[Scan]
initial_time=2016-01-18T17:58:32
final_time=2016-01-18T17:58:51
ip_count=19
run=1024
dataset=3
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.33939E-8
ql2_vset=
ql2_vmon=-8.96049E-1
ql2_imon=1.92614E-9
ql3_vset=
ql3_vmon=-9.0471E0
ql3_imon=1.49918E-10
ql4_vset=
ql4_vmon=-9.04131E0
ql4_imon=5.47647E-11
mult1=-5.14088E-9
mult2=-2.66671E-9
rf_tmon=-9.69154E-3
rf_agc=2.49701E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.70032E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.28842E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.83386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.53689E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32124E0
lens1_imon=2.49017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.48285E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.93297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.34419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.35673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=2.98991E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=3.35066E-8
tplens_vset=1.4E-1
tplens_vmon=1.68745E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24596E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27203E1
iondef2_imon=1.56638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03074E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=4.1062E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=1.77096E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49809E0
os_ea2_imon=-9.32441E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.51709E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.27911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74481E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.32362E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.91711E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56693E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.82214E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82751E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.64355E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.32335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=6.69498E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=5.81721E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.45183E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07215E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65517E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=9.97615E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6732E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4332E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00776E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.01629E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.80098E-1	-8.9643E-1	-9.04703E0	-9.04231E0	4.24385E-3	9.58681E-2	2.73334E1	-3.26679E1	-3.26119E1	2.68268E1	1.22067E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00563E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.80075E-1	-8.96454E-1	-9.04741E0	-9.04229E0	4.31538E-3	9.57012E-2	2.73437E1	-3.26836E1	-3.26346E1	2.6834E1	1.2212E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.79788E-1	-8.96454E-1	-9.04684E0	-9.04183E0	4.43459E-3	9.59635E-2	2.73163E1	-3.26626E1	-3.2603E1	2.68186E1	1.22174E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.79693E-1	-8.96454E-1	-9.04717E0	-9.04212E0	4.43459E-3	9.57489E-2	2.73428E1	-3.26809E1	-3.2613E1	2.68334E1	1.22172E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.79979E-1	-8.96168E-1	-9.04696E0	-9.04217E0	4.22001E-3	9.58681E-2	2.73202E1	-3.266E1	-3.26276E1	2.68266E1	1.22174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.80051E-1	-8.96335E-1	-9.04696E0	-9.04191E0	4.673E-3	9.56059E-2	2.73087E1	-3.26512E1	-3.2626E1	2.684E1	1.21262E-7	2.51684E-3	2.51684E-3	6.32755E-3	3.0017E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.80051E-1	-8.96478E-1	-9.04717E0	-9.04176E0	4.60148E-3	9.57251E-2	2.73213E1	-3.26335E1	-3.26048E1	2.68313E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.79979E-1	-8.96382E-1	-9.04727E0	-9.04212E0	4.26769E-3	9.59158E-2	2.73476E1	-3.26449E1	-3.26319E1	2.68343E1	1.201E-7	2.52066E-3	2.52066E-3	6.29603E-3	2.9863E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.80027E-1	-8.96478E-1	-9.04722E0	-9.04193E0	4.26769E-3	9.59396E-2	2.73051E1	-3.26413E1	-3.25959E1	2.68545E1	1.20092E-7	2.51498E-3	2.51498E-3	6.33388E-3	2.97843E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.79955E-1	-8.96478E-1	-9.04694E0	-9.04202E0	3.93391E-3	9.57727E-2	2.72973E1	-3.26344E1	-3.2629E1	2.68557E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02659E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.79955E-1	-8.96525E-1	-9.04696E0	-9.04214E0	4.19617E-3	9.57489E-2	2.73193E1	-3.26862E1	-3.26248E1	2.68352E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.80027E-1	-8.96382E-1	-9.04717E0	-9.04219E0	4.31538E-3	9.57251E-2	2.73279E1	-3.26669E1	-3.26038E1	2.68424E1	1.20487E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.80146E-1	-8.96525E-1	-9.04703E0	-9.04226E0	4.31538E-3	9.54866E-2	2.73273E1	-3.26777E1	-3.26669E1	2.684E1	1.20226E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.79884E-1	-8.96502E-1	-9.04682E0	-9.04224E0	4.05312E-3	9.56297E-2	2.7318E1	-3.26609E1	-3.26395E1	2.67782E1	1.20907E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.79931E-1	-8.9643E-1	-9.04684E0	-9.04217E0	4.19617E-3	9.57966E-2	2.73399E1	-3.27098E1	-3.26307E1	2.68442E1	1.21961E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02396E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.80003E-1	-8.96573E-1	-9.04689E0	-9.04198E0	4.41074E-3	9.57012E-2	2.73204E1	-3.26443E1	-3.26089E1	2.68406E1	1.2212E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.02253E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.79741E-1	-8.96406E-1	-9.04703E0	-9.04183E0	4.48227E-3	9.53913E-2	2.73428E1	-3.26671E1	-3.2648E1	2.68064E1	1.22173E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.03545E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.80003E-1	-8.96263E-1	-9.04694E0	-9.04202E0	4.60148E-3	9.57251E-2	2.73302E1	-3.2656E1	-3.26383E1	2.68208E1	1.2212E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.02253E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.79979E-1	-8.96144E-1	-9.04708E0	-9.04198E0	4.1008E-3	9.53913E-2	2.73497E1	-3.26666E1	-3.26393E1	2.68308E1	1.2212E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.79741E-1	-8.96049E-1	-9.0471E0	-9.04131E0	4.07696E-3	9.5439E-2	2.74481E1	-3.27203E1	-3.24596E1	2.68412E1	1.2212E-7	2.51287E-3	2.51287E-3	6.29157E-3	3.00852E-1