[Scan]
initial_time=2016-01-18T18:11:51
final_time=2016-01-18T18:12:10
ip_count=19
run=1024
dataset=3
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.0884E-4
ql1_vset=
ql1_vmon=-8.79717E-1
ql1_imon=1.3367E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.89195E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=1.26398E-10
ql4_vset=
ql4_vmon=-9.04236E0
ql4_imon=-2.18153E-12
mult1=-9.33059E-9
mult2=-2.67304E-9
rf_tmon=-4.1712E-3
rf_agc=3.38002E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.72937E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.2778E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=2.00633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=2.83025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04675E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.52026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.4917E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.94918E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.34692E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.36948E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19085E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.99243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.35008E-8
tplens_vset=1.4E-1
tplens_vmon=1.66031E0
tplens_imon=-1.67929E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26187E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=4.09499E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=1.79114E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.16808E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52817E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00485E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.42022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73247E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68447E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.14603E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.88793E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82711E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.22778E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.43105E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.95735E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62786E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75845E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.96533E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.80122E-1	-8.96049E-1	-9.04708E0	-9.04183E0	4.41074E-3	9.57727E-2	2.73261E1	-3.26603E1	-3.26434E1	2.68376E1	1.20042E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.01356E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.80051E-1	-8.96239E-1	-9.0472E0	-9.04198E0	4.1008E-3	9.57489E-2	2.73002E1	-3.2675E1	-3.26193E1	2.68106E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80361E-1	-8.96502E-1	-9.04665E0	-9.04186E0	4.14848E-3	9.57489E-2	2.73439E1	-3.26451E1	-3.26214E1	2.684E1	1.20084E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.02545E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.79931E-1	-8.96311E-1	-9.04663E0	-9.04181E0	4.31538E-3	9.57489E-2	2.73423E1	-3.26679E1	-3.26508E1	2.68448E1	1.19953E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.80051E-1	-8.96263E-1	-9.04701E0	-9.042E0	4.31538E-3	9.57251E-2	2.73511E1	-3.26638E1	-3.26325E1	2.68172E1	1.19941E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.80098E-1	-8.96311E-1	-9.04732E0	-9.0416E0	4.26769E-3	9.56059E-2	2.73068E1	-3.26651E1	-3.25653E1	2.68443E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80051E-1	-8.9643E-1	-9.04717E0	-9.04188E0	4.22001E-3	9.59873E-2	2.73021E1	-3.26849E1	-3.26296E1	2.68412E1	1.20009E-7	2.51611E-3	2.51611E-3	6.31499E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.8017E-1	-8.96382E-1	-9.04686E0	-9.04222E0	3.93391E-3	9.59396E-2	2.73086E1	-3.26502E1	-3.2626E1	2.68364E1	1.198E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.80122E-1	-8.96382E-1	-9.0471E0	-9.04222E0	4.17233E-3	9.56059E-2	2.73135E1	-3.26621E1	-3.25966E1	2.68382E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.80027E-1	-8.96311E-1	-9.04701E0	-9.04214E0	4.14848E-3	9.56059E-2	2.73369E1	-3.26825E1	-3.26086E1	2.68376E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.80003E-1	-8.96549E-1	-9.04706E0	-9.04207E0	3.93391E-3	9.57489E-2	2.73346E1	-3.26484E1	-3.26443E1	2.68296E1	1.19554E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.79955E-1	-8.96525E-1	-9.04708E0	-9.04186E0	4.07696E-3	9.57966E-2	2.73213E1	-3.26146E1	-3.26585E1	2.6828E1	1.20293E-7	2.51814E-3	2.51814E-3	6.34982E-3	3.00348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.79765E-1	-8.96478E-1	-9.04679E0	-9.04202E0	4.1008E-3	9.57012E-2	2.73293E1	-3.2639E1	-3.26006E1	2.68412E1	1.20069E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.01085E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.80003E-1	-8.96096E-1	-9.04694E0	-9.04233E0	4.24385E-3	9.58443E-2	2.73181E1	-3.26626E1	-3.26136E1	2.68244E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0148E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.79884E-1	-8.96263E-1	-9.04698E0	-9.04176E0	4.07696E-3	9.56059E-2	2.73165E1	-3.26573E1	-3.26723E1	2.68364E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.79979E-1	-8.96406E-1	-9.04684E0	-9.04152E0	3.98159E-3	9.57251E-2	2.73303E1	-3.26645E1	-3.25882E1	2.68352E1	1.19697E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.00197E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.79788E-1	-8.96215E-1	-9.04698E0	-9.04222E0	4.14848E-3	9.56297E-2	2.73375E1	-3.26729E1	-3.26086E1	2.68436E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.80027E-1	-8.96549E-1	-9.04698E0	-9.04176E0	4.05312E-3	9.57251E-2	2.73016E1	-3.2567E1	-3.2593E1	2.68665E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.79598E-1	-8.96263E-1	-9.04727E0	-9.04241E0	4.07696E-3	9.56535E-2	2.73198E1	-3.26909E1	-3.26419E1	2.68621E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.79717E-1	-8.96358E-1	-9.04696E0	-9.04236E0	4.50611E-3	9.5439E-2	2.73247E1	-3.26187E1	-3.26378E1	2.68447E1	1.20055E-7	2.51739E-3	2.51739E-3	6.35059E-3	3.01223E-1