[Scan]
initial_time=2016-01-18T18:09:38
final_time=2016-01-18T18:09:57
ip_count=19
run=1024
dataset=3
scan=199
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.79955E-1
ql1_imon=1.33287E-8
ql2_vset=
ql2_vmon=-8.96621E-1
ql2_imon=1.8855E-9
ql3_vset=
ql3_vmon=-9.04701E0
ql3_imon=1.22881E-10
ql4_vset=
ql4_vmon=-9.04191E0
ql4_imon=1.2517E-11
mult1=-9.34305E-9
mult2=-2.78448E-9
rf_tmon=-4.02576E-3
rf_agc=3.46914E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.66782E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67614E0
bslens_imon=2.36433E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19573E1
lens5a_imon=2.00652E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04965E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.82648E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.53733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37951E0
lens1_imon=2.59376E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64672E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03366E1
cs_ea2_imon=1.50838E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94116E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.34704E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.26107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15132E1
os_ea1_imon=2.3743E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22545E0
cs_ionrep_imon=1.18335E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93649E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=2.97731E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.35622E-8
tplens_vset=1.4E-1
tplens_vmon=1.67272E0
tplens_imon=-4.54874E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.51011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.57408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98315E-4
ql6_vset=1.0E-1
ql6_vmon=9.56059E-2
ql6_imon=4.11642E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28802E0
ionrepsh_imon=1.78856E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33889E1
lens5b_imon=2.17476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54352E0
os_ea2_imon=-5.03541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00859E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11297E1
os_restr2_imon=3.42005E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28816E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.2482E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73466E1
iondef1_imon=1.11487E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68456E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.07683E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.85889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1869E0
cs_ionaccel_imon=-1.83783E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47459E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-7.91778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.8646E1
mask2_imon=-6.07589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.4083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.26811E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.16844E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53121E0
defgridb_imon=5.96568E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.41325E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08476E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65772E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30846E1
cs_fil1_imon=9.96107E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62679E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67127E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44405E-2
os_fil2_imon=-2.61126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.52438E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.44726E-1
res40_imon=-2.55026E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.80218E-1	-8.96621E-1	-9.04682E0	-9.04188E0	4.17233E-3	9.57012E-2	2.73328E1	-3.26968E1	-3.26933E1	2.68076E1	1.20042E-7	2.51919E-3	2.51919E-3	6.34982E-3	2.99594E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.80241E-1	-8.96716E-1	-9.04698E0	-9.04195E0	4.29153E-3	9.55582E-2	2.73706E1	-3.26566E1	-3.25861E1	2.68244E1	1.19941E-7	2.51182E-3	2.51182E-3	6.30212E-3	2.98342E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.79955E-1	-8.96358E-1	-9.04686E0	-9.04162E0	4.29153E-3	9.56297E-2	2.73016E1	-3.26437E1	-3.26248E1	2.68441E1	1.20045E-7	2.52521E-3	2.52521E-3	6.3074E-3	2.97823E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.80027E-1	-8.96478E-1	-9.04694E0	-9.04164E0	4.26769E-3	9.55343E-2	2.73016E1	-3.26419E1	-3.26065E1	2.68184E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.80432E-1	-8.96382E-1	-9.04732E0	-9.042E0	4.1008E-3	9.55343E-2	2.73069E1	-3.26579E1	-3.2653E1	2.68016E1	1.20487E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.811E-1	-8.96502E-1	-9.0467E0	-9.04205E0	3.88622E-3	9.5582E-2	2.73175E1	-3.26396E1	-3.25918E1	2.68314E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.80289E-1	-8.96764E-1	-9.04684E0	-9.04179E0	4.31538E-3	9.57012E-2	2.73231E1	-3.26939E1	-3.26398E1	2.68263E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.80051E-1	-8.96692E-1	-9.04694E0	-9.04183E0	3.88622E-3	9.57966E-2	2.73291E1	-3.26344E1	-3.2602E1	2.68233E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.80218E-1	-8.96549E-1	-9.04684E0	-9.04148E0	4.05312E-3	9.54866E-2	2.73328E1	-3.2672E1	-3.25971E1	2.68346E1	1.198E-7	2.50989E-3	2.50989E-3	6.29665E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.80218E-1	-8.96573E-1	-9.04667E0	-9.04171E0	4.02927E-3	9.57251E-2	2.73244E1	-3.2655E1	-3.26482E1	2.68445E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.80146E-1	-8.96358E-1	-9.04665E0	-9.04191E0	4.07696E-3	9.59396E-2	2.73248E1	-3.26973E1	-3.25872E1	2.68108E1	1.19979E-7	2.52197E-3	2.52197E-3	6.31779E-3	3.00494E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.80122E-1	-8.96335E-1	-9.04684E0	-9.04202E0	4.1008E-3	9.58204E-2	2.73381E1	-3.26488E1	-3.26068E1	2.68136E1	1.20019E-7	2.51321E-3	2.51321E-3	6.33112E-3	2.99073E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.79955E-1	-8.96263E-1	-9.0472E0	-9.04183E0	4.29153E-3	9.58681E-2	2.73357E1	-3.26813E1	-3.2626E1	2.6819E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.79931E-1	-8.96144E-1	-9.04682E0	-9.0416E0	4.22001E-3	9.58204E-2	2.72967E1	-3.2629E1	-3.26272E1	2.68136E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01609E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.80122E-1	-8.96382E-1	-9.04708E0	-9.04188E0	4.41074E-3	9.5582E-2	2.73339E1	-3.2638E1	-3.25918E1	2.68418E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.03449E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.79622E-1	-8.96192E-1	-9.0472E0	-9.04202E0	4.29153E-3	9.57251E-2	2.73315E1	-3.26512E1	-3.2632E1	2.68394E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02511E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.79598E-1	-8.96573E-1	-9.0472E0	-9.04193E0	4.81606E-3	9.56535E-2	2.73428E1	-3.26767E1	-3.26502E1	2.68482E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.79788E-1	-8.96382E-1	-9.04715E0	-9.04198E0	4.41074E-3	9.56297E-2	2.73771E1	-3.26785E1	-3.26195E1	2.68232E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.79979E-1	-8.96525E-1	-9.04701E0	-9.04222E0	4.24385E-3	9.5439E-2	2.73446E1	-3.2636E1	-3.26065E1	2.68453E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.79955E-1	-8.96621E-1	-9.04701E0	-9.04191E0	3.95775E-3	9.56059E-2	2.73466E1	-3.26741E1	-3.2611E1	2.68456E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.02253E-1