[Scan]
initial_time=2016-01-18T18:03:52
final_time=2016-01-18T18:04:11
ip_count=19
run=1024
dataset=3
scan=186
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.79955E-1
ql1_imon=1.33664E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.89567E-9
ql3_vset=
ql3_vmon=-9.04686E0
ql3_imon=1.55687E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=2.50697E-11
mult1=-9.46345E-9
mult2=-2.68268E-9
rf_tmon=-5.5158E-3
rf_agc=3.23662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.69549E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69978E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53861E1
cs_ef1b_imon=2.83095E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.51733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34432E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64877E1
os_ef1alow_imon=2.97354E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04063E1
cs_ea2_imon=1.50253E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=2.9275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.34382E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11404E1
os_restr1_imon=4.25238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.34212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63891E1
os_ef1bup_imon=3.0671E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.19395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=2.98701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.34994E-8
tplens_vset=1.4E-1
tplens_vmon=1.66607E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03057E2
lens6_imon=2.98036E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=4.11552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.81075E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45578E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71239E1
cs_ef2a_imon=3.16404E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05019E0
os_ef2alow_imon=-2.54063E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09483E-1
os_ef2bup_imon=-5.26149E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11254E1
os_restr2_imon=3.4234E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.09252E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.29659E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.88513E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15447E0
cs_ionaccel_imon=-1.76966E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4744E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56661E1
einzel_imon=7.78889E-6
window_vset=0.0E0
window_vmon=2.50032E-1
window_imon=-9.05124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.38994E-4
mask2_vset=0.0E0
mask2_vmon=-1.86962E1
mask2_imon=-6.46886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.04177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.42501E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0688E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65473E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.96189E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62584E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67448E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.57518E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81003E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36912E-1
cs_fil2_imon=-2.30696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.68394E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22553E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31009E-3
inlet_lpb_pmon=3.01866E-1
chamber_ion_pmon=1.19825E-7
chamber_cvt_pmon=2.52008E-3
foreline_cvt_pmon=2.52008E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40671E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.79979E-1	-8.96311E-1	-9.04696E0	-9.04183E0	3.91006E-3	9.58681E-2	2.73316E1	-3.26632E1	-3.25776E1	2.68233E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.79955E-1	-8.96239E-1	-9.04706E0	-9.042E0	3.93391E-3	9.56297E-2	2.73547E1	-3.26634E1	-3.26566E1	2.68268E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.79931E-1	-8.96025E-1	-9.04706E0	-9.04191E0	4.36306E-3	9.59635E-2	2.73299E1	-3.26703E1	-3.26313E1	2.6843E1	1.20031E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98554E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.79908E-1	-8.96144E-1	-9.04708E0	-9.04198E0	3.98159E-3	9.62734E-2	2.73275E1	-3.2629E1	-3.25859E1	2.6831E1	1.2026E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09711E0	-8.79931E-1	-8.96335E-1	-9.04763E0	-9.04193E0	4.00543E-3	9.60112E-2	2.73454E1	-3.26579E1	-3.26032E1	2.68401E1	1.20363E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.79908E-1	-8.96382E-1	-9.0472E0	-9.04179E0	3.88622E-3	9.58204E-2	2.73285E1	-3.2641E1	-3.26416E1	2.68244E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.03027E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.80098E-1	-8.96215E-1	-9.04706E0	-9.04162E0	3.98159E-3	9.60588E-2	2.7344E1	-3.26484E1	-3.26213E1	2.68478E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.80051E-1	-8.96311E-1	-9.04729E0	-9.04152E0	3.93391E-3	9.59873E-2	2.73027E1	-3.26446E1	-3.2608E1	2.68292E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.79979E-1	-8.96525E-1	-9.04703E0	-9.04155E0	4.14848E-3	9.58204E-2	2.73275E1	-3.2685E1	-3.25706E1	2.68502E1	1.19749E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.79979E-1	-8.96168E-1	-9.04713E0	-9.04183E0	4.12464E-3	9.59635E-2	2.73315E1	-3.26603E1	-3.26573E1	2.68175E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.97963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.80003E-1	-8.95953E-1	-9.0471E0	-9.04169E0	4.31538E-3	9.59635E-2	2.73322E1	-3.26484E1	-3.25871E1	2.68238E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.79955E-1	-8.96144E-1	-9.04706E0	-9.04193E0	4.17233E-3	9.57489E-2	2.73255E1	-3.26651E1	-3.26482E1	2.6849E1	1.19757E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.79979E-1	-8.96239E-1	-9.04672E0	-9.04202E0	4.26769E-3	9.56535E-2	2.73234E1	-3.26992E1	-3.25995E1	2.6828E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80122E-1	-8.96478E-1	-9.04691E0	-9.04222E0	4.05312E-3	9.56535E-2	2.73279E1	-3.26771E1	-3.25858E1	2.68454E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.80361E-1	-8.96335E-1	-9.04677E0	-9.04233E0	3.98159E-3	9.55343E-2	2.73182E1	-3.26545E1	-3.26146E1	2.68328E1	1.19861E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.8048E-1	-8.96358E-1	-9.04682E0	-9.04224E0	4.07696E-3	9.56297E-2	2.73687E1	-3.26656E1	-3.26812E1	2.68348E1	1.20177E-7	2.51783E-3	2.51783E-3	6.34385E-3	3.00494E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.80194E-1	-8.96168E-1	-9.04682E0	-9.04224E0	4.31538E-3	9.56535E-2	2.73434E1	-3.2675E1	-3.26178E1	2.68621E1	1.19963E-7	2.52029E-3	2.52029E-3	6.28967E-3	3.00761E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.80027E-1	-8.96525E-1	-9.0466E0	-9.04233E0	4.41074E-3	9.55343E-2	2.73193E1	-3.26655E1	-3.26201E1	2.68442E1	1.19749E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.97394E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.79931E-1	-8.96645E-1	-9.0467E0	-9.04205E0	4.1008E-3	9.56297E-2	2.73664E1	-3.26337E1	-3.26472E1	2.68366E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.79955E-1	-8.96597E-1	-9.04686E0	-9.04214E0	4.33922E-3	9.55105E-2	2.73171E1	-3.26639E1	-3.26044E1	2.6846E1	1.19825E-7	2.52008E-3	2.52008E-3	6.31009E-3	3.01866E-1