[Scan]
initial_time=2016-01-18T17:35:27
final_time=2016-01-18T17:35:47
ip_count=19
run=1024
dataset=2
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.3588E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.96965E-9
ql3_vset=
ql3_vmon=-9.13227E0
ql3_imon=1.19579E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-6.75917E-12
mult1=-9.27081E-9
mult2=-2.55094E-9
rf_tmon=-4.96905E-3
rf_agc=3.30512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.71933E-3
ql5_imon=1.67882E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.38512E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19982E1
lens5a_imon=2.01733E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04843E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52853E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02055E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04847E1
cs_ea1_imon=2.6028E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3144E0
lens1_imon=2.67896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65041E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02803E1
cs_ea2_imon=1.48989E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.929E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.34893E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.38353E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25026E0
cs_ionrep_imon=1.15014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93273E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=2.97261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.3393E-8
tplens_vset=1.4E-1
tplens_vmon=1.71428E0
tplens_imon=1.33589E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.48291E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2641E1
iondef2_imon=1.55858E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03125E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.59396E-2
ql6_imon=4.08669E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33107E0
ionrepsh_imon=1.75398E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33523E1
lens5b_imon=2.17049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74952E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48411E0
os_ea2_imon=-8.14038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06234E2
lens4b_imon=2.00843E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.43896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.25704E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72672E1
iondef1_imon=1.09174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68267E1
iondef4_imon=1.12594E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.20653E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.9681E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16318E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56729E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=2.76207E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82743E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86764E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.25181E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.4511E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.14162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2105E0
defgridb_imon=5.58428E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.41129E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65462E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30689E1
cs_fil1_imon=9.95116E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22629E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72698E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-1.81303E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74288E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22617E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.21857E-2
chamber_ion_pmon=2.21306E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34064E-1
res40_imon=-2.7096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09255E0	-8.15988E-1	-7.98035E-1	-9.13234E0	-9.14259E0	3.88622E-3	9.62734E-2	2.73393E1	-3.26537E1	-3.26272E1	2.68238E1	2.21401E-9	2.5188E-3	2.5188E-3	6.28006E-3	2.19532E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16154E-1	-7.97963E-1	-9.13231E0	-9.14257E0	3.98159E-3	9.62257E-2	2.7263E1	-3.26735E1	-3.26188E1	2.68256E1	2.22461E-9	2.51552E-3	2.51552E-3	6.29098E-3	2.19532E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.16274E-1	-7.98082E-1	-9.13265E0	-9.14278E0	3.60012E-3	9.61781E-2	2.7311E1	-3.26467E1	-3.26207E1	2.68285E1	2.22848E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.20871E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.1625E-1	-7.97749E-1	-9.13265E0	-9.14278E0	4.02927E-3	9.61781E-2	2.73201E1	-3.26482E1	-3.26212E1	2.68364E1	2.21873E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.19598E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16178E-1	-7.97915E-1	-9.13253E0	-9.14299E0	3.98159E-3	9.62257E-2	2.73538E1	-3.26705E1	-3.25948E1	2.68346E1	2.23818E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.19532E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16178E-1	-7.98178E-1	-9.13241E0	-9.14304E0	3.55244E-3	9.61065E-2	2.72603E1	-3.26502E1	-3.26301E1	2.68328E1	2.21873E-9	2.51525E-3	2.51525E-3	6.28592E-3	2.20913E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16226E-1	-7.98178E-1	-9.13246E0	-9.14295E0	3.83854E-3	9.58443E-2	2.73171E1	-3.26543E1	-3.2641E1	2.68526E1	2.21497E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.20679E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16369E-1	-7.98035E-1	-9.13272E0	-9.14311E0	3.52859E-3	9.59158E-2	2.73225E1	-3.26422E1	-3.26735E1	2.6846E1	2.21882E-9	2.51225E-3	2.51225E-3	6.3074E-3	2.21447E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.16298E-1	-7.97963E-1	-9.13265E0	-9.14311E0	3.88622E-3	9.57966E-2	2.72949E1	-3.26645E1	-3.25797E1	2.68526E1	2.22075E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.21063E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16202E-1	-7.97939E-1	-9.13229E0	-9.14307E0	3.45707E-3	9.60827E-2	2.72817E1	-3.26765E1	-3.25846E1	2.6852E1	2.21401E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.2164E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16178E-1	-7.97963E-1	-9.13239E0	-9.14302E0	3.76701E-3	9.60588E-2	2.72883E1	-3.26591E1	-3.26278E1	2.68334E1	2.21401E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.20536E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16202E-1	-7.97963E-1	-9.13243E0	-9.14335E0	3.74317E-3	9.6035E-2	2.73959E1	-3.26443E1	-3.25688E1	2.6852E1	2.21401E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.20679E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16059E-1	-7.98225E-1	-9.13265E0	-9.14309E0	3.83854E-3	9.62257E-2	2.73473E1	-3.26505E1	-3.25979E1	2.68202E1	2.21401E-9	2.51443E-3	2.51443E-3	6.29645E-3	2.21447E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09309E0	-8.16226E-1	-7.97915E-1	-9.13281E0	-9.14285E0	3.93391E-3	9.62019E-2	2.7275E1	-3.26773E1	-3.26549E1	2.68209E1	2.21305E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.21255E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16369E-1	-7.98011E-1	-9.13267E0	-9.14297E0	4.00543E-3	9.61065E-2	2.73198E1	-3.26474E1	-3.26383E1	2.68238E1	2.21401E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.20871E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16417E-1	-7.97677E-1	-9.13243E0	-9.14314E0	3.93391E-3	9.62496E-2	2.73319E1	-3.26579E1	-3.25807E1	2.68272E1	2.21401E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.21255E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16035E-1	-7.97892E-1	-9.13239E0	-9.14302E0	3.8147E-3	9.65118E-2	2.72956E1	-3.2654E1	-3.26228E1	2.68283E1	2.21401E-9	2.52405E-3	2.52405E-3	6.33341E-3	2.21538E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16345E-1	-7.97558E-1	-9.13224E0	-9.14295E0	3.69549E-3	9.62973E-2	2.72474E1	-3.26723E1	-3.26488E1	2.68406E1	2.21401E-9	2.52454E-3	2.52454E-3	6.33065E-3	2.21549E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16274E-1	-7.97963E-1	-9.13239E0	-9.14304E0	3.83854E-3	9.64403E-2	2.74152E1	-3.26573E1	-3.26173E1	2.68364E1	2.21401E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.2129E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16059E-1	-7.97939E-1	-9.13227E0	-9.14311E0	3.71933E-3	9.59396E-2	2.72672E1	-3.2641E1	-3.26164E1	2.68267E1	2.21306E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.21857E-2