[Scan]
initial_time=2016-01-18T17:35:01
final_time=2016-01-18T17:35:20
ip_count=19
run=1024
dataset=2
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.35715E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.89098E-9
ql3_vset=
ql3_vmon=-9.13262E0
ql3_imon=1.54889E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=-6.4373E-13
mult1=-9.63202E-9
mult2=-2.74855E-9
rf_tmon=-4.77078E-3
rf_agc=3.39524E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.65417E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=2.02669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55136E1
cs_ef1b_imon=2.87134E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04303E1
cs_ea1_imon=2.56852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.80452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.46684E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.93405E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.34104E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14699E1
os_ea1_imon=2.35042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.2044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91992E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.96937E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2037E0
olens4_imon=3.35103E-8
tplens_vset=1.4E-1
tplens_vmon=1.66787E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.51983E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03104E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.61781E-2
ql6_imon=4.07397E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49663E0
os_ea2_imon=-9.26608E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.15677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.43139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73574E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.17927E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.96557E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82741E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92686E3
multa_neg_imon=7.06197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.04034E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=5.88315E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.39543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65512E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=9.95392E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66997E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71886E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.19598E-2
chamber_ion_pmon=2.23773E-9
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16488E-1	-7.98035E-1	-9.13243E0	-9.14299E0	3.88622E-3	9.61542E-2	2.73057E1	-3.26602E1	-3.26463E1	2.6858E1	2.21826E-9	2.51793E-3	2.51793E-3	6.32626E-3	2.19036E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16631E-1	-7.98535E-1	-9.13253E0	-9.14295E0	3.93391E-3	9.62019E-2	2.73369E1	-3.26731E1	-3.26064E1	2.68302E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16178E-1	-7.98345E-1	-9.13253E0	-9.1429E0	4.1008E-3	9.61304E-2	2.72997E1	-3.26524E1	-3.26266E1	2.68442E1	2.21401E-9	2.52473E-3	2.52473E-3	6.31858E-3	2.18108E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16607E-1	-7.98225E-1	-9.1325E0	-9.14307E0	3.83854E-3	9.64165E-2	2.73635E1	-3.26549E1	-3.26124E1	2.68316E1	2.21401E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.19598E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16584E-1	-7.98106E-1	-9.13262E0	-9.14285E0	3.8147E-3	9.63688E-2	2.73189E1	-3.26891E1	-3.2629E1	2.68328E1	2.21401E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.19598E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16321E-1	-7.97987E-1	-9.13267E0	-9.14276E0	3.91006E-3	9.64403E-2	2.73219E1	-3.26556E1	-3.2637E1	2.68424E1	2.21401E-9	2.51581E-3	2.51581E-3	6.32978E-3	2.19463E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16536E-1	-7.98011E-1	-9.13272E0	-9.14309E0	3.86238E-3	9.63688E-2	2.73517E1	-3.26756E1	-3.2626E1	2.68388E1	2.21401E-9	2.51498E-3	2.51498E-3	6.3074E-3	2.2003E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16703E-1	-7.98011E-1	-9.13239E0	-9.14307E0	3.8147E-3	9.62019E-2	2.73405E1	-3.26603E1	-3.2614E1	2.68238E1	2.21401E-9	2.51203E-3	2.51203E-3	6.33436E-3	2.1941E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.1656E-1	-7.97963E-1	-9.13224E0	-9.14319E0	4.00543E-3	9.63211E-2	2.72985E1	-3.26536E1	-3.2596E1	2.6792E1	2.21401E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.19341E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16417E-1	-7.9782E-1	-9.13236E0	-9.14304E0	4.07696E-3	9.62973E-2	2.73118E1	-3.26634E1	-3.25997E1	2.68514E1	2.21401E-9	2.52757E-3	2.52757E-3	6.32386E-3	2.19913E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1625E-1	-7.97796E-1	-9.1325E0	-9.14292E0	4.3869E-3	9.62973E-2	2.73508E1	-3.26627E1	-3.26314E1	2.68514E1	2.21497E-9	2.51443E-3	2.51443E-3	6.30192E-3	2.1896E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16369E-1	-7.98035E-1	-9.13258E0	-9.14309E0	4.24385E-3	9.61304E-2	2.73309E1	-3.26464E1	-3.26518E1	2.68424E1	2.22875E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.19075E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16321E-1	-7.98321E-1	-9.1325E0	-9.14319E0	4.1008E-3	9.61781E-2	2.73139E1	-3.26254E1	-3.26349E1	2.67966E1	2.21401E-9	2.51225E-3	2.51225E-3	6.31288E-3	2.20296E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16464E-1	-7.98011E-1	-9.13246E0	-9.14316E0	3.76701E-3	9.61781E-2	2.72745E1	-3.26705E1	-3.26242E1	2.6819E1	2.21401E-9	2.51287E-3	2.51287E-3	6.29684E-3	2.18926E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16274E-1	-7.97892E-1	-9.13224E0	-9.14302E0	3.93391E-3	9.62019E-2	2.74607E1	-3.26524E1	-3.26218E1	2.68563E1	2.21305E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.19723E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16536E-1	-7.97844E-1	-9.13262E0	-9.14335E0	3.76701E-3	9.60588E-2	2.73399E1	-3.26939E1	-3.2611E1	2.68484E1	2.21401E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.1858E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16321E-1	-7.97725E-1	-9.13274E0	-9.1429E0	3.95775E-3	9.62257E-2	2.72992E1	-3.26697E1	-3.26307E1	2.68587E1	2.22751E-9	2.51826E-3	2.51826E-3	6.31563E-3	2.19723E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16345E-1	-7.97868E-1	-9.13262E0	-9.14302E0	3.98159E-3	9.61065E-2	2.73139E1	-3.27133E1	-3.25853E1	2.6825E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16059E-1	-7.97868E-1	-9.13265E0	-9.14321E0	3.79086E-3	9.59158E-2	2.72877E1	-3.26585E1	-3.26332E1	2.68134E1	2.22726E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.1941E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16298E-1	-7.97796E-1	-9.13262E0	-9.1433E0	4.05312E-3	9.61781E-2	2.73574E1	-3.26717E1	-3.262E1	2.6852E1	2.23773E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.19598E-2