[Scan]
initial_time=2016-01-18T18:04:45
final_time=2016-01-18T18:05:05
ip_count=19
run=1024
dataset=3
scan=188
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.79979E-1
ql1_imon=1.33528E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.96527E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.34063E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=4.71711E-11
mult1=-9.63202E-9
mult2=-2.66272E-9
rf_tmon=-4.74675E-3
rf_agc=3.25465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.71986E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.22412E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.84073E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04692E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.53247E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34973E0
lens1_imon=2.55578E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.48775E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.94707E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.25238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.36123E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.06558E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.2026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91989E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=2.97522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20365E0
olens4_imon=3.35333E-8
tplens_vset=1.4E-1
tplens_vmon=1.6871E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.56774E-2
ql6_imon=4.10424E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.78552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55612E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.16289E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99548E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11257E1
os_restr2_imon=3.43013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.2409E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08508E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.23318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.87777E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.44329E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82724E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.54864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.17372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.42113E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30828E1
cs_fil1_imon=9.96269E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79456E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.50122E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.52404E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22725E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.21644E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40033E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59206E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80384E-1	-8.96525E-1	-9.04686E0	-9.04193E0	4.29153E-3	9.57727E-2	2.73346E1	-3.26921E1	-3.26411E1	2.68484E1	1.21653E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.79979E-1	-8.96788E-1	-9.04677E0	-9.04164E0	4.02927E-3	9.57489E-2	2.73051E1	-3.26321E1	-3.26474E1	2.68442E1	1.20466E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.79955E-1	-8.96525E-1	-9.0472E0	-9.04174E0	4.24385E-3	9.60112E-2	2.72796E1	-3.26776E1	-3.25936E1	2.68696E1	1.19872E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.00942E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.80003E-1	-8.96716E-1	-9.04713E0	-9.04181E0	4.33922E-3	9.55582E-2	2.72721E1	-3.26476E1	-3.2602E1	2.68148E1	1.20092E-7	2.50867E-3	2.50867E-3	6.33388E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.80146E-1	-8.96716E-1	-9.04696E0	-9.04167E0	4.52995E-3	9.59873E-2	2.72793E1	-3.26975E1	-3.2632E1	2.68418E1	1.20226E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.80122E-1	-8.96835E-1	-9.0471E0	-9.04162E0	4.64916E-3	9.56297E-2	2.73309E1	-3.26404E1	-3.26392E1	2.68478E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.80098E-1	-8.9674E-1	-9.04698E0	-9.04219E0	4.48227E-3	9.59635E-2	2.73694E1	-3.26182E1	-3.26116E1	2.68346E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.79979E-1	-8.96788E-1	-9.04706E0	-9.04207E0	4.45843E-3	9.61781E-2	2.73045E1	-3.26467E1	-3.26655E1	2.68424E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.8017E-1	-8.96573E-1	-9.04708E0	-9.04207E0	4.45843E-3	9.61542E-2	2.73309E1	-3.26518E1	-3.25461E1	2.68336E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.79908E-1	-8.9643E-1	-9.04727E0	-9.04181E0	4.52995E-3	9.62019E-2	2.73051E1	-3.26639E1	-3.26194E1	2.68259E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3514E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.80408E-1	-8.96549E-1	-9.0472E0	-9.04202E0	4.79221E-3	9.61542E-2	2.73393E1	-3.26452E1	-3.26308E1	2.68364E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.80194E-1	-8.96525E-1	-9.04703E0	-9.04214E0	4.8399E-3	9.60112E-2	2.73403E1	-3.26903E1	-3.26326E1	2.68434E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.80075E-1	-8.96525E-1	-9.0472E0	-9.04233E0	4.52995E-3	9.59396E-2	2.73207E1	-3.265E1	-3.2628E1	2.6829E1	1.20258E-7	2.52364E-3	2.52364E-3	6.31761E-3	3.01121E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.80194E-1	-8.96621E-1	-9.04725E0	-9.04188E0	4.74453E-3	9.59158E-2	2.72763E1	-3.26344E1	-3.26993E1	2.6831E1	1.20301E-7	2.51557E-3	2.51557E-3	6.34897E-3	3.02175E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.80075E-1	-8.96931E-1	-9.0472E0	-9.04193E0	4.76837E-3	9.58204E-2	2.73464E1	-3.26691E1	-3.26514E1	2.68855E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.80408E-1	-8.97074E-1	-9.04727E0	-9.042E0	4.62532E-3	9.58681E-2	2.73351E1	-3.26407E1	-3.26572E1	2.68253E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.80432E-1	-8.96907E-1	-9.04734E0	-9.04181E0	4.64916E-3	9.61542E-2	2.74296E1	-3.27605E1	-3.25358E1	2.68352E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.80218E-1	-8.97098E-1	-9.04682E0	-9.04219E0	4.88758E-3	9.56297E-2	2.73351E1	-3.26344E1	-3.26062E1	2.68424E1	1.20959E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.80027E-1	-8.96692E-1	-9.04663E0	-9.04191E0	4.50611E-3	9.56535E-2	2.73364E1	-3.26626E1	-3.26331E1	2.68196E1	1.21653E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.79979E-1	-8.96597E-1	-9.04682E0	-9.04188E0	4.07696E-3	9.56774E-2	2.73051E1	-3.26332E1	-3.25894E1	2.68412E1	1.21644E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1