T17:34:27
ip_count=19
run=1024
dataset=2
scan=156
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36088E-8
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=1.96377E-9
ql3_vset=
ql3_vmon=-9.13248E0
ql3_imon=1.18315E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=-2.49147E-12
mult1=-8.47087E-9
mult2=-2.72718E-9
rf_tmon=-4.91651E-3
rf_agc=3.35156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.76701E-3
ql5_imon=1.67063E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.40168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.99501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55256E1
cs_ef1b_imon=2.86918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.01986E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04546E1
cs_ea1_imon=2.56981E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33304E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.47825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.9481E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.35093E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14769E1
os_ea1_imon=2.34116E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.1997E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93601E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.95675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.35082E-8
tplens_vset=1.4E-1
tplens_vmon=1.71045E0
tplens_imon=-4.75858E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25847E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03103E2
lens6_imon=2.97999E-4
ql6_vset=1.0E-1
ql6_vmon=9.59396E-2
ql6_imon=4.0712E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26331E0
ionrepsh_imon=1.78795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34035E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7494E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48098E0
os_ea2_imon=-8.86429E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11628E1
os_restr2_imon=3.43284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.1551E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.97188E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.81942E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02136E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.82214E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82741E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.42245E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.02415E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=5.85968E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33239E1
os_fil1_imon=9.43063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07263E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65047E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30721E1
cs_fil1_imon=9.95945E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62204E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92423E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22724E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=2.21832E-2
chamber_ion_pmon=2.2372E-9
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.88434E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.16464E-1	-7.97606E-1	-9.13246E0	-9.14271E0	3.76701E-3	9.58204E-2	2.73222E1	-3.26638E1	-3.26337E1	2.68557E1	2.21684E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.1405E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16274E-1	-7.97725E-1	-9.13258E0	-9.14309E0	3.93391E-3	9.60588E-2	2.73254E1	-3.26614E1	-3.26347E1	2.68401E1	2.21401E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.15515E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16393E-1	-7.97582E-1	-9.13274E0	-9.14283E0	3.76701E-3	9.58204E-2	2.73419E1	-3.26603E1	-3.26117E1	2.68406E1	2.22051E-9	2.52025E-3	2.52025E-3	6.3074E-3	2.14569E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16059E-1	-7.97749E-1	-9.13274E0	-9.14285E0	3.93391E-3	9.60112E-2	2.73246E1	-3.26555E1	-3.26077E1	2.68343E1	2.22803E-9	2.51611E-3	2.51611E-3	6.31879E-3	2.12765E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16321E-1	-7.97606E-1	-9.13274E0	-9.1428E0	4.00543E-3	9.63211E-2	2.73576E1	-3.26531E1	-3.26508E1	2.68478E1	2.23202E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.13685E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16441E-1	-7.97534E-1	-9.13281E0	-9.14292E0	4.24385E-3	9.62257E-2	2.72992E1	-3.26567E1	-3.26225E1	2.68058E1	2.22821E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.12775E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.1656E-1	-7.97606E-1	-9.13248E0	-9.14304E0	4.00543E-3	9.64165E-2	2.731E1	-3.26664E1	-3.26266E1	2.68418E1	2.23107E-9	2.52276E-3	2.52276E-3	6.34518E-3	2.13139E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16441E-1	-7.97606E-1	-9.13236E0	-9.1429E0	3.8147E-3	9.64403E-2	2.73116E1	-3.26402E1	-3.2636E1	2.68292E1	2.23665E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.13712E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16512E-1	-7.97629E-1	-9.1325E0	-9.14264E0	4.31538E-3	9.63211E-2	2.72943E1	-3.26585E1	-3.26326E1	2.68418E1	2.23487E-9	2.51954E-3	2.51954E-3	6.33977E-3	2.15148E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16345E-1	-7.97725E-1	-9.13236E0	-9.14285E0	4.48227E-3	9.62734E-2	2.73636E1	-3.26608E1	-3.26138E1	2.68545E1	2.24109E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.14256E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16798E-1	-7.97534E-1	-9.13281E0	-9.14278E0	4.19617E-3	9.63211E-2	2.73021E1	-3.26621E1	-3.25954E1	2.68274E1	2.23825E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.13672E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16631E-1	-7.97915E-1	-9.13258E0	-9.1429E0	4.14848E-3	9.66311E-2	2.73544E1	-3.26615E1	-3.26044E1	2.68442E1	2.23915E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.13327E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16345E-1	-7.97725E-1	-9.13217E0	-9.14314E0	4.00543E-3	9.66311E-2	2.73478E1	-3.26404E1	-3.2623E1	2.68418E1	2.23818E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.15002E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16584E-1	-7.97582E-1	-9.13229E0	-9.14288E0	4.00543E-3	9.64403E-2	2.73189E1	-3.26663E1	-3.26302E1	2.6846E1	2.23332E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.16689E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16536E-1	-7.97725E-1	-9.13236E0	-9.14285E0	4.00543E-3	9.65595E-2	2.73375E1	-3.26488E1	-3.2611E1	2.68586E1	2.22945E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.19723E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.1656E-1	-7.9751E-1	-9.13243E0	-9.14268E0	4.07696E-3	9.63688E-2	2.73321E1	-3.26705E1	-3.26074E1	2.68202E1	2.22945E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.21255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16751E-1	-7.97892E-1	-9.13255E0	-9.14288E0	4.1008E-3	9.64642E-2	2.73205E1	-3.26488E1	-3.25907E1	2.68586E1	2.23915E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.20487E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16417E-1	-7.97844E-1	-9.1326E0	-9.14292E0	3.98159E-3	9.62257E-2	2.72961E1	-3.26651E1	-3.26056E1	2.68442E1	2.23506E-9	2.52093E-3	2.52093E-3	6.3074E-3	2.19E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16536E-1	-7.97749E-1	-9.13246E0	-9.14283E0	3.40939E-3	9.59873E-2	2.73321E1	-3.26579E1	-3.26092E1	2.6834E1	2.23526E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.19913E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16631E-1	-7.97582E-1	-9.13248E0	-9.14307E0	3.76701E-3	9.59396E-2	2.73246E1	-3.26378E1	-3.25847E1	2.68382E1	2.2372E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.21832E-2