[Scan]
initial_time=2016-01-18T17:54:06
final_time=2016-01-18T17:54:25
ip_count=19
run=1024
dataset=3
scan=164
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.80027E-1
ql1_imon=1.3391E-8
ql2_vset=
ql2_vmon=-8.96144E-1
ql2_imon=1.95978E-9
ql3_vset=
ql3_vmon=-9.04739E0
ql3_imon=1.88208E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=8.0359E-11
mult1=-9.60575E-9
mult2=-2.68014E-9
rf_tmon=-5.37663E-3
rf_agc=3.19228E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.71444E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=1.97306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.84899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=2.54149E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.47436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93116E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.34079E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.33904E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=1.19616E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.97405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.34963E-8
tplens_vset=1.4E-1
tplens_vmon=1.70632E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.5455E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03091E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.58681E-2
ql6_imon=4.1126E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=1.77521E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52581E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.41914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.27486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.10874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.3897E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.90798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56669E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.96029E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82737E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.30376E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.26837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=5.89154E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.44516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.96876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66826E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9584E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22573E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.16645E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.80122E-1	-8.96811E-1	-9.04689E0	-9.04155E0	4.3869E-3	9.58443E-2	2.73688E1	-3.26723E1	-3.26188E1	2.68256E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.80051E-1	-8.96811E-1	-9.0471E0	-9.04181E0	4.55379E-3	9.57251E-2	2.72757E1	-3.26753E1	-3.26176E1	2.68172E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.79955E-1	-8.96382E-1	-9.04734E0	-9.04186E0	4.36306E-3	9.56535E-2	2.73306E1	-3.26428E1	-3.26602E1	2.6843E1	1.19653E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.79955E-1	-8.96311E-1	-9.04739E0	-9.04186E0	4.41074E-3	9.57727E-2	2.73352E1	-3.26655E1	-3.26195E1	2.68493E1	1.20142E-7	2.51077E-3	2.51077E-3	6.31269E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.80027E-1	-8.96239E-1	-9.04729E0	-9.04205E0	4.86374E-3	9.60827E-2	2.72943E1	-3.26892E1	-3.26146E1	2.68238E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.80027E-1	-8.96478E-1	-9.04698E0	-9.04198E0	4.24385E-3	9.56535E-2	2.72758E1	-3.26878E1	-3.26522E1	2.68282E1	1.20177E-7	2.52197E-3	2.52197E-3	6.31779E-3	3.00494E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.80051E-1	-8.9612E-1	-9.04694E0	-9.04219E0	4.43459E-3	9.58443E-2	2.73213E1	-3.26765E1	-3.26026E1	2.68629E1	1.20154E-7	2.51611E-3	2.51611E-3	6.33021E-3	3.03794E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.79955E-1	-8.96382E-1	-9.04691E0	-9.04205E0	4.55379E-3	9.56297E-2	2.73405E1	-3.26502E1	-3.26797E1	2.6816E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.80122E-1	-8.96454E-1	-9.04701E0	-9.04226E0	4.48227E-3	9.57489E-2	2.7346E1	-3.26224E1	-3.26182E1	2.68505E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.79979E-1	-8.96645E-1	-9.04679E0	-9.04229E0	4.64916E-3	9.54628E-2	2.73039E1	-3.2672E1	-3.2629E1	2.68256E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.99E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.80289E-1	-8.96478E-1	-9.04713E0	-9.04217E0	4.48227E-3	9.55343E-2	2.7358E1	-3.26356E1	-3.26152E1	2.68545E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.80384E-1	-8.96573E-1	-9.04729E0	-9.04243E0	4.43459E-3	9.56059E-2	2.73576E1	-3.26708E1	-3.2626E1	2.68605E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.80337E-1	-8.96335E-1	-9.04732E0	-9.04219E0	4.26769E-3	9.5582E-2	2.73094E1	-3.26823E1	-3.26101E1	2.68172E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.80337E-1	-8.96454E-1	-9.0472E0	-9.04188E0	4.81606E-3	9.56535E-2	2.73493E1	-3.26726E1	-3.26207E1	2.68538E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.80098E-1	-8.96478E-1	-9.04732E0	-9.04152E0	4.29153E-3	9.56535E-2	2.73628E1	-3.26591E1	-3.2602E1	2.68322E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.80027E-1	-8.96168E-1	-9.04746E0	-9.04195E0	4.36306E-3	9.57966E-2	2.73297E1	-3.26639E1	-3.26146E1	2.68358E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.80098E-1	-8.96239E-1	-9.04737E0	-9.04224E0	4.26769E-3	9.6035E-2	2.73411E1	-3.26518E1	-3.26044E1	2.68267E1	1.20069E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.79812E-1	-8.96358E-1	-9.04732E0	-9.04162E0	4.02927E-3	9.57251E-2	2.74391E1	-3.27125E1	-3.25461E1	2.68388E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.79884E-1	-8.96239E-1	-9.04708E0	-9.04207E0	4.50611E-3	9.59158E-2	2.73257E1	-3.26832E1	-3.26467E1	2.68364E1	1.19705E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.80027E-1	-8.96144E-1	-9.04739E0	-9.0421E0	3.93391E-3	9.58681E-2	2.73198E1	-3.26927E1	-3.25995E1	2.68472E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1