[Scan]
initial_time=2016-01-18T17:57:12
final_time=2016-01-18T17:57:32
ip_count=19
run=1024
dataset=3
scan=171
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.80408E-1
ql1_imon=1.3341E-8
ql2_vset=
ql2_vmon=-8.96478E-1
ql2_imon=1.92153E-9
ql3_vset=
ql3_vmon=-9.04717E0
ql3_imon=1.94609E-10
ql4_vset=
ql4_vmon=-9.04179E0
ql4_imon=6.34909E-11
mult1=-9.65928E-9
mult2=-2.69955E-9
rf_tmon=-4.24001E-3
rf_agc=3.38732E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.71398E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19559E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.82891E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.49902E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34837E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64672E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.50975E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=2.94116E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.34333E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.25099E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15807E1
os_ea1_imon=2.31568E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.06384E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21375E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91975E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.99225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.35984E-8
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26156E1
iondef3_imon=1.48285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26719E1
iondef2_imon=1.56037E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03051E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.07524E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=1.78441E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34088E1
lens5b_imon=2.15994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49101E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00297E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.1535E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04471E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11459E1
os_restr2_imon=3.43257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73443E1
iondef1_imon=1.10201E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.35724E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.93337E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-1.86911E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.78503E-1
window_imon=-8.61283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82732E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86558E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.46492E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36717E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.41569E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0715E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.95563E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62488E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67364E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8834E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.08875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22681E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.96128E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.2677E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.80098E-1	-8.96382E-1	-9.04682E0	-9.04198E0	4.12464E-3	9.57012E-2	2.73428E1	-3.2675E1	-3.2629E1	2.68502E1					
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.80051E-1	-8.9674E-1	-9.04722E0	-9.04219E0	4.24385E-3	9.56059E-2	2.73216E1	-3.26591E1	-3.26046E1	2.68388E1	1.2212E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.79574E-1	-8.96525E-1	-9.0471E0	-9.04198E0	4.05312E-3	9.58681E-2	2.73323E1	-3.26608E1	-3.26156E1	2.6839E1	1.22012E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.01209E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.79836E-1	-8.96144E-1	-9.04739E0	-9.04217E0	4.24385E-3	9.58204E-2	2.7352E1	-3.26765E1	-3.26038E1	2.68319E1	1.20344E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-8.80027E-1	-8.96335E-1	-9.04698E0	-9.04224E0	4.41074E-3	9.5582E-2	2.73303E1	-3.2611E1	-3.26963E1	2.68308E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.8017E-1	-8.96597E-1	-9.04729E0	-9.04193E0	4.48227E-3	9.56535E-2	2.72837E1	-3.26654E1	-3.26353E1	2.68382E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.80098E-1	-8.96478E-1	-9.04713E0	-9.04171E0	4.02927E-3	9.57251E-2	2.72781E1	-3.26717E1	-3.25906E1	2.68611E1	1.20394E-7	2.52765E-3	2.52765E-3	6.31269E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.80432E-1	-8.96716E-1	-9.04717E0	-9.042E0	4.62532E-3	9.5892E-2	2.73345E1	-3.26549E1	-3.26146E1	2.68476E1	1.20644E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.79741E-1	-8.96525E-1	-9.0472E0	-9.04188E0	4.33922E-3	9.58204E-2	2.73252E1	-3.26349E1	-3.26508E1	2.68454E1	1.20671E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.7955E-1	-8.96597E-1	-9.04744E0	-9.04214E0	4.33922E-3	9.57251E-2	2.73231E1	-3.26657E1	-3.26068E1	2.68226E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.79431E-1	-8.96668E-1	-9.0472E0	-9.04179E0	4.07696E-3	9.56059E-2	2.73093E1	-3.26615E1	-3.26518E1	2.68298E1	1.21856E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.79478E-1	-8.96716E-1	-9.0471E0	-9.04179E0	4.17233E-3	9.56774E-2	2.73267E1	-3.26759E1	-3.2647E1	2.68406E1	1.20986E-7	2.5188E-3	2.5188E-3	6.31563E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79741E-1	-8.96287E-1	-9.04729E0	-9.04179E0	4.26769E-3	9.56059E-2	2.73063E1	-3.26657E1	-3.26296E1	2.68214E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.79931E-1	-8.9643E-1	-9.04708E0	-9.04214E0	4.22001E-3	9.58443E-2	2.7344E1	-3.2662E1	-3.26119E1	2.68322E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.80027E-1	-8.96454E-1	-9.04744E0	-9.04212E0	4.12464E-3	9.57966E-2	2.7302E1	-3.2645E1	-3.26125E1	2.6846E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.80194E-1	-8.96168E-1	-9.04722E0	-9.04176E0	4.41074E-3	9.59158E-2	2.73496E1	-3.26615E1	-3.26218E1	2.68172E1	1.19978E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.0201E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.80361E-1	-8.96287E-1	-9.04691E0	-9.04181E0	4.1008E-3	9.58204E-2	2.73183E1	-3.26621E1	-3.26284E1	2.6855E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.80218E-1	-8.96573E-1	-9.04701E0	-9.04202E0	4.1008E-3	9.6035E-2	2.7333E1	-3.26471E1	-3.26203E1	2.68485E1	1.21697E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80146E-1	-8.96382E-1	-9.04722E0	-9.04198E0	4.31538E-3	9.56774E-2	2.73104E1	-3.26785E1	-3.2629E1	2.68388E1	1.20177E-7	2.52093E-3	2.52093E-3	6.3126E-3	2.98768E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.80408E-1	-8.96478E-1	-9.04717E0	-9.04179E0	4.55379E-3	9.56059E-2	2.73443E1	-3.26719E1	-3.26156E1	2.68298E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.96128E-1