[Scan]
initial_time=2016-01-18T17:58:05
final_time=2016-01-18T17:58:25
ip_count=19
run=1024
dataset=3
scan=173
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.80003E-1
ql1_imon=1.33719E-8
ql2_vset=
ql2_vmon=-8.96788E-1
ql2_imon=1.92522E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.85645E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=5.03063E-11
mult1=-9.78855E-9
mult2=-2.76253E-9
rf_tmon=-3.97769E-3
rf_agc=3.40426E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.72762E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67815E0
bslens_imon=2.23133E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19352E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54149E1
cs_ef1b_imon=2.84231E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01955E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04411E1
cs_ea1_imon=2.54004E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64953E1
os_ef1alow_imon=2.99128E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84521E1
cs_ef1a_imon=2.93112E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.34254E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11336E1
os_restr1_imon=4.24813E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14879E1
os_ea1_imon=2.36556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63562E1
os_ef1bup_imon=3.07903E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.1752E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0188E1
cs_anode1_imon=2.98314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.34942E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.55588E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.98025E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=4.13992E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=1.80138E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.14998E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74761E1
cs_ef2b_imon=3.13458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50865E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.15829E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05367E0
os_ef2alow_imon=-2.56656E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03518E-1
os_ef2bup_imon=-5.30177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11324E1
os_restr2_imon=3.42191E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27297E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01963E1
cs_anode2_imon=2.23334E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.12509E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09432E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.33936E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.91369E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1496E0
cs_ionaccel_imon=-1.78102E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47371E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56523E1
einzel_imon=7.65953E-6
window_vset=0.0E0
window_vmon=2.34915E-1
window_imon=-8.78722E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.39169E-4
mask2_vset=0.0E0
mask2_vmon=-1.86562E1
mask2_imon=-7.08877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.32513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.40975E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65844E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=9.94919E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67242E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.57325E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03852E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63344E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36071E-1
cs_fil2_imon=-2.47299E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.53397E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19872E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77825E-1
res40_imon=-2.54887E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-8.80265E-1	-8.96263E-1	-9.04708E0	-9.04191E0	4.26769E-3	9.56297E-2	2.73576E1	-3.26331E1	-3.26413E1	2.6817E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.80241E-1	-8.96835E-1	-9.04696E0	-9.04191E0	4.52995E-3	9.56297E-2	2.73484E1	-3.26669E1	-3.26098E1	2.6828E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.98342E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.80289E-1	-8.96335E-1	-9.04694E0	-9.04162E0	4.22001E-3	9.5439E-2	2.73299E1	-3.26938E1	-3.26248E1	2.68388E1	1.1966E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98554E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.80075E-1	-8.96168E-1	-9.0471E0	-9.04188E0	4.31538E-3	9.56059E-2	2.73484E1	-3.26116E1	-3.26458E1	2.6829E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80122E-1	-8.96263E-1	-9.04722E0	-9.04188E0	4.62532E-3	9.5582E-2	2.73309E1	-3.26314E1	-3.2611E1	2.68256E1	1.2026E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.80384E-1	-8.96358E-1	-9.04741E0	-9.04186E0	4.79221E-3	9.56059E-2	2.73045E1	-3.26675E1	-3.26272E1	2.682E1	1.20017E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.80265E-1	-8.96454E-1	-9.04741E0	-9.04183E0	4.86374E-3	9.58204E-2	2.72931E1	-3.26873E1	-3.26314E1	2.6843E1	1.19978E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.80146E-1	-8.96502E-1	-9.04713E0	-9.04188E0	4.74453E-3	9.56059E-2	2.73165E1	-3.26585E1	-3.2626E1	2.68545E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.80146E-1	-8.96597E-1	-9.04729E0	-9.04181E0	4.74453E-3	9.56059E-2	2.73393E1	-3.26506E1	-3.26056E1	2.68556E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.80122E-1	-8.96597E-1	-9.04696E0	-9.04124E0	4.62532E-3	9.58443E-2	2.73252E1	-3.26555E1	-3.26349E1	2.68112E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.80075E-1	-8.96573E-1	-9.04677E0	-9.0414E0	4.36306E-3	9.54866E-2	2.73177E1	-3.26296E1	-3.262E1	2.68406E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.79812E-1	-8.96454E-1	-9.04701E0	-9.04193E0	4.31538E-3	9.57727E-2	2.73117E1	-3.26512E1	-3.26362E1	2.6837E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.79669E-1	-8.96335E-1	-9.04698E0	-9.04171E0	4.55379E-3	9.53197E-2	2.74002E1	-3.27373E1	-3.26159E1	2.68569E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.79693E-1	-8.9643E-1	-9.04732E0	-9.04155E0	4.41074E-3	9.5582E-2	2.73316E1	-3.26677E1	-3.26273E1	2.6827E1	1.19919E-7	2.51956E-3	2.51956E-3	6.31251E-3	3.00149E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.7955E-1	-8.9643E-1	-9.04708E0	-9.04164E0	4.02927E-3	9.54866E-2	2.73279E1	-3.26518E1	-3.26068E1	2.6831E1	1.19851E-7	2.52739E-3	2.52739E-3	6.31925E-3	3.00479E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.79812E-1	-8.9643E-1	-9.0472E0	-9.04188E0	4.22001E-3	9.58443E-2	2.7334E1	-3.26638E1	-3.26048E1	2.68286E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.79884E-1	-8.96287E-1	-9.04694E0	-9.04195E0	4.45843E-3	9.5892E-2	2.73129E1	-3.26708E1	-3.26215E1	2.68457E1	1.20363E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.80289E-1	-8.96668E-1	-9.04698E0	-9.04202E0	4.22001E-3	9.58443E-2	2.73169E1	-3.26573E1	-3.26396E1	2.68244E1	1.20078E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00989E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.80098E-1	-8.96764E-1	-9.04708E0	-9.04191E0	4.05312E-3	9.58204E-2	2.73406E1	-3.26646E1	-3.26058E1	2.68166E1	1.20106E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.80003E-1	-8.96788E-1	-9.04684E0	-9.04188E0	4.26769E-3	9.5582E-2	2.73117E1	-3.26458E1	-3.26278E1	2.6801E1	1.19872E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1