[Scan]
initial_time=2016-01-18T17:34:34
final_time=2016-01-18T17:34:53
ip_count=19
run=1024
dataset=2
scan=157
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.3596E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.95758E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=1.09768E-10
ql4_vset=
ql4_vmon=-9.14319E0
ql4_imon=-1.05381E-11
mult1=-9.93767E-9
mult2=-2.63209E-9
rf_tmon=-3.85105E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.79086E-3
ql5_imon=1.68827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68157E0
bslens_imon=2.65339E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.999E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53474E1
cs_ef1b_imon=2.8418E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02342E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04751E1
cs_ea1_imon=2.57439E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30892E0
lens1_imon=2.39882E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64796E1
os_ef1alow_imon=2.98289E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03409E1
cs_ea2_imon=1.48725E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8412E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.3486E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11697E1
os_restr1_imon=4.25537E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.34379E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63548E1
os_ef1bup_imon=3.07159E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25771E0
cs_ionrep_imon=1.19712E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91984E2
cs_nozzle_imon=1.93566E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02071E1
cs_anode1_imon=2.97354E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.34663E-8
tplens_vset=1.4E-1
tplens_vmon=1.72566E0
tplens_imon=-1.99239E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26528E1
iondef3_imon=1.50709E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26379E1
iondef2_imon=1.56325E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03078E2
lens6_imon=2.98136E-4
ql6_vset=1.0E-1
ql6_vmon=9.61065E-2
ql6_imon=4.03749E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29453E0
ionrepsh_imon=1.75941E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33932E1
lens5b_imon=2.16896E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4867E0
os_ea2_imon=-7.12113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06225E2
lens4b_imon=2.00728E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16516E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04957E0
os_ef2alow_imon=-2.60051E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01998E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11423E1
os_restr2_imon=3.42714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.2888E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.23438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73007E1
iondef1_imon=1.11476E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.09177E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.23083E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.96853E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14199E0
cs_ionaccel_imon=-1.72849E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47267E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.81134E-6
window_vset=0.0E0
window_vmon=2.60013E-1
window_imon=-7.74134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82759E2
mask1_imon=2.39327E-4
mask2_vset=0.0E0
mask2_vmon=-1.86625E1
mask2_imon=-7.81619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.82331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.19858E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=7.69977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2151E0
defgridb_imon=5.53971E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33232E1
os_fil1_imon=9.42551E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65235E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30703E1
cs_fil1_imon=9.95608E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63239E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67129E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23741E-2
os_fil2_imon=-2.73735E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.75998E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69025E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.79973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22792E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34835E-3
inlet_lpb_pmon=2.19782E-2
chamber_ion_pmon=2.21401E-9
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32365E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-8.16321E-1	-7.97558E-1	-9.13217E0	-9.14283E0	3.76701E-3	9.64165E-2	2.73279E1	-3.26428E1	-3.26464E1	2.68424E1	2.23306E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.1959E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.16584E-1	-7.97582E-1	-9.13236E0	-9.1428E0	3.91006E-3	9.62973E-2	2.73117E1	-3.26675E1	-3.26164E1	2.6825E1	2.23235E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.20871E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09302E0	-8.17084E-1	-7.97653E-1	-9.13239E0	-9.14285E0	3.76701E-3	9.61781E-2	2.73541E1	-3.2688E1	-3.26284E1	2.68418E1	2.23818E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.20487E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.16417E-1	-7.97749E-1	-9.13227E0	-9.14292E0	3.91006E-3	9.64642E-2	2.73369E1	-3.26518E1	-3.2617E1	2.68151E1	2.2406E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.19785E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.1656E-1	-7.97653E-1	-9.13234E0	-9.14307E0	3.98159E-3	9.63688E-2	2.73243E1	-3.26518E1	-3.26254E1	2.68437E1	2.23332E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.20105E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09317E0	-8.16417E-1	-7.97629E-1	-9.13243E0	-9.14311E0	4.1008E-3	9.64642E-2	2.73694E1	-3.26915E1	-3.26431E1	2.68229E1	2.23332E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.20296E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16321E-1	-7.97439E-1	-9.13265E0	-9.1429E0	3.93391E-3	9.61781E-2	2.73273E1	-3.26591E1	-3.26224E1	2.68328E1	2.23107E-9	2.51847E-3	2.51847E-3	6.30202E-3	2.20348E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.1625E-1	-7.97606E-1	-9.13277E0	-9.14273E0	3.91006E-3	9.61065E-2	2.73261E1	-3.26753E1	-3.26248E1	2.68436E1	2.22075E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.19151E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16417E-1	-7.97701E-1	-9.13274E0	-9.14278E0	4.02927E-3	9.61542E-2	2.73466E1	-3.26404E1	-3.26224E1	2.68364E1	2.21401E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.19151E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16298E-1	-7.97915E-1	-9.13239E0	-9.14299E0	3.91006E-3	9.62019E-2	2.7347E1	-3.26561E1	-3.25995E1	2.68354E1	2.23235E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.19532E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16369E-1	-7.98082E-1	-9.13227E0	-9.14304E0	3.88622E-3	9.6035E-2	2.73093E1	-3.26506E1	-3.26524E1	2.68151E1	2.21401E-9	2.51525E-3	2.51525E-3	6.29665E-3	2.1885E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16321E-1	-7.97868E-1	-9.13241E0	-9.14314E0	3.93391E-3	9.60827E-2	2.73544E1	-3.26717E1	-3.25996E1	2.68447E1	2.22945E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.20105E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16321E-1	-7.97915E-1	-9.13203E0	-9.14319E0	3.83854E-3	9.57727E-2	2.73122E1	-3.26673E1	-3.26508E1	2.68352E1	2.23818E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.21255E-2
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16321E-1	-7.97462E-1	-9.13227E0	-9.14328E0	3.93391E-3	9.60112E-2	2.7329E1	-3.26542E1	-3.26236E1	2.68376E1	2.21495E-9	2.51739E-3	2.51739E-3	6.31817E-3	2.1941E-2
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.1625E-1	-7.97749E-1	-9.13231E0	-9.14323E0	3.88622E-3	9.5892E-2	2.73735E1	-3.26644E1	-3.26201E1	2.6849E1	2.21401E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.19723E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16226E-1	-7.97749E-1	-9.13265E0	-9.14319E0	4.1008E-3	9.6035E-2	2.73159E1	-3.26554E1	-3.26266E1	2.68556E1	2.21305E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.20105E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16321E-1	-7.97772E-1	-9.13236E0	-9.14319E0	3.93391E-3	9.6035E-2	2.73375E1	-3.26416E1	-3.25906E1	2.68454E1	2.21401E-9	2.51007E-3	2.51007E-3	6.31837E-3	2.19913E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16345E-1	-7.98106E-1	-9.13243E0	-9.1433E0	3.76701E-3	9.62257E-2	2.73375E1	-3.26189E1	-3.26419E1	2.68059E1	2.21401E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.20679E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16369E-1	-7.97963E-1	-9.13255E0	-9.14338E0	3.52859E-3	9.61542E-2	2.73331E1	-3.26445E1	-3.26366E1	2.68434E1	2.21401E-9	2.51525E-3	2.51525E-3	6.29128E-3	2.20348E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16274E-1	-7.98154E-1	-9.13246E0	-9.14319E0	3.79086E-3	9.61065E-2	2.73007E1	-3.26379E1	-3.26528E1	2.68484E1	2.21401E-9	2.51854E-3	2.51854E-3	6.34835E-3	2.19782E-2