[Scan]
initial_time=2016-01-18T17:57:39
final_time=2016-01-18T17:57:58
ip_count=19
run=1024
dataset=3
scan=172
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.80289E-1
ql1_imon=1.33655E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.95217E-9
ql3_vset=
ql3_vmon=-9.0471E0
ql3_imon=1.79195E-10
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=6.5279E-11
mult1=-8.80537E-9
mult2=-2.60303E-9
rf_tmon=-5.02037E-3
rf_agc=3.36046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.72979E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.19994E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54259E1
cs_ef1b_imon=2.83782E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04566E2
lens23_imon=1.01986E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.53477E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35191E0
lens1_imon=2.57511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.48392E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.94486E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.34761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.24733E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.19192E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91979E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.97693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.35507E-8
tplens_vset=1.4E-1
tplens_vmon=1.64202E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26223E1
iondef3_imon=1.47542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.56815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03068E2
lens6_imon=2.98264E-4
ql6_vset=1.0E-1
ql6_vmon=9.58443E-2
ql6_imon=4.12198E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29398E0
ionrepsh_imon=1.78937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49691E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02073E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73322E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.38436E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.92738E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.84529E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.96398E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36422E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.40222E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07371E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65814E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=9.95639E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66917E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22575E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20907E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0254E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.80194E-1	-8.96668E-1	-9.04698E0	-9.04186E0	4.31538E-3	9.56297E-2	2.73222E1	-3.26785E1	-3.26313E1	2.68244E1	1.20209E-7	2.52815E-3	2.52815E-3	6.31817E-3	3.00453E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.80289E-1	-8.96382E-1	-9.04706E0	-9.04207E0	4.26769E-3	9.55343E-2	2.73375E1	-3.26658E1	-3.26505E1	2.68194E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.80265E-1	-8.96382E-1	-9.04694E0	-9.04191E0	4.36306E-3	9.57251E-2	2.73193E1	-3.26567E1	-3.25971E1	2.68482E1	1.22066E-7	2.52362E-3	2.52362E-3	6.29067E-3	3.02277E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.80337E-1	-8.9674E-1	-9.04698E0	-9.04219E0	4.36306E-3	9.5582E-2	2.73135E1	-3.26543E1	-3.26098E1	2.6819E1	1.21559E-7	2.52659E-3	2.52659E-3	6.33919E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.80361E-1	-8.96502E-1	-9.04713E0	-9.04214E0	4.02927E-3	9.53436E-2	2.73299E1	-3.26178E1	-3.26006E1	2.68214E1	1.2067E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.80122E-1	-8.96358E-1	-9.04696E0	-9.04183E0	4.05312E-3	9.52721E-2	2.73189E1	-3.26464E1	-3.2626E1	2.68262E1	1.20466E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.79884E-1	-8.96311E-1	-9.04706E0	-9.04191E0	4.14848E-3	9.57012E-2	2.73039E1	-3.26456E1	-3.26113E1	2.68436E1	1.20959E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.80122E-1	-8.96287E-1	-9.0471E0	-9.04205E0	4.00543E-3	9.56297E-2	2.73291E1	-3.26663E1	-3.26416E1	2.6825E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-8.80122E-1	-8.96764E-1	-9.04694E0	-9.04224E0	4.05312E-3	9.59396E-2	2.73517E1	-3.26455E1	-3.26012E1	2.6855E1	1.20383E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.80051E-1	-8.96263E-1	-9.04696E0	-9.0421E0	4.05312E-3	9.56297E-2	2.73345E1	-3.26768E1	-3.26089E1	2.68508E1	1.20435E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.80337E-1	-8.96049E-1	-9.04734E0	-9.04191E0	4.00543E-3	9.57966E-2	2.73424E1	-3.2653E1	-3.26236E1	2.6834E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.80146E-1	-8.96025E-1	-9.04725E0	-9.04198E0	4.22001E-3	9.56297E-2	2.73016E1	-3.26632E1	-3.26337E1	2.68268E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.80075E-1	-8.9643E-1	-9.0471E0	-9.04179E0	4.00543E-3	9.56059E-2	2.73285E1	-3.26458E1	-3.26104E1	2.68334E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.80003E-1	-8.96573E-1	-9.0472E0	-9.04179E0	4.05312E-3	9.52721E-2	2.73117E1	-3.26458E1	-3.26416E1	2.68364E1	1.21328E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.79908E-1	-8.96382E-1	-9.04701E0	-9.04193E0	4.14848E-3	9.56535E-2	2.73429E1	-3.26446E1	-3.26056E1	2.6831E1	1.22014E-7	2.52867E-3	2.52867E-3	6.29645E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80027E-1	-8.96311E-1	-9.04698E0	-9.04219E0	4.41074E-3	9.58204E-2	2.73255E1	-3.26512E1	-3.26152E1	2.68208E1	1.21591E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.99E-1
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.7986E-1	-8.96478E-1	-9.04703E0	-9.04202E0	4.17233E-3	9.58204E-2	2.73333E1	-3.26476E1	-3.26188E1	2.68343E1	1.2175E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.80075E-1	-8.9612E-1	-9.04698E0	-9.04217E0	3.93391E-3	9.56535E-2	2.73605E1	-3.26868E1	-3.26083E1	2.68322E1	1.2054E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.80051E-1	-8.96502E-1	-9.04715E0	-9.04198E0	3.79086E-3	9.56535E-2	2.72937E1	-3.26813E1	-3.26518E1	2.68274E1	1.20363E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.80289E-1	-8.96168E-1	-9.0471E0	-9.04217E0	4.14848E-3	9.58443E-2	2.73322E1	-3.26526E1	-3.26223E1	2.68448E1	1.20907E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00302E-1