[Scan]
initial_time=2016-01-18T18:06:05
final_time=2016-01-18T18:06:25
ip_count=19
run=1024
dataset=3
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08729E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.33203E-8
ql2_vset=
ql2_vmon=-8.96049E-1
ql2_imon=1.87405E-9
ql3_vset=
ql3_vmon=-9.04715E0
ql3_imon=1.87409E-10
ql4_vset=
ql4_vmon=-9.04217E0
ql4_imon=1.57475E-11
mult1=-9.80059E-9
mult2=-2.70065E-9
rf_tmon=-4.96905E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.64901E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5411E1
cs_ef1b_imon=2.83581E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=2.52814E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33951E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.95595E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.50325E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8445E1
cs_ef1a_imon=2.9567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11647E1
os_restr1_imon=4.24864E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.35654E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63592E1
os_ef1bup_imon=3.06598E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21905E0
cs_ionrep_imon=1.20152E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02108E1
cs_anode1_imon=2.99263E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.34453E-8
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.56237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03056E2
lens6_imon=2.98148E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=4.1299E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.78011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.12174E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53629E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70883E1
cs_ef2a_imon=3.15543E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07389E0
os_ef2alow_imon=-2.29736E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29444E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.42152E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01952E1
cs_anode2_imon=2.23438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68352E1
iondef4_imon=1.08541E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.18585E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.8932E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15572E0
cs_ionaccel_imon=-1.70229E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47245E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=2.5627E-1
window_imon=-8.1156E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39039E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.46355E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.41728E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07005E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65387E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.95721E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67429E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.5627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92216E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86288E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.5627E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22933E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.78721E-1
res40_imon=-2.51069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.80098E-1	-8.96335E-1	-9.04663E0	-9.04205E0	4.3869E-3	9.54151E-2	2.73741E1	-3.26644E1	-3.25759E1	2.6825E1	1.1966E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01742E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.80051E-1	-8.96215E-1	-9.04694E0	-9.04222E0	4.22001E-3	9.54151E-2	2.73461E1	-3.26652E1	-3.25911E1	2.68256E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80075E-1	-8.96239E-1	-9.04675E0	-9.0421E0	4.45843E-3	9.53913E-2	2.73294E1	-3.26521E1	-3.26399E1	2.68406E1	1.19809E-7	2.51552E-3	2.51552E-3	6.38459E-3	3.00302E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.80241E-1	-8.96168E-1	-9.0467E0	-9.04212E0	4.14848E-3	9.53436E-2	2.73309E1	-3.265E1	-3.26116E1	2.6837E1	1.19991E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80194E-1	-8.96358E-1	-9.04682E0	-9.04207E0	4.24385E-3	9.56059E-2	2.73462E1	-3.26677E1	-3.26422E1	2.6825E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.80218E-1	-8.96859E-1	-9.04667E0	-9.04198E0	3.91006E-3	9.51529E-2	2.73244E1	-3.26528E1	-3.26322E1	2.68388E1	1.19697E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.80289E-1	-8.96454E-1	-9.04677E0	-9.04195E0	4.07696E-3	9.52959E-2	2.72957E1	-3.26614E1	-3.25829E1	2.68322E1	1.19819E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.80384E-1	-8.96692E-1	-9.04689E0	-9.04191E0	3.86238E-3	9.54151E-2	2.7321E1	-3.26319E1	-3.26195E1	2.68528E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80146E-1	-8.96621E-1	-9.04698E0	-9.0421E0	4.31538E-3	9.53197E-2	2.7321E1	-3.26627E1	-3.2697E1	2.68606E1	1.20142E-7	2.51814E-3	2.51814E-3	6.34982E-3	2.98842E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.80075E-1	-8.96645E-1	-9.04698E0	-9.04205E0	3.83854E-3	9.5582E-2	2.73484E1	-3.26428E1	-3.25767E1	2.68238E1	1.20084E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99879E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.80098E-1	-8.96406E-1	-9.04706E0	-9.04202E0	3.91006E-3	9.57727E-2	2.7352E1	-3.26837E1	-3.25635E1	2.6852E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.80289E-1	-8.96454E-1	-9.04706E0	-9.04207E0	4.12464E-3	9.56297E-2	2.73375E1	-3.27056E1	-3.25782E1	2.68142E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.79836E-1	-8.96287E-1	-9.04708E0	-9.04229E0	4.29153E-3	9.55105E-2	2.73467E1	-3.26432E1	-3.26578E1	2.68178E1	1.20017E-7	2.52428E-3	2.52428E-3	6.28006E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.80003E-1	-8.96192E-1	-9.04715E0	-9.04207E0	3.91006E-3	9.56297E-2	2.73051E1	-3.26272E1	-3.26164E1	2.68184E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02396E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.80027E-1	-8.96478E-1	-9.04691E0	-9.04198E0	3.8147E-3	9.55105E-2	2.73364E1	-3.26708E1	-3.26024E1	2.681E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.7986E-1	-8.96478E-1	-9.04698E0	-9.04205E0	4.00543E-3	9.55582E-2	2.73045E1	-3.26825E1	-3.26693E1	2.6852E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.79908E-1	-8.96478E-1	-9.04684E0	-9.04236E0	3.95775E-3	9.53436E-2	2.73706E1	-3.26446E1	-3.26651E1	2.68256E1	1.19705E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.79955E-1	-8.96549E-1	-9.0471E0	-9.04205E0	4.26769E-3	9.55343E-2	2.73543E1	-3.26642E1	-3.25281E1	2.68623E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.79955E-1	-8.96192E-1	-9.04708E0	-9.042E0	4.24385E-3	9.57489E-2	2.73122E1	-3.26708E1	-3.2682E1	2.68267E1	1.2026E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.79741E-1	-8.96049E-1	-9.04715E0	-9.04217E0	4.24385E-3	9.57251E-2	2.72937E1	-3.26591E1	-3.26308E1	2.68352E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00197E-1