[Scan]
initial_time=2016-01-18T17:59:52
final_time=2016-01-18T18:00:12
ip_count=19
run=1024
dataset=3
scan=177
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.79955E-1
ql1_imon=1.33869E-8
ql2_vset=
ql2_vmon=-8.96835E-1
ql2_imon=1.908E-9
ql3_vset=
ql3_vmon=-9.04717E0
ql3_imon=2.10965E-10
ql4_vset=
ql4_vmon=-9.04195E0
ql4_imon=4.30346E-11
mult1=-9.70427E-9
mult2=-2.72389E-9
rf_tmon=-4.70941E-3
rf_agc=3.23933E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.74253E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.23133E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04708E2
lens23_imon=1.0198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.51156E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35634E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.95639E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.48018E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34239E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14867E1
os_ea1_imon=2.34501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.05766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.19323E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91997E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02206E1
cs_anode1_imon=2.98703E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.3609E-8
tplens_vset=1.4E-1
tplens_vmon=1.67027E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.55228E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.5892E-2
ql6_imon=4.10944E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=1.79237E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-8.61719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.41734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.22767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68329E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.36268E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.90439E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.85546E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8273E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.13407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.01293E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.41135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=9.95158E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62113E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66769E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.43675E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80122E-1	-8.96263E-1	-9.04717E0	-9.04214E0	4.19617E-3	9.56535E-2	2.73155E1	-3.26747E1	-3.26231E1	2.68286E1	1.2138E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.80075E-1	-8.96382E-1	-9.04694E0	-9.04222E0	4.33922E-3	9.55343E-2	2.72947E1	-3.26634E1	-3.26125E1	2.68286E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.8017E-1	-8.96454E-1	-9.04686E0	-9.04183E0	4.1008E-3	9.57012E-2	2.73526E1	-3.26573E1	-3.26214E1	2.68279E1	1.22067E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.79979E-1	-8.96502E-1	-9.04701E0	-9.04186E0	3.91006E-3	9.54866E-2	2.73556E1	-3.26813E1	-3.2623E1	2.68364E1	1.2212E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.80098E-1	-8.96549E-1	-9.04689E0	-9.04214E0	4.05312E-3	9.55343E-2	2.73347E1	-3.26607E1	-3.25964E1	2.68434E1	1.2212E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.03804E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.80003E-1	-8.96692E-1	-9.04684E0	-9.04217E0	4.17233E-3	9.55343E-2	2.72908E1	-3.26669E1	-3.26195E1	2.68471E1	1.2212E-7	2.5216E-3	2.5216E-3	6.3074E-3	3.02831E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.80075E-1	-8.9674E-1	-9.04703E0	-9.04193E0	4.26769E-3	9.56059E-2	2.72951E1	-3.26685E1	-3.26278E1	2.68442E1	1.2212E-7	2.52621E-3	2.52621E-3	6.31332E-3	3.02459E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.80265E-1	-8.9674E-1	-9.04734E0	-9.04207E0	4.33922E-3	9.58204E-2	2.73514E1	-3.26512E1	-3.26092E1	2.68458E1	1.22067E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.80146E-1	-8.96454E-1	-9.04729E0	-9.04236E0	4.19617E-3	9.57489E-2	2.73452E1	-3.26337E1	-3.26296E1	2.6831E1	1.2212E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.04063E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.79884E-1	-8.9643E-1	-9.04706E0	-9.04188E0	4.19617E-3	9.57489E-2	2.73297E1	-3.26825E1	-3.25918E1	2.68556E1	1.2212E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.79836E-1	-8.96621E-1	-9.04708E0	-9.04229E0	4.12464E-3	9.55582E-2	2.73315E1	-3.26518E1	-3.26194E1	2.68166E1	1.2212E-7	2.52599E-3	2.52599E-3	6.33977E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.80051E-1	-8.96549E-1	-9.04727E0	-9.04241E0	3.88622E-3	9.56059E-2	2.73482E1	-3.26691E1	-3.26366E1	2.68436E1	1.2212E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9952E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.80075E-1	-8.96621E-1	-9.04729E0	-9.04202E0	4.07696E-3	9.57012E-2	2.73375E1	-3.26759E1	-3.2611E1	2.68262E1	1.2212E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.99E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.80218E-1	-8.96621E-1	-9.04717E0	-9.04155E0	4.05312E-3	9.58204E-2	2.73105E1	-3.26639E1	-3.26068E1	2.6854E1	1.2212E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03449E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.80241E-1	-8.96811E-1	-9.04701E0	-9.04145E0	4.07696E-3	9.57727E-2	2.73306E1	-3.26766E1	-3.26325E1	2.68327E1	1.2212E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.80146E-1	-8.96621E-1	-9.04703E0	-9.04179E0	4.12464E-3	9.59158E-2	2.72886E1	-3.26315E1	-3.26383E1	2.6816E1	1.2212E-7	2.52256E-3	2.52256E-3	6.32743E-3	2.99703E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.80194E-1	-8.9643E-1	-9.04727E0	-9.04179E0	3.95775E-3	9.58204E-2	2.73263E1	-3.26891E1	-3.26024E1	2.68388E1	1.22067E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.79931E-1	-8.96549E-1	-9.04686E0	-9.04205E0	4.02927E-3	9.60827E-2	2.73579E1	-3.26552E1	-3.26018E1	2.6835E1	1.21808E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.79884E-1	-8.96835E-1	-9.04679E0	-9.04241E0	3.86238E-3	9.59158E-2	2.73381E1	-3.26708E1	-3.26378E1	2.68366E1	1.21923E-7	2.52262E-3	2.52262E-3	6.32273E-3	3.03076E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.79955E-1	-8.96835E-1	-9.04717E0	-9.04195E0	3.95775E-3	9.5892E-2	2.73225E1	-3.26673E1	-3.26183E1	2.68329E1	1.2212E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.02253E-1