[Scan]
initial_time=2016-01-18T18:02:59
final_time=2016-01-18T18:03:18
ip_count=19
run=1024
dataset=3
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33232E-8
ql2_vset=
ql2_vmon=-8.96502E-1
ql2_imon=1.94148E-9
ql3_vset=
ql3_vmon=-9.0467E0
ql3_imon=1.93751E-10
ql4_vset=
ql4_vmon=-9.0421E0
ql4_imon=4.18901E-11
mult1=-1.00467E-8
mult2=-2.65721E-9
rf_tmon=-5.61554E-3
rf_agc=3.27015E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.72065E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19478E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04592E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.83278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0456E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.51769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.48728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65053E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.51046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.95891E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.35271E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=4.25706E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.35474E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.20008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93662E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.99315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.34888E-8
tplens_vset=1.4E-1
tplens_vmon=1.68049E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26468E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26403E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03073E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=4.10199E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.80066E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.10343E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51466E0
os_ea2_imon=-8.76138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06157E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.44257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68194E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.2472E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.91419E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.44372E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82719E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.80384E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33236E1
os_fil1_imon=9.42192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65512E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.96179E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61951E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67157E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80896E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91959E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.91397E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2281E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31696E-3
inlet_lpb_pmon=3.01153E-1
chamber_ion_pmon=1.19923E-7
chamber_cvt_pmon=2.51736E-3
foreline_cvt_pmon=2.51736E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77312E-1
res40_imon=-2.68077E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.80051E-1	-8.96502E-1	-9.04717E0	-9.04167E0	4.14848E-3	9.57251E-2	2.73387E1	-3.26809E1	-3.26331E1	2.68406E1	1.22014E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.80122E-1	-8.96549E-1	-9.04698E0	-9.042E0	4.36306E-3	9.6035E-2	2.73093E1	-3.26488E1	-3.2641E1	2.68232E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.80051E-1	-8.96573E-1	-9.04715E0	-9.04205E0	4.36306E-3	9.58204E-2	2.73109E1	-3.26596E1	-3.26318E1	2.68383E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00302E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.8017E-1	-8.96454E-1	-9.04701E0	-9.04186E0	4.05312E-3	9.55105E-2	2.73104E1	-3.2662E1	-3.2606E1	2.68288E1	1.20192E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.8017E-1	-8.96454E-1	-9.04706E0	-9.04212E0	4.22001E-3	9.57251E-2	2.73634E1	-3.26681E1	-3.26422E1	2.68321E1	1.198E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.80146E-1	-8.96645E-1	-9.04725E0	-9.04188E0	4.36306E-3	9.56535E-2	2.73153E1	-3.26506E1	-3.26224E1	2.68328E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.80432E-1	-8.96692E-1	-9.04729E0	-9.04186E0	4.36306E-3	9.56297E-2	2.72953E1	-3.26603E1	-3.26376E1	2.68058E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80313E-1	-8.96502E-1	-9.04715E0	-9.04186E0	4.24385E-3	9.60112E-2	2.73322E1	-3.26514E1	-3.26154E1	2.68442E1	1.20084E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.98554E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.80122E-1	-8.96668E-1	-9.04675E0	-9.04181E0	4.43459E-3	9.56297E-2	2.73345E1	-3.26579E1	-3.2638E1	2.68442E1	1.20004E-7	2.52061E-3	2.52061E-3	6.34518E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.80384E-1	-8.96621E-1	-9.04696E0	-9.04207E0	4.3869E-3	9.59396E-2	2.72883E1	-3.26158E1	-3.26663E1	2.68274E1	1.19809E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.03185E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.80289E-1	-8.96382E-1	-9.04684E0	-9.04157E0	4.24385E-3	9.58443E-2	2.73134E1	-3.2659E1	-3.26225E1	2.68478E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.80289E-1	-8.96358E-1	-9.04677E0	-9.04179E0	4.07696E-3	9.57727E-2	2.73253E1	-3.26376E1	-3.26107E1	2.68262E1	1.20209E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.80122E-1	-8.9643E-1	-9.04727E0	-9.0421E0	4.02927E-3	9.56774E-2	2.73765E1	-3.27021E1	-3.2636E1	2.6852E1	1.19757E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80003E-1	-8.96263E-1	-9.04729E0	-9.04207E0	4.22001E-3	9.58204E-2	2.73207E1	-3.26885E1	-3.26254E1	2.68238E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.79788E-1	-8.96692E-1	-9.04739E0	-9.04198E0	4.12464E-3	9.59873E-2	2.73316E1	-3.26514E1	-3.26089E1	2.68382E1	1.19749E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.79908E-1	-8.9643E-1	-9.04679E0	-9.04174E0	4.22001E-3	9.58204E-2	2.73243E1	-3.26747E1	-3.26386E1	2.68273E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.97963E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.79908E-1	-8.96382E-1	-9.04703E0	-9.04198E0	4.12464E-3	9.57489E-2	2.73345E1	-3.26422E1	-3.26032E1	2.68406E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.7986E-1	-8.96382E-1	-9.04691E0	-9.04195E0	3.98159E-3	9.55343E-2	2.72958E1	-3.26863E1	-3.26382E1	2.68286E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.79979E-1	-8.9643E-1	-9.04684E0	-9.04224E0	3.93391E-3	9.55582E-2	2.73318E1	-3.26569E1	-3.25951E1	2.68349E1	1.20092E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.79812E-1	-8.96502E-1	-9.0467E0	-9.0421E0	4.19617E-3	9.57727E-2	2.73285E1	-3.26403E1	-3.26468E1	2.68194E1	1.19923E-7	2.51736E-3	2.51736E-3	6.31696E-3	3.01153E-1