[Scan]
initial_time=2016-01-18T18:06:58
final_time=2016-01-18T18:07:18
ip_count=19
run=1024
dataset=3
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.80218E-1
ql1_imon=1.33715E-8
ql2_vset=
ql2_vmon=-8.96573E-1
ql2_imon=1.85583E-9
ql3_vset=
ql3_vmon=-9.0472E0
ql3_imon=2.03252E-10
ql4_vset=
ql4_vmon=-9.04171E0
ql4_imon=1.7786E-11
mult1=-9.43937E-9
mult2=-2.80644E-9
rf_tmon=-4.68066E-3
rf_agc=3.3664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.66671E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=2.01011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54181E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04703E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.52129E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65035E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.49244E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.94774E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.3425E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.25058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.34032E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=1.19323E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.97405E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.35655E-8
tplens_vset=1.4E-1
tplens_vmon=1.67568E0
tplens_imon=-4.65174E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27245E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27077E1
iondef2_imon=1.55841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03085E2
lens6_imon=2.98054E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=4.05393E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.78552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.15539E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52728E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04795E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.08328E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.18296E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.87461E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.53382E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8274E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=6.95382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.43549E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06759E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6558E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.94876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61639E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67204E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90284E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=3.01475E-1
chamber_ion_pmon=1.21098E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.59582E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.79931E-1	-8.96525E-1	-9.04696E0	-9.04224E0	4.81606E-3	9.60827E-2	2.73334E1	-3.26561E1	-3.25912E1	2.68388E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.99E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.80194E-1	-8.96549E-1	-9.04696E0	-9.04202E0	4.60148E-3	9.6035E-2	2.73222E1	-3.26866E1	-3.25715E1	2.68454E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.80265E-1	-8.96478E-1	-9.04708E0	-9.04207E0	4.36306E-3	9.57966E-2	2.73222E1	-3.2652E1	-3.26213E1	2.6837E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.80551E-1	-8.96454E-1	-9.04696E0	-9.04231E0	4.64916E-3	9.58681E-2	2.73105E1	-3.26446E1	-3.26645E1	2.68557E1	1.19851E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.80194E-1	-8.96502E-1	-9.04696E0	-9.04205E0	4.36306E-3	9.57489E-2	2.73139E1	-3.26408E1	-3.25605E1	2.68166E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.80146E-1	-8.96502E-1	-9.04698E0	-9.04198E0	4.45843E-3	9.59158E-2	2.7301E1	-3.26756E1	-3.24892E1	2.68482E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.79931E-1	-8.96478E-1	-9.04703E0	-9.04219E0	4.62532E-3	9.56297E-2	2.7355E1	-3.26771E1	-3.27083E1	2.68286E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.79836E-1	-8.96788E-1	-9.04696E0	-9.042E0	4.55379E-3	9.56297E-2	2.73273E1	-3.2641E1	-3.25533E1	2.68316E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.79979E-1	-8.96478E-1	-9.0471E0	-9.042E0	4.26769E-3	9.59396E-2	2.72821E1	-3.26189E1	-3.26384E1	2.68623E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09286E0	-8.8017E-1	-8.96406E-1	-9.04701E0	-9.04207E0	4.17233E-3	9.59396E-2	2.73213E1	-3.26729E1	-3.25557E1	2.68424E1	1.20209E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.80075E-1	-8.96525E-1	-9.04706E0	-9.04183E0	4.24385E-3	9.56059E-2	2.73448E1	-3.26344E1	-3.25617E1	2.68298E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09325E0	-8.80003E-1	-8.96549E-1	-9.04739E0	-9.0421E0	3.98159E-3	9.53197E-2	2.73334E1	-3.2652E1	-3.26691E1	2.68328E1	1.20069E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.80051E-1	-8.96764E-1	-9.04717E0	-9.04222E0	4.22001E-3	9.5439E-2	2.73614E1	-3.26756E1	-3.24864E1	2.68358E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80456E-1	-8.96621E-1	-9.0472E0	-9.04188E0	4.12464E-3	9.57251E-2	2.73594E1	-3.26614E1	-3.25918E1	2.68142E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.03185E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.79908E-1	-8.96645E-1	-9.04722E0	-9.04174E0	3.98159E-3	9.54866E-2	2.73398E1	-3.26744E1	-3.2766E1	2.68513E1	1.20174E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.79955E-1	-8.96502E-1	-9.04677E0	-9.04198E0	3.95775E-3	9.56297E-2	2.73006E1	-3.26714E1	-3.27169E1	2.684E1	1.21775E-7	2.52058E-3	2.52058E-3	6.33809E-3	3.02831E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.79908E-1	-8.96859E-1	-9.04665E0	-9.04176E0	3.95775E-3	9.59635E-2	2.73417E1	-3.26675E1	-3.25527E1	2.68226E1	1.21663E-7	2.52502E-3	2.52502E-3	6.33706E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80075E-1	-8.96883E-1	-9.04703E0	-9.04162E0	4.00543E-3	9.58681E-2	2.73034E1	-3.2666E1	-3.24429E1	2.68435E1	1.2212E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.80027E-1	-8.96907E-1	-9.04713E0	-9.04174E0	4.00543E-3	9.58204E-2	2.73207E1	-3.26536E1	-3.259E1	2.6825E1	1.2212E-7	2.51814E-3	2.51814E-3	6.34982E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.80218E-1	-8.96573E-1	-9.0472E0	-9.04171E0	3.98159E-3	9.56297E-2	2.73435E1	-3.27077E1	-3.27245E1	2.68382E1	1.21098E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.01475E-1