[Scan]
initial_time=2016-01-18T17:53:12
final_time=2016-01-18T17:53:32
ip_count=19
run=1024
dataset=3
scan=162
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.80146E-1
ql1_imon=1.3422E-8
ql2_vset=
ql2_vmon=-8.9643E-1
ql2_imon=1.88543E-9
ql3_vset=
ql3_vmon=-9.04756E0
ql3_imon=2.92742E-10
ql4_vset=
ql4_vmon=-9.04155E0
ql4_imon=8.43644E-11
mult1=-9.54665E-9
mult2=-2.69582E-9
rf_tmon=-5.05808E-3
rf_agc=3.25481E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.7337E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69925E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19311E1
lens5a_imon=2.01023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.82822E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04712E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=2.54291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03655E1
cs_ea2_imon=1.47896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=2.93317E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.33071E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.24577E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14598E1
os_ea1_imon=2.3539E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08052E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.18873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91976E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02099E1
cs_anode1_imon=2.98217E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.3327E-8
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26343E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03088E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.60112E-2
ql6_imon=4.10764E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=1.77273E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74918E1
cs_ef2b_imon=3.11701E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48865E0
os_ea2_imon=-1.02801E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.16184E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.111E1
os_restr2_imon=3.4277E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.24681E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.34089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.85538E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.806E-6
window_vset=0.0E0
window_vmon=2.53018E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-6.11064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.46658E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19295E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.4114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06895E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64753E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=9.97746E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62824E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66466E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.63434E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0394E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37393E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63145E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22592E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.63261E-1
res40_imon=-2.50508E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.80289E-1	-8.96478E-1	-9.04713E0	-9.0415E0	4.19617E-3	9.57489E-2	2.73254E1	-3.26642E1	-3.26011E1	2.68424E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.80146E-1	-8.96072E-1	-9.0471E0	-9.04181E0	4.26769E-3	9.5582E-2	2.73571E1	-3.26897E1	-3.26003E1	2.68394E1	1.1929E-7	2.51603E-3	2.51603E-3	6.29157E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09317E0	-8.80194E-1	-8.96287E-1	-9.04748E0	-9.04198E0	4.12464E-3	9.57966E-2	2.73086E1	-3.26413E1	-3.26101E1	2.68209E1	1.1929E-7	2.51809E-3	2.51809E-3	6.32099E-3	3.02454E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.80122E-1	-8.96525E-1	-9.0471E0	-9.04155E0	4.07696E-3	9.58204E-2	2.73216E1	-3.26632E1	-3.26402E1	2.68466E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.80194E-1	-8.96358E-1	-9.04708E0	-9.04169E0	3.83854E-3	9.59396E-2	2.73499E1	-3.26691E1	-3.26124E1	2.68655E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.80146E-1	-8.96406E-1	-9.0472E0	-9.04148E0	4.05312E-3	9.57489E-2	2.73237E1	-3.26669E1	-3.26116E1	2.68406E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.80265E-1	-8.96406E-1	-9.04715E0	-9.04171E0	4.36306E-3	9.57966E-2	2.73315E1	-3.26573E1	-3.26362E1	2.684E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.80265E-1	-8.96621E-1	-9.04727E0	-9.04162E0	4.05312E-3	9.57012E-2	2.73165E1	-3.26176E1	-3.2626E1	2.68484E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.8017E-1	-8.96597E-1	-9.04696E0	-9.0415E0	4.05312E-3	9.5892E-2	2.73213E1	-3.26543E1	-3.26284E1	2.68316E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.80194E-1	-8.96263E-1	-9.04706E0	-9.04162E0	4.45843E-3	9.5892E-2	2.7352E1	-3.26543E1	-3.26182E1	2.68166E1	1.1929E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99348E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.80122E-1	-8.96168E-1	-9.04739E0	-9.04179E0	4.29153E-3	9.58681E-2	2.73285E1	-3.26591E1	-3.26146E1	2.68364E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.80146E-1	-8.96287E-1	-9.04727E0	-9.04212E0	4.07696E-3	9.60112E-2	2.73442E1	-3.26729E1	-3.26008E1	2.68394E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.0071E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.79979E-1	-8.96168E-1	-9.04756E0	-9.04164E0	3.86238E-3	9.58681E-2	2.73128E1	-3.26655E1	-3.26461E1	2.68052E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80194E-1	-8.96025E-1	-9.0476E0	-9.04214E0	4.12464E-3	9.58681E-2	2.73339E1	-3.26344E1	-3.26098E1	2.68046E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.80003E-1	-8.96335E-1	-9.0476E0	-9.042E0	3.69549E-3	9.57489E-2	2.7349E1	-3.26717E1	-3.26002E1	2.6828E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.80098E-1	-8.96144E-1	-9.04775E0	-9.04164E0	4.17233E-3	9.57489E-2	2.73393E1	-3.2649E1	-3.26042E1	2.68441E1	1.1929E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.0071E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.80051E-1	-8.95882E-1	-9.04744E0	-9.04186E0	4.12464E-3	9.57727E-2	2.73204E1	-3.26266E1	-3.26285E1	2.68142E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.80265E-1	-8.96025E-1	-9.04739E0	-9.04174E0	4.02927E-3	9.60588E-2	2.73393E1	-3.26933E1	-3.26449E1	2.68196E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.80146E-1	-8.96358E-1	-9.04744E0	-9.04193E0	3.69549E-3	9.59396E-2	2.7308E1	-3.26508E1	-3.26236E1	2.68316E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.80146E-1	-8.9643E-1	-9.04756E0	-9.04155E0	4.1008E-3	9.60112E-2	2.7308E1	-3.26461E1	-3.26343E1	2.68424E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1