[Scan]
initial_time=2016-01-18T18:09:11
final_time=2016-01-18T18:09:31
ip_count=19
run=1024
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.80027E-1
ql1_imon=1.33706E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.90732E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.27244E-10
ql4_vset=
ql4_vmon=-9.04169E0
ql4_imon=7.65324E-12
mult1=-9.35509E-9
mult2=-2.69067E-9
rf_tmon=-5.34156E-3
rf_agc=3.28589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.69396E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.83926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.51919E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32242E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.49701E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.93549E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.34408E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.26319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=2.35744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.20183E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.98162E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.35672E-8
tplens_vset=1.4E-1
tplens_vmon=1.66798E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98148E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.07606E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28985E0
ionrepsh_imon=1.78193E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34023E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48865E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.14452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03594E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=3.42419E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.27875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.11122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.16849E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.88289E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82712E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.08078E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.42953E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=5.94463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.42805E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0659E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65778E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.96402E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61951E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67289E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84071E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2283E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24764E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.80241E-1	-8.96478E-1	-9.04679E0	-9.04176E0	4.02927E-3	9.56535E-2	2.73086E1	-3.2652E1	-3.2616E1	2.68134E1	1.19965E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01871E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.8017E-1	-8.96525E-1	-9.04677E0	-9.04143E0	4.24385E-3	9.56535E-2	2.73123E1	-3.26705E1	-3.27173E1	2.6846E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.79765E-1	-8.9643E-1	-9.04708E0	-9.04148E0	4.36306E-3	9.58443E-2	2.73405E1	-3.2675E1	-3.25871E1	2.68346E1	1.19757E-7	2.51225E-3	2.51225E-3	6.34588E-3	2.9926E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09688E0	-8.79693E-1	-8.96406E-1	-9.04698E0	-9.04188E0	4.29153E-3	9.57727E-2	2.73255E1	-3.26458E1	-3.27275E1	2.6825E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.79931E-1	-8.96263E-1	-9.04689E0	-9.04183E0	4.45843E-3	9.57489E-2	2.73187E1	-3.26443E1	-3.25605E1	2.68458E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.80003E-1	-8.96382E-1	-9.04675E0	-9.04222E0	4.31538E-3	9.56297E-2	2.73033E1	-3.26464E1	-3.27017E1	2.68328E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.79908E-1	-8.96239E-1	-9.04655E0	-9.0415E0	4.07696E-3	9.56535E-2	2.73285E1	-3.26663E1	-3.24932E1	2.68617E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.79598E-1	-8.9643E-1	-9.04691E0	-9.0416E0	3.95775E-3	9.59635E-2	2.73198E1	-3.26649E1	-3.26396E1	2.68442E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.79931E-1	-8.96358E-1	-9.04717E0	-9.04191E0	4.24385E-3	9.56297E-2	2.73189E1	-3.26434E1	-3.2611E1	2.68238E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.80146E-1	-8.96168E-1	-9.04677E0	-9.04167E0	4.3869E-3	9.56774E-2	2.73417E1	-3.26777E1	-3.25329E1	2.68424E1	1.19601E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.80051E-1	-8.96168E-1	-9.04686E0	-9.04169E0	4.3869E-3	9.5582E-2	2.73476E1	-3.26673E1	-3.27139E1	2.68123E1	1.21908E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.79765E-1	-8.9612E-1	-9.04701E0	-9.04179E0	4.45843E-3	9.57251E-2	2.72877E1	-3.26633E1	-3.25305E1	2.6849E1	1.2186E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01995E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.80003E-1	-8.96001E-1	-9.04682E0	-9.04174E0	3.98159E-3	9.56297E-2	2.72955E1	-3.26597E1	-3.27239E1	2.68478E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80051E-1	-8.9643E-1	-9.0471E0	-9.04157E0	4.12464E-3	9.58204E-2	2.7311E1	-3.26673E1	-3.257E1	2.68316E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.98156E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.80027E-1	-8.96525E-1	-9.04684E0	-9.04191E0	4.41074E-3	9.5892E-2	2.73293E1	-3.2662E1	-3.26673E1	2.68088E1	1.20278E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.80098E-1	-8.96382E-1	-9.04682E0	-9.0421E0	4.00543E-3	9.56774E-2	2.73277E1	-3.26774E1	-3.25972E1	2.68382E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.79693E-1	-8.96454E-1	-9.04703E0	-9.04191E0	3.95775E-3	9.54866E-2	2.7311E1	-3.26596E1	-3.2626E1	2.68285E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03712E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.79812E-1	-8.96144E-1	-9.04691E0	-9.04169E0	4.31538E-3	9.55582E-2	2.72991E1	-3.26428E1	-3.25894E1	2.68322E1	1.19653E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.79931E-1	-8.96096E-1	-9.04682E0	-9.04174E0	4.24385E-3	9.52959E-2	2.73234E1	-3.26838E1	-3.2577E1	2.6852E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.80027E-1	-8.96597E-1	-9.04682E0	-9.04169E0	4.14848E-3	9.54866E-2	2.73424E1	-3.26915E1	-3.26236E1	2.68466E1	1.19941E-7	2.52342E-3	2.52342E-3	6.3445E-3	3.01104E-1