[Scan]
initial_time=2016-01-18T17:55:26
final_time=2016-01-18T17:55:45
ip_count=19
run=1024
dataset=3
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.80718E-1
ql1_imon=1.34187E-8
ql2_vset=
ql2_vmon=-8.96502E-1
ql2_imon=1.95414E-9
ql3_vset=
ql3_vmon=-9.04698E0
ql3_imon=2.40183E-10
ql4_vset=
ql4_vmon=-9.04219E0
ql4_imon=6.72698E-11
mult1=-9.36932E-9
mult2=-2.77421E-9
rf_tmon=-5.5713E-3
rf_agc=3.29434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.74648E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6783E0
bslens_imon=2.40716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20221E1
lens5a_imon=1.99236E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04876E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.81692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04468E1
cs_ea1_imon=2.53632E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30216E0
lens1_imon=2.49898E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.48402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.92576E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.32204E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14461E1
os_ea1_imon=2.34863E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22088E0
cs_ionrep_imon=1.16741E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93596E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.96504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.33924E-8
tplens_vset=1.4E-1
tplens_vmon=1.63531E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.50422E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.56188E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.56535E-2
ql6_imon=4.11488E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28087E0
ionrepsh_imon=1.75802E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34013E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47248E0
os_ea2_imon=-8.47095E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00549E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.32573E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.07779E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.34414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.81859E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56735E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82717E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.54197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.43273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=6.85513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13696E0
defgridb_imon=5.90015E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33212E1
os_fil1_imon=9.39723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=9.95224E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66338E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27885E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22649E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.91437E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80146E-1	-8.96335E-1	-9.04675E0	-9.04162E0	4.29153E-3	9.57489E-2	2.73021E1	-3.26482E1	-3.25972E1	2.68472E1	1.19766E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99879E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.79908E-1	-8.96215E-1	-9.04691E0	-9.04193E0	4.07696E-3	9.59158E-2	2.73165E1	-3.26524E1	-3.26002E1	2.68484E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.79884E-1	-8.96525E-1	-9.0472E0	-9.04183E0	3.86238E-3	9.57251E-2	2.73482E1	-3.26791E1	-3.26242E1	2.68298E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.80075E-1	-8.96454E-1	-9.0471E0	-9.04186E0	4.05312E-3	9.57251E-2	2.73315E1	-3.26627E1	-3.26302E1	2.6816E1	1.20311E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.80241E-1	-8.96025E-1	-9.04732E0	-9.04136E0	3.8147E-3	9.56059E-2	2.73105E1	-3.26512E1	-3.2638E1	2.68358E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.80289E-1	-8.96454E-1	-9.04744E0	-9.04164E0	3.88622E-3	9.56059E-2	2.7344E1	-3.26614E1	-3.26048E1	2.68638E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.80432E-1	-8.96645E-1	-9.04727E0	-9.04164E0	3.98159E-3	9.55343E-2	2.73261E1	-3.26699E1	-3.26356E1	2.6834E1	1.198E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.80313E-1	-8.96621E-1	-9.04751E0	-9.04195E0	3.91006E-3	9.56535E-2	2.72823E1	-3.2638E1	-3.26158E1	2.6852E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.80265E-1	-8.96454E-1	-9.04741E0	-9.04179E0	3.91006E-3	9.57489E-2	2.72811E1	-3.26711E1	-3.25924E1	2.6837E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.80241E-1	-8.96168E-1	-9.04717E0	-9.04176E0	4.24385E-3	9.56535E-2	2.73532E1	-3.26705E1	-3.25972E1	2.68148E1	1.20031E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.80075E-1	-8.96287E-1	-9.04729E0	-9.04207E0	4.33922E-3	9.58204E-2	2.73308E1	-3.26701E1	-3.26297E1	2.68262E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.80265E-1	-8.96502E-1	-9.04696E0	-9.04155E0	4.17233E-3	9.57966E-2	2.73305E1	-3.26638E1	-3.26673E1	2.68322E1	1.19978E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.80098E-1	-8.96358E-1	-9.0472E0	-9.04174E0	4.41074E-3	9.58443E-2	2.7344E1	-3.26773E1	-3.26543E1	2.68337E1	1.19749E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.9892E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80289E-1	-8.9612E-1	-9.04717E0	-9.04164E0	4.31538E-3	9.57966E-2	2.73364E1	-3.26396E1	-3.26431E1	2.68286E1	1.20158E-7	2.53031E-3	2.53031E-3	6.31817E-3	2.97394E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.80122E-1	-8.96358E-1	-9.04701E0	-9.04179E0	4.19617E-3	9.57489E-2	2.73508E1	-3.26819E1	-3.25816E1	2.68274E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.80289E-1	-8.96549E-1	-9.04734E0	-9.04188E0	4.19617E-3	9.59396E-2	2.73424E1	-3.26597E1	-3.26086E1	2.68358E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.80384E-1	-8.96645E-1	-9.0472E0	-9.04193E0	4.05312E-3	9.6035E-2	2.72973E1	-3.2626E1	-3.26092E1	2.68274E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.80313E-1	-8.96597E-1	-9.0472E0	-9.04195E0	4.14848E-3	9.58443E-2	2.73351E1	-3.2644E1	-3.26158E1	2.68352E1	1.19965E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.80551E-1	-8.96645E-1	-9.04729E0	-9.04214E0	4.36306E-3	9.58443E-2	2.73021E1	-3.26555E1	-3.2629E1	2.68346E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.80718E-1	-8.96502E-1	-9.04698E0	-9.04219E0	4.22001E-3	9.56535E-2	2.73198E1	-3.26396E1	-3.26549E1	2.68412E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.99686E-1