[Scan]
initial_time=2016-01-18T18:04:19
final_time=2016-01-18T18:04:38
ip_count=19
run=1024
dataset=3
scan=187
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33823E-8
ql2_vset=
ql2_vmon=-8.96859E-1
ql2_imon=1.92237E-9
ql3_vset=
ql3_vmon=-9.04729E0
ql3_imon=1.83082E-10
ql4_vset=
ql4_vmon=-9.04241E0
ql4_imon=3.63111E-11
mult1=-9.70427E-9
mult2=-2.71262E-9
rf_tmon=-6.03852E-3
rf_agc=3.15191E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.7239E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19612E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.84179E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02429E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.49477E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32655E0
lens1_imon=2.90074E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.47117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.94774E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.34085E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.2549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.34966E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.97982E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.34333E-8
tplens_vset=1.4E-1
tplens_vmon=1.68155E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26819E1
iondef3_imon=1.48569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26248E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03069E2
lens6_imon=2.97942E-4
ql6_vset=1.0E-1
ql6_vmon=9.6035E-2
ql6_imon=4.10252E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23322E0
ionrepsh_imon=1.79963E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48275E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=3.42058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.24856E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.92166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.68602E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.056E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24905E0
defgridb_imon=5.97295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.42756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65602E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=9.94371E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.59507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67275E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22842E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37378E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=219
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.80337E-1	-8.96668E-1	-9.04672E0	-9.04212E0	4.05312E-3	9.55105E-2	2.7311E1	-3.26549E1	-3.26225E1	2.68406E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.80075E-1	-8.96478E-1	-9.04679E0	-9.04191E0	4.17233E-3	9.55582E-2	2.73352E1	-3.26718E1	-3.26098E1	2.68472E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.8048E-1	-8.96478E-1	-9.04672E0	-9.04236E0	4.02927E-3	9.57727E-2	2.73111E1	-3.26452E1	-3.26398E1	2.6814E1	1.20293E-7	2.51393E-3	2.51393E-3	6.29684E-3	3.00348E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.80361E-1	-8.96382E-1	-9.04691E0	-9.04233E0	4.31538E-3	9.52721E-2	2.73316E1	-3.26756E1	-3.25906E1	2.6831E1	1.19646E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.80122E-1	-8.96311E-1	-9.04665E0	-9.04231E0	3.93391E-3	9.53197E-2	2.73363E1	-3.26651E1	-3.26344E1	2.68388E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.79979E-1	-8.96358E-1	-9.04708E0	-9.04212E0	4.24385E-3	9.5439E-2	2.73279E1	-3.26579E1	-3.26681E1	2.68376E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.80194E-1	-8.96597E-1	-9.04708E0	-9.04214E0	4.07696E-3	9.53436E-2	2.73093E1	-3.26464E1	-3.26092E1	2.68569E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.80122E-1	-8.96645E-1	-9.04729E0	-9.04222E0	3.93391E-3	9.55343E-2	2.7334E1	-3.26231E1	-3.26095E1	2.68478E1	1.19749E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.8017E-1	-8.96716E-1	-9.04741E0	-9.04205E0	3.83854E-3	9.52959E-2	2.72971E1	-3.26193E1	-3.26021E1	2.68526E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.80289E-1	-8.96502E-1	-9.04703E0	-9.04179E0	4.22001E-3	9.54628E-2	2.73129E1	-3.26573E1	-3.26272E1	2.68148E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.80194E-1	-8.96788E-1	-9.04713E0	-9.0421E0	4.22001E-3	9.54151E-2	2.73712E1	-3.26767E1	-3.25924E1	2.6836E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.80146E-1	-8.96788E-1	-9.04713E0	-9.04198E0	3.91006E-3	9.57012E-2	2.73169E1	-3.26472E1	-3.26166E1	2.68262E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.80218E-1	-8.96597E-1	-9.04717E0	-9.04191E0	4.19617E-3	9.56297E-2	2.73466E1	-3.26338E1	-3.26236E1	2.68436E1	1.20278E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.80814E-1	-8.96788E-1	-9.04725E0	-9.04191E0	4.12464E-3	9.57727E-2	2.73297E1	-3.26446E1	-3.26206E1	2.68388E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.80194E-1	-8.96478E-1	-9.04734E0	-9.04202E0	4.22001E-3	9.56535E-2	2.73435E1	-3.26603E1	-3.26506E1	2.68292E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.80146E-1	-8.96335E-1	-9.0471E0	-9.04226E0	4.00543E-3	9.57966E-2	2.73694E1	-3.26691E1	-3.26119E1	2.68118E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.80075E-1	-8.96645E-1	-9.04727E0	-9.04236E0	4.1008E-3	9.5439E-2	2.73514E1	-3.26801E1	-3.26284E1	2.68268E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.79908E-1	-8.96692E-1	-9.04729E0	-9.04198E0	4.12464E-3	9.58443E-2	2.73122E1	-3.26862E1	-3.26331E1	2.68597E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.80027E-1	-8.96597E-1	-9.04732E0	-9.04198E0	3.86238E-3	9.57489E-2	2.73357E1	-3.26711E1	-3.25924E1	2.684E1	1.20363E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.79979E-1	-8.96859E-1	-9.04729E0	-9.04241E0	4.24385E-3	9.6035E-2	2.73327E1	-3.26248E1	-3.26819E1	2.68298E1	1.2212E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.02396E-1