[Scan]
initial_time=2016-01-18T17:54:32
final_time=2016-01-18T17:54:52
ip_count=19
run=1024
dataset=3
scan=165
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.79908E-1
ql1_imon=1.33838E-8
ql2_vset=
ql2_vmon=-8.96621E-1
ql2_imon=1.9448E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=2.34199E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=6.27637E-11
mult1=-9.91312E-9
mult2=-2.58215E-9
rf_tmon=-5.15247E-3
rf_agc=3.38105E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.73509E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67095E0
bslens_imon=2.51E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19492E1
lens5a_imon=1.9964E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.8389E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.01974E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04535E1
cs_ea1_imon=2.55799E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35236E0
lens1_imon=2.55775E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03972E1
cs_ea2_imon=1.49393E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.93837E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.32635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.25742E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14804E1
os_ea1_imon=2.35194E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22516E0
cs_ionrep_imon=1.17696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9199E2
cs_nozzle_imon=1.93405E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.97405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.3369E-8
tplens_vset=1.4E-1
tplens_vmon=1.67816E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.49173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26354E1
iondef2_imon=1.56703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0309E2
lens6_imon=2.98103E-4
ql6_vset=1.0E-1
ql6_vmon=9.57489E-2
ql6_imon=4.10942E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25944E0
ionrepsh_imon=1.77675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.1547E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7524E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51716E0
os_ea2_imon=-6.561E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11448E1
os_restr2_imon=3.42383E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68331E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.33029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.83077E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=3.91534E-1
window_imon=-6.55342E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82756E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.93131E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.20134E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.64849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39742E0
defgridb_imon=6.01402E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.43976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06789E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65234E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30759E1
cs_fil1_imon=9.96047E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25257E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79395E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22584E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.56889E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.80098E-1	-8.96311E-1	-9.0471E0	-9.04207E0	4.26769E-3	9.59158E-2	2.73231E1	-3.26834E1	-3.26098E1	2.68458E1	1.19819E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.97236E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.80051E-1	-8.96358E-1	-9.04703E0	-9.04214E0	4.17233E-3	9.55105E-2	2.73253E1	-3.2667E1	-3.26248E1	2.68257E1	1.20363E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.97394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.80098E-1	-8.96668E-1	-9.0472E0	-9.04231E0	4.48227E-3	9.59396E-2	2.73617E1	-3.27045E1	-3.25847E1	2.68574E1	1.20036E-7	2.51863E-3	2.51863E-3	6.31012E-3	3.01414E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.80146E-1	-8.96358E-1	-9.04715E0	-9.04226E0	4.02927E-3	9.58443E-2	2.72809E1	-3.26484E1	-3.2616E1	2.68343E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.80218E-1	-8.96382E-1	-9.04715E0	-9.04188E0	4.33922E-3	9.57966E-2	2.73311E1	-3.26679E1	-3.25835E1	2.6813E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.80313E-1	-8.96454E-1	-9.04698E0	-9.0421E0	4.673E-3	9.57251E-2	2.73069E1	-3.26536E1	-3.25743E1	2.6819E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.80027E-1	-8.96358E-1	-9.04675E0	-9.0421E0	4.48227E-3	9.57012E-2	2.73135E1	-3.26741E1	-3.2602E1	2.68268E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.80122E-1	-8.9643E-1	-9.04689E0	-9.04176E0	4.57764E-3	9.58204E-2	2.73219E1	-3.26891E1	-3.26122E1	2.68118E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.79979E-1	-8.96358E-1	-9.0471E0	-9.04202E0	4.45843E-3	9.56059E-2	2.73269E1	-3.2659E1	-3.25983E1	2.68088E1	1.19809E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.79741E-1	-8.96287E-1	-9.04689E0	-9.04176E0	4.48227E-3	9.57966E-2	2.73351E1	-3.26807E1	-3.25755E1	2.68563E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.79622E-1	-8.96335E-1	-9.04686E0	-9.04195E0	4.26769E-3	9.56059E-2	2.73291E1	-3.26891E1	-3.2599E1	2.6836E1	1.20174E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.79955E-1	-8.96192E-1	-9.04694E0	-9.04174E0	4.19617E-3	9.5892E-2	2.73257E1	-3.26343E1	-3.26236E1	2.68388E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.79741E-1	-8.96192E-1	-9.04698E0	-9.04219E0	4.24385E-3	9.56059E-2	2.73051E1	-3.26807E1	-3.26284E1	2.68202E1	1.19757E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.99E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.80122E-1	-8.96406E-1	-9.04698E0	-9.0421E0	4.24385E-3	9.56297E-2	2.73321E1	-3.26711E1	-3.26344E1	2.68328E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9943E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.79765E-1	-8.96215E-1	-9.04672E0	-9.04222E0	4.43459E-3	9.59158E-2	2.73165E1	-3.26494E1	-3.26182E1	2.6807E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.79622E-1	-8.96549E-1	-9.04713E0	-9.04188E0	4.26769E-3	9.60827E-2	2.7334E1	-3.26791E1	-3.26254E1	2.6855E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.7986E-1	-8.96192E-1	-9.04706E0	-9.04186E0	4.02927E-3	9.57489E-2	2.73742E1	-3.26765E1	-3.26398E1	2.68377E1	1.2033E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.79979E-1	-8.96502E-1	-9.04732E0	-9.04157E0	4.24385E-3	9.60112E-2	2.7301E1	-3.26773E1	-3.26372E1	2.68352E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.79836E-1	-8.96502E-1	-9.0471E0	-9.04186E0	4.19617E-3	9.60112E-2	2.73255E1	-3.26549E1	-3.26308E1	2.68508E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.79908E-1	-8.96621E-1	-9.04689E0	-9.04198E0	4.17233E-3	9.57489E-2	2.73263E1	-3.26354E1	-3.26183E1	2.68331E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.9892E-1