[Scan]
initial_time=2016-01-18T18:02:05
final_time=2016-01-18T18:02:25
ip_count=19
run=1024
dataset=3
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08721E-4
ql1_vset=
ql1_vmon=-8.80408E-1
ql1_imon=1.33958E-8
ql2_vset=
ql2_vmon=-8.96049E-1
ql2_imon=1.90029E-9
ql3_vset=
ql3_vmon=-9.04734E0
ql3_imon=1.69718E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=4.29273E-11
mult1=-9.68492E-9
mult2=-2.51023E-9
rf_tmon=-5.76386E-3
rf_agc=3.20225E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.71235E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61927E0
bslens_imon=1.87084E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19034E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12622E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5414E1
cs_ef1b_imon=2.84638E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.01573E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03738E1
cs_ea1_imon=2.51877E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44165E0
lens1_imon=3.15059E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64697E1
os_ef1alow_imon=2.97821E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.50253E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84575E1
cs_ef1a_imon=2.93377E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.34395E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11215E1
os_restr1_imon=4.25678E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14362E1
os_ea1_imon=2.29202E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63644E1
os_ef1bup_imon=3.06156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=1.22639E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92023E2
cs_nozzle_imon=1.93712E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.98261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.34208E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-1.02034E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26249E1
iondef3_imon=1.52416E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.59013E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.97668E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.09977E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21845E0
ionrepsh_imon=1.7711E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34415E1
lens5b_imon=2.21163E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74666E1
cs_ef2b_imon=3.12104E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53509E0
os_ea2_imon=-9.37423E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06032E2
lens4b_imon=2.00201E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71313E1
cs_ef2a_imon=3.16254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07873E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89876E-1
os_ef2bup_imon=-5.3917E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11307E1
os_restr2_imon=3.43279E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0187E1
cs_anode2_imon=2.24345E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.11644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.08604E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.30697E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.88637E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1228E0
cs_ionaccel_imon=-1.7638E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56356E1
einzel_imon=7.82737E-6
window_vset=0.0E0
window_vmon=2.64591E-1
window_imon=-9.63311E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82733E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.40178E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.95382E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.58611E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.8136E0
defgridb_imon=6.31214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.43075E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07574E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65722E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.96502E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63437E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67345E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.92131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91957E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82936E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37105E-1
cs_fil2_imon=-2.12571E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.87502E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73719E-1
res40_imon=-2.44311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.79931E-1	-8.96382E-1	-9.04741E0	-9.04167E0	4.14848E-3	9.59396E-2	2.72249E1	-3.2613E1	-3.27033E1	2.68012E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.79884E-1	-8.96168E-1	-9.04744E0	-9.04169E0	3.79086E-3	9.58204E-2	2.73057E1	-3.26138E1	-3.26291E1	2.68375E1	1.2026E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.79955E-1	-8.96287E-1	-9.04706E0	-9.04179E0	3.91006E-3	9.57012E-2	2.73381E1	-3.26805E1	-3.26602E1	2.68337E1	1.19978E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.98554E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.80003E-1	-8.9643E-1	-9.0472E0	-9.04179E0	4.26769E-3	9.53436E-2	2.73207E1	-3.26518E1	-3.26176E1	2.68348E1	1.19891E-7	2.50972E-3	2.50972E-3	6.2863E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.80051E-1	-8.96597E-1	-9.04722E0	-9.04186E0	4.12464E-3	9.55343E-2	2.73375E1	-3.26452E1	-3.26062E1	2.68641E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.80146E-1	-8.96549E-1	-9.04722E0	-9.04236E0	4.02927E-3	9.56774E-2	2.73411E1	-3.26621E1	-3.26296E1	2.68544E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.80361E-1	-8.96835E-1	-9.04689E0	-9.04212E0	4.05312E-3	9.5439E-2	2.73039E1	-3.26556E1	-3.26359E1	2.68302E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.80337E-1	-8.96645E-1	-9.04706E0	-9.04202E0	4.07696E-3	9.55105E-2	2.73204E1	-3.26438E1	-3.26476E1	2.68699E1	1.19941E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.02621E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80075E-1	-8.96692E-1	-9.04715E0	-9.04186E0	4.3869E-3	9.5582E-2	2.72939E1	-3.26661E1	-3.259E1	2.68298E1	1.2006E-7	2.52106E-3	2.52106E-3	6.31321E-3	3.00639E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.80051E-1	-8.96573E-1	-9.04715E0	-9.042E0	4.52995E-3	9.57251E-2	2.73112E1	-3.26536E1	-3.26076E1	2.6834E1	1.20055E-7	2.50882E-3	2.50882E-3	6.31817E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.8017E-1	-8.96358E-1	-9.04706E0	-9.04171E0	4.29153E-3	9.59635E-2	2.73261E1	-3.26554E1	-3.26326E1	2.68532E1	1.2083E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.80384E-1	-8.96382E-1	-9.04727E0	-9.04231E0	3.91006E-3	9.56774E-2	2.73403E1	-3.26605E1	-3.26229E1	2.68506E1	1.20959E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.80289E-1	-8.96287E-1	-9.04713E0	-9.042E0	4.02927E-3	9.56059E-2	2.73448E1	-3.27005E1	-3.26561E1	2.68128E1	1.20058E-7	2.51762E-3	2.51762E-3	6.31675E-3	2.99753E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.80384E-1	-8.9643E-1	-9.04713E0	-9.04217E0	4.22001E-3	9.56059E-2	2.7356E1	-3.2657E1	-3.2598E1	2.6851E1	1.19601E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.80194E-1	-8.96358E-1	-9.04708E0	-9.04219E0	3.74317E-3	9.56297E-2	2.73014E1	-3.26744E1	-3.26432E1	2.68298E1	1.19736E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.02898E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.8048E-1	-8.96287E-1	-9.04708E0	-9.04245E0	3.6478E-3	9.56059E-2	2.73027E1	-3.26488E1	-3.25978E1	2.68412E1	1.20297E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.03081E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.80504E-1	-8.96263E-1	-9.04713E0	-9.04205E0	4.12464E-3	9.55343E-2	2.73482E1	-3.26585E1	-3.26496E1	2.68454E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.80575E-1	-8.96215E-1	-9.04703E0	-9.04195E0	4.26769E-3	9.57012E-2	2.73173E1	-3.26554E1	-3.26205E1	2.68418E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.80527E-1	-8.96168E-1	-9.04751E0	-9.04195E0	4.36306E-3	9.57489E-2	2.73514E1	-3.26867E1	-3.26567E1	2.68334E1	1.22067E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80408E-1	-8.96049E-1	-9.04734E0	-9.04202E0	4.12464E-3	9.54866E-2	2.73109E1	-3.2659E1	-3.26249E1	2.68418E1	1.2212E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1