[Scan]
initial_time=2016-01-18T17:58:59
final_time=2016-01-18T17:59:18
ip_count=19
run=1024
dataset=3
scan=175
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.79931E-1
ql1_imon=1.33896E-8
ql2_vset=
ql2_vmon=-8.96859E-1
ql2_imon=1.94387E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=1.66333E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=6.07252E-11
mult1=-9.0856E-9
mult2=-2.77225E-9
rf_tmon=-5.34714E-3
rf_agc=3.28726E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.71753E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.5291E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19465E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04736E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.84431E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02397E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.51849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.90074E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03301E1
cs_ea2_imon=1.5048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=2.93116E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.35037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.32665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.21351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.96901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20368E0
olens4_imon=3.34317E-8
tplens_vset=1.4E-1
tplens_vmon=1.69157E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.257E1
iondef3_imon=1.51506E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.56037E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03099E2
lens6_imon=2.98027E-4
ql6_vset=1.0E-1
ql6_vmon=9.57012E-2
ql6_imon=4.11592E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2403E0
ionrepsh_imon=1.77238E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34135E1
lens5b_imon=2.14225E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52404E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06052E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.43067E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73623E1
iondef1_imon=1.13175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.30556E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81164E-1
olens1_imon=7.91627E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56651E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82732E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=8.65228E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=7.11617E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1959E0
defgridb_imon=5.6544E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.44721E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.96191E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66863E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94828E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38845E-1
cs_fil2_imon=-2.50379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45787E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.8017E-1	-8.96311E-1	-9.04691E0	-9.04164E0	3.91006E-3	9.57727E-2	2.73442E1	-3.26729E1	-3.25803E1	2.68196E1	1.22067E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9926E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.80289E-1	-8.96311E-1	-9.04675E0	-9.042E0	3.8147E-3	9.57966E-2	2.73651E1	-3.26468E1	-3.26376E1	2.68256E1	1.2117E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.80122E-1	-8.96358E-1	-9.0472E0	-9.04174E0	3.83854E-3	9.5439E-2	2.73617E1	-3.26726E1	-3.26006E1	2.68322E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.9829E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.80122E-1	-8.96382E-1	-9.04701E0	-9.04171E0	3.98159E-3	9.59873E-2	2.73216E1	-3.26496E1	-3.26402E1	2.68383E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.79908E-1	-8.96406E-1	-9.04701E0	-9.042E0	4.07696E-3	9.57489E-2	2.73141E1	-3.26693E1	-3.26116E1	2.6843E1	1.19953E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.8017E-1	-8.96049E-1	-9.04689E0	-9.04181E0	3.95775E-3	9.57251E-2	2.72909E1	-3.26472E1	-3.26266E1	2.68593E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.80003E-1	-8.96049E-1	-9.04701E0	-9.04171E0	4.07696E-3	9.58681E-2	2.73375E1	-3.26193E1	-3.26327E1	2.68304E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.79669E-1	-8.96478E-1	-9.04701E0	-9.04193E0	3.76701E-3	9.56774E-2	2.73291E1	-3.26326E1	-3.26278E1	2.68262E1	1.21635E-7	2.53033E-3	2.53033E-3	6.32978E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.79717E-1	-8.96478E-1	-9.04686E0	-9.0421E0	4.12464E-3	9.57966E-2	2.73051E1	-3.26613E1	-3.25503E1	2.68059E1	1.21697E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.79741E-1	-8.96287E-1	-9.04694E0	-9.04195E0	4.05312E-3	9.54151E-2	2.7345E1	-3.26223E1	-3.25992E1	2.6835E1	1.2212E-7	2.51472E-3	2.51472E-3	6.30221E-3	3.00741E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.79812E-1	-8.96287E-1	-9.0471E0	-9.04171E0	4.3869E-3	9.57489E-2	2.73345E1	-3.26536E1	-3.26432E1	2.6825E1	1.2212E-7	2.51952E-3	2.51952E-3	6.30171E-3	2.99981E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.80003E-1	-8.96335E-1	-9.04682E0	-9.04186E0	4.45843E-3	9.57489E-2	2.73246E1	-3.26726E1	-3.26284E1	2.68012E1	1.21152E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.01209E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79931E-1	-8.96072E-1	-9.04706E0	-9.04169E0	4.64916E-3	9.57966E-2	2.73399E1	-3.26596E1	-3.26474E1	2.68046E1	1.22018E-7	2.52448E-3	2.52448E-3	6.29157E-3	3.01356E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.8017E-1	-8.9612E-1	-9.04703E0	-9.04207E0	4.74453E-3	9.58204E-2	2.73051E1	-3.26603E1	-3.25967E1	2.68157E1	1.2212E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.79955E-1	-8.96478E-1	-9.04655E0	-9.04214E0	4.45843E-3	9.57966E-2	2.73139E1	-3.26461E1	-3.25883E1	2.68337E1	1.2212E-7	2.51725E-3	2.51725E-3	6.29603E-3	3.01065E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80051E-1	-8.9643E-1	-9.04701E0	-9.04195E0	4.52995E-3	9.58681E-2	2.73334E1	-3.26531E1	-3.25989E1	2.68268E1	1.22068E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99686E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.80051E-1	-8.96358E-1	-9.04708E0	-9.04202E0	4.52995E-3	9.5892E-2	2.73327E1	-3.26524E1	-3.26374E1	2.68389E1	1.22173E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.80122E-1	-8.96549E-1	-9.04691E0	-9.04229E0	4.45843E-3	9.57727E-2	2.73117E1	-3.26789E1	-3.26014E1	2.68438E1	1.2212E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.8017E-1	-8.96764E-1	-9.04691E0	-9.04222E0	4.12464E-3	9.56535E-2	2.73381E1	-3.26398E1	-3.26404E1	2.68227E1	1.2212E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01475E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.79931E-1	-8.96859E-1	-9.04689E0	-9.0421E0	4.17233E-3	9.57012E-2	2.73623E1	-3.26708E1	-3.257E1	2.68292E1	1.2212E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1