[Scan]
initial_time=2016-01-18T18:00:45
final_time=2016-01-18T18:01:05
ip_count=19
run=1024
dataset=3
scan=179
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.80337E-1
ql1_imon=1.33893E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.95563E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=1.34444E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=6.02603E-11
mult1=-1.021E-8
mult2=-2.72061E-9
rf_tmon=-4.24205E-3
rf_agc=3.40005E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.72005E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=1.98262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.83795E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04351E1
cs_ea1_imon=2.51813E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35899E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.4687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84545E1
cs_ef1a_imon=2.94012E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.34231E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11593E1
os_restr1_imon=4.26176E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14881E1
os_ea1_imon=2.33373E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.06836E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20137E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.97835E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.35334E-8
tplens_vset=1.4E-1
tplens_vmon=1.67919E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.55966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0309E2
lens6_imon=2.98133E-4
ql6_vset=1.0E-1
ql6_vmon=9.57489E-2
ql6_imon=4.10807E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=1.77556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5264E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.16601E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11332E1
os_restr2_imon=3.42562E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01937E1
cs_anode2_imon=2.23777E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.11334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.34623E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.88096E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-8.40431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82736E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.97106E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.4238E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0646E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65423E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.94694E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67069E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.73869E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8081E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96346E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.45488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.06067E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.21964E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01488E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.80051E-1	-8.96597E-1	-9.04725E0	-9.04171E0	4.02927E-3	9.57489E-2	2.73117E1	-3.26561E1	-3.26194E1	2.6825E1	1.2212E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00097E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.79908E-1	-8.96287E-1	-9.04734E0	-9.04186E0	4.22001E-3	9.57966E-2	2.7329E1	-3.26548E1	-3.26585E1	2.68322E1	1.2212E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.80146E-1	-8.96502E-1	-9.04729E0	-9.04188E0	4.19617E-3	9.56774E-2	2.73346E1	-3.26449E1	-3.26425E1	2.68569E1	1.2212E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01209E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.79908E-1	-8.96263E-1	-9.04727E0	-9.04191E0	4.3869E-3	9.56535E-2	2.73269E1	-3.26478E1	-3.2629E1	2.68401E1	1.2212E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.79836E-1	-8.96335E-1	-9.04715E0	-9.04222E0	4.24385E-3	9.56774E-2	2.73327E1	-3.26603E1	-3.26176E1	2.68376E1	1.22173E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.80098E-1	-8.96287E-1	-9.04758E0	-9.04224E0	4.36306E-3	9.60112E-2	2.73165E1	-3.26771E1	-3.2596E1	2.68358E1	1.2212E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.02545E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.80146E-1	-8.96215E-1	-9.04739E0	-9.04217E0	4.07696E-3	9.60588E-2	2.73003E1	-3.26651E1	-3.2593E1	2.6822E1	1.22067E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.79979E-1	-8.96406E-1	-9.04725E0	-9.04176E0	4.12464E-3	9.57251E-2	2.73434E1	-3.26467E1	-3.26172E1	2.67848E1	1.22173E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79955E-1	-8.96573E-1	-9.04713E0	-9.04233E0	4.26769E-3	9.56774E-2	2.73328E1	-3.26762E1	-3.25959E1	2.68308E1	1.2212E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.80146E-1	-8.96502E-1	-9.0472E0	-9.04181E0	3.91006E-3	9.57251E-2	2.73261E1	-3.26579E1	-3.26374E1	2.6843E1	1.22173E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.80146E-1	-8.96406E-1	-9.04715E0	-9.04164E0	4.24385E-3	9.57251E-2	2.73129E1	-3.26573E1	-3.26494E1	2.68538E1	1.2212E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.80051E-1	-8.96287E-1	-9.04698E0	-9.04198E0	4.12464E-3	9.56535E-2	2.73087E1	-3.26807E1	-3.25948E1	2.68322E1	1.2212E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.80146E-1	-8.96287E-1	-9.0471E0	-9.04191E0	4.41074E-3	9.55343E-2	2.73363E1	-3.26723E1	-3.26302E1	2.68334E1	1.2212E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.7E1	3.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.79812E-1	-8.96549E-1	-9.04694E0	-9.04191E0	4.43459E-3	9.56059E-2	2.73375E1	-3.26687E1	-3.26212E1	2.6831E1	1.2212E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00041E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.8017E-1	-8.96382E-1	-9.04698E0	-9.04202E0	4.24385E-3	9.58204E-2	2.73321E1	-3.26693E1	-3.26188E1	2.6837E1	1.2212E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.80456E-1	-8.96382E-1	-9.04691E0	-9.04212E0	4.57764E-3	9.58204E-2	2.73255E1	-3.26837E1	-3.26128E1	2.68394E1	1.2212E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02922E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.80122E-1	-8.96454E-1	-9.04696E0	-9.04226E0	4.52995E-3	9.58204E-2	2.73336E1	-3.26562E1	-3.26036E1	2.68876E1	1.22067E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.79955E-1	-8.96335E-1	-9.04696E0	-9.0426E0	4.26769E-3	9.56535E-2	2.73138E1	-3.26479E1	-3.26447E1	2.68307E1	1.2212E-7	2.51575E-3	2.51575E-3	6.30221E-3	2.99014E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.80194E-1	-8.96287E-1	-9.04679E0	-9.04217E0	4.52995E-3	9.56297E-2	2.73532E1	-3.26446E1	-3.26404E1	2.6822E1	1.21516E-7	2.52635E-3	2.52635E-3	6.33021E-3	2.9863E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.80337E-1	-8.96239E-1	-9.04689E0	-9.04202E0	4.22001E-3	9.57489E-2	2.72991E1	-3.26663E1	-3.26344E1	2.6822E1	1.21964E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1