[Scan]
initial_time=2016-01-18T17:52:46
final_time=2016-01-18T17:53:05
ip_count=19
run=1024
dataset=3
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.80122E-1
ql1_imon=1.34034E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.94718E-9
ql3_vset=
ql3_vmon=-9.04713E0
ql3_imon=2.51138E-10
ql4_vset=
ql4_vmon=-9.04243E0
ql4_imon=1.00219E-10
mult1=-9.84219E-9
mult2=-2.79577E-9
rf_tmon=-5.02859E-3
rf_agc=3.18697E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.74438E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65586E0
bslens_imon=2.40257E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19399E1
lens5a_imon=1.98253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53945E1
cs_ef1b_imon=2.83969E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04536E1
cs_ea1_imon=2.53559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32911E0
lens1_imon=2.50685E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65066E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03557E1
cs_ea2_imon=1.48091E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84133E1
cs_ef1a_imon=2.94673E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.33179E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11494E1
os_restr1_imon=4.24543E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14882E1
os_ea1_imon=2.34127E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63543E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21618E0
cs_ionrep_imon=1.18439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91972E2
cs_nozzle_imon=1.9334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01531E1
cs_anode1_imon=2.95854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.33784E-8
tplens_vset=1.4E-1
tplens_vmon=1.67677E0
tplens_imon=-1.94159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50281E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.55183E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0307E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=4.10272E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28165E0
ionrepsh_imon=1.75936E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3386E1
lens5b_imon=2.15565E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5105E0
os_ea2_imon=-8.05971E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.004E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.1469E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.47728E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80434E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11517E1
os_restr2_imon=3.42422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.27356E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.2475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73511E1
iondef1_imon=1.08185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.94144E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.87098E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-1.77875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47098E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.93806E-6
window_vset=0.0E0
window_vmon=2.62864E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8275E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-8.02203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.21711E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.74782E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.89035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2905E0
defgridb_imon=6.00739E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.44221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09501E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65101E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30733E1
cs_fil1_imon=9.94097E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62175E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66347E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.7329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76176E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97097E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.84874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2252E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64998E-1
res40_imon=-2.45295E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.79669E-1	-8.96263E-1	-9.04696E0	-9.04217E0	4.31538E-3	9.57966E-2	2.7332E1	-3.26389E1	-3.26095E1	2.6825E1	1.1929E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.00348E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.79717E-1	-8.96525E-1	-9.04715E0	-9.0416E0	4.14848E-3	9.60588E-2	2.73204E1	-3.26621E1	-3.26291E1	2.6849E1	1.19237E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01475E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.79931E-1	-8.96335E-1	-9.04696E0	-9.04183E0	3.95775E-3	9.58443E-2	2.73289E1	-3.26579E1	-3.25855E1	2.68331E1	1.19186E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.8048E-1	-8.96692E-1	-9.04694E0	-9.04188E0	4.36306E-3	9.58204E-2	2.73039E1	-3.2685E1	-3.26119E1	2.68442E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.80432E-1	-8.96454E-1	-9.0471E0	-9.042E0	4.29153E-3	9.56535E-2	2.73216E1	-3.26376E1	-3.25954E1	2.68466E1	1.19239E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.80694E-1	-8.96454E-1	-9.04696E0	-9.042E0	4.02927E-3	9.55343E-2	2.73273E1	-3.26561E1	-3.26206E1	2.68418E1	1.1929E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.80027E-1	-8.96406E-1	-9.04703E0	-9.04179E0	3.8147E-3	9.58204E-2	2.73004E1	-3.26307E1	-3.26101E1	2.68424E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.79908E-1	-8.96502E-1	-9.04732E0	-9.04231E0	4.07696E-3	9.57966E-2	2.73163E1	-3.26628E1	-3.2607E1	2.68449E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.80051E-1	-8.96335E-1	-9.04715E0	-9.04255E0	3.86238E-3	9.56297E-2	2.73222E1	-3.26703E1	-3.25888E1	2.68472E1	1.1929E-7	2.51498E-3	2.51498E-3	6.30351E-3	3.00308E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.79884E-1	-8.96549E-1	-9.04703E0	-9.04198E0	3.86238E-3	9.56059E-2	2.73081E1	-3.26735E1	-3.26368E1	2.68352E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9952E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.80075E-1	-8.96335E-1	-9.04746E0	-9.042E0	4.00543E-3	9.58204E-2	2.73299E1	-3.26419E1	-3.26107E1	2.68493E1	1.1929E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.79812E-1	-8.96406E-1	-9.04713E0	-9.04217E0	4.12464E-3	9.56774E-2	2.73111E1	-3.26561E1	-3.2638E1	2.68286E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.80075E-1	-8.96597E-1	-9.0472E0	-9.04202E0	3.93391E-3	9.56059E-2	2.73237E1	-3.26543E1	-3.2626E1	2.68599E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.80027E-1	-8.96335E-1	-9.04727E0	-9.04195E0	3.91006E-3	9.57012E-2	2.7347E1	-3.26467E1	-3.26065E1	2.68244E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99613E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.79931E-1	-8.96525E-1	-9.0472E0	-9.04238E0	4.1008E-3	9.58204E-2	2.73137E1	-3.26591E1	-3.25966E1	2.68214E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.79908E-1	-8.96311E-1	-9.04741E0	-9.0421E0	4.24385E-3	9.56535E-2	2.73346E1	-3.26579E1	-3.2636E1	2.68731E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.80003E-1	-8.9643E-1	-9.04744E0	-9.0421E0	3.93391E-3	9.57489E-2	2.72991E1	-3.26645E1	-3.26206E1	2.68569E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.97445E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79908E-1	-8.96025E-1	-9.04715E0	-9.04224E0	4.02927E-3	9.56535E-2	2.73234E1	-3.26402E1	-3.26071E1	2.68569E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.79979E-1	-8.96287E-1	-9.04756E0	-9.04176E0	4.07696E-3	9.57966E-2	2.73622E1	-3.26795E1	-3.26218E1	2.6822E1	1.1929E-7	2.51182E-3	2.51182E-3	6.3074E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.80122E-1	-8.96311E-1	-9.04713E0	-9.04243E0	4.17233E-3	9.5582E-2	2.73511E1	-3.26785E1	-3.26178E1	2.6831E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1