[Scan]
initial_time=2016-01-18T18:07:52
final_time=2016-01-18T18:08:11
ip_count=19
run=1024
dataset=3
scan=195
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.79669E-1
ql1_imon=1.3369E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.93757E-9
ql3_vset=
ql3_vmon=-9.04713E0
ql3_imon=1.12975E-10
ql4_vset=
ql4_vmon=-9.04191E0
ql4_imon=1.05858E-11
mult1=-9.45207E-9
mult2=-2.74285E-9
rf_tmon=-4.26762E-3
rf_agc=3.30731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.66963E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66854E0
bslens_imon=2.29983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=2.00759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54091E1
cs_ef1b_imon=2.83386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=2.53283E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3287E0
lens1_imon=2.82975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.49172E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.93188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.34696E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.24517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.36736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20523E0
cs_ionrep_imon=1.17015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93752E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.35399E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.49208E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=4.05998E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.77975E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.475E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.42202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.16781E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.87811E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-8.3554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.39145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.43315E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06404E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65686E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94978E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67468E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0314E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.79645E-1	-8.96287E-1	-9.04691E0	-9.04183E0	4.29153E-3	9.56535E-2	2.73103E1	-3.26619E1	-3.25235E1	2.68395E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.79741E-1	-8.96287E-1	-9.04717E0	-9.04148E0	4.22001E-3	9.5892E-2	2.73406E1	-3.26463E1	-3.28247E1	2.68204E1	1.19891E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.79931E-1	-8.96239E-1	-9.04701E0	-9.04143E0	4.3869E-3	9.56059E-2	2.73468E1	-3.26921E1	-3.26225E1	2.68209E1	1.20079E-7	2.5159E-3	2.5159E-3	6.31666E-3	3.00285E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.80075E-1	-8.96382E-1	-9.04691E0	-9.04198E0	4.12464E-3	9.56059E-2	2.73514E1	-3.26254E1	-3.24386E1	2.68466E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.79598E-1	-8.96049E-1	-9.04715E0	-9.04164E0	4.36306E-3	9.54866E-2	2.73099E1	-3.26687E1	-3.25233E1	2.68466E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.79645E-1	-8.96478E-1	-9.04696E0	-9.04193E0	4.14848E-3	9.54151E-2	2.73249E1	-3.26651E1	-3.27047E1	2.68671E1	1.19861E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.79717E-1	-8.96168E-1	-9.04706E0	-9.04207E0	4.24385E-3	9.54628E-2	2.73405E1	-3.26777E1	-3.26278E1	2.6855E1	1.19809E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.79788E-1	-8.96239E-1	-9.0471E0	-9.04174E0	4.17233E-3	9.57489E-2	2.73219E1	-3.26597E1	-3.25545E1	2.68496E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.79645E-1	-8.96215E-1	-9.04713E0	-9.04214E0	4.05312E-3	9.55582E-2	2.73428E1	-3.26402E1	-3.2544E1	2.68424E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.79693E-1	-8.96525E-1	-9.04706E0	-9.04186E0	4.19617E-3	9.5439E-2	2.73257E1	-3.26455E1	-3.2734E1	2.68448E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.9892E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.79908E-1	-8.96406E-1	-9.04739E0	-9.04222E0	4.14848E-3	9.56059E-2	2.73437E1	-3.2697E1	-3.25501E1	2.6849E1	1.198E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09317E0	-8.80003E-1	-8.96406E-1	-9.04722E0	-9.0421E0	4.12464E-3	9.57012E-2	2.73309E1	-3.26699E1	-3.26651E1	2.68262E1	1.19713E-7	2.51693E-3	2.51693E-3	6.28511E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.80289E-1	-8.96788E-1	-9.04737E0	-9.04217E0	4.19617E-3	9.55582E-2	2.73237E1	-3.26615E1	-3.25125E1	2.68322E1	1.2033E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.79598E-1	-8.96573E-1	-9.04713E0	-9.04186E0	4.22001E-3	9.53913E-2	2.73189E1	-3.26723E1	-3.27245E1	2.68292E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80146E-1	-8.9643E-1	-9.04727E0	-9.042E0	4.29153E-3	9.54866E-2	2.73147E1	-3.26879E1	-3.25239E1	2.68454E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.79812E-1	-8.96263E-1	-9.04737E0	-9.04186E0	4.00543E-3	9.57012E-2	2.73275E1	-3.26561E1	-3.26248E1	2.6822E1	1.19653E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.79669E-1	-8.9643E-1	-9.04725E0	-9.04205E0	4.24385E-3	9.57251E-2	2.73432E1	-3.26812E1	-3.26243E1	2.6811E1	1.20106E-7	2.52599E-3	2.52599E-3	6.32896E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.79526E-1	-8.96478E-1	-9.04727E0	-9.04205E0	4.14848E-3	9.57251E-2	2.73594E1	-3.26666E1	-3.25692E1	2.68356E1	1.19831E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00741E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.79622E-1	-8.96597E-1	-9.04679E0	-9.04207E0	3.88622E-3	9.56774E-2	2.73311E1	-3.26986E1	-3.25835E1	2.68274E1	1.19721E-7	2.51952E-3	2.51952E-3	6.3245E-3	2.9971E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.79669E-1	-8.96382E-1	-9.04713E0	-9.04191E0	4.14848E-3	9.55105E-2	2.73541E1	-3.26443E1	-3.26136E1	2.68154E1	1.20055E-7	2.52707E-3	2.52707E-3	6.32896E-3	3.0148E-1